公开(公告)号：EP1547212A1

公开(公告)日：2005-06-29

申请号：EP02807702.2

申请日：2002-08-29

申请人： BASF AKTIENGESELLSCHAFT

发明人： LEYRER, Reinhold, J. ,  SCHÖPKE, Holger ,  HAMERS, CHRISTOPH

IPC分类号： H01S3/16

CPC分类号： C09K19/00 ,  C09K19/42 ,  H01S3/1305 ,  H01S3/137 ,  H01S3/1392 ,  H01S3/1686 ,  H01S5/0687

摘要： The present invention relates to a laser gain medium comprising at least one active species adapted to be stimulated to emit laser light within a predetermined wavelength range and optical feedback means defining a resonator for said laser light. The feedback means comprise at least one substantially solid cholesteric layer having a substantially planar texture exhibiting selective reflection of light defined by a reflection band tuned to said predetermined wavelength range.

公开(公告)号：EP0845166B1

公开(公告)日：2004-02-11

申请号：EP96928768.9

申请日：1996-08-16

申请人： TELEFONAKTIEBOLAGET LM ERICSSON

发明人： LAGERSTRÖM, Bo

IPC分类号： H01S5/068 ,  H01S3/139 ,  G01J9/02 ,  G02B6/16

CPC分类号： H01S5/0687 ,  H01S3/1392 ,  H01S5/06837

公开(公告)号：EP1330859A1

公开(公告)日：2003-07-30

申请号：EP01273238.4

申请日：2001-10-05

申请人： Cymer, Inc.

发明人： FOMENKOV, Igor, V. ,  ERIE, Frederick, G. ,  BUCK, Jesse, D. ,  DAS, Palash, P.

IPC分类号： H01S3/08 ,  H01S3/10

CPC分类号： H01S3/13 ,  G03F7/70025 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/0401 ,  H01S3/08059 ,  H01S3/0812 ,  H01S3/086 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/139 ,  H01S3/1392 ,  H01S3/225 ,  H01S3/2256

摘要： A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage, wavelength by controlling the position of an RMAX mirror and bandwidth is controlled by adjusting the curvature of a grating (82) to shapes more complicated than simple convex or simple concave. A preferred embodiment provides seven piezoelectric driven pressure-tension locations(84) on the back side of the grating(82) at 5 horizontal locations to produce shapes such as S shapes, W shapes and twisted shapes. Preferred embodiment include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt.

公开(公告)号：EP0995243A1

公开(公告)日：2000-04-26

申请号：EP98926368.6

申请日：1998-06-04

申请人： Cymer, Inc.

发明人： DAS, Palash, P. ,  SANDSTROM, Richard, L. ,  FOMENKOV, Igor

IPC分类号： H01S3/134

CPC分类号： H01S3/1303 ,  G01J9/00 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/03 ,  H01S3/134 ,  H01S3/1392 ,  H01S3/225

摘要： The invention uses known atomic or molecular absorptions as absolute wavelength standards for calibrating wavelength measurement instruments (105) used in tunable lasers (103). Examples of atomic and molecular absorptions are carbon and molecular oxygen that have absorptions including 193.0905 nm and 193.2728 nm, respectively, for use with a tunable Argon Fluoride excimer laser (103) at approximately 193 nm. A wavelength measuring device (e.g. a wavemeter (111)), is equipped with a gas cell (116) containing the absorption gas. During a calibration procedure, the wavelength measured by the wavemeter (111) is compared to the atomic or molecular absorption. The wavemeter's calibration constants are then adjusted accordingly to match the wavemeter's output to the atomic or molecular absorption wavelength. The use of multiple absorptions during calibration procedure enhances the precision of the procedure. After calibration, the laser (103) is tuned to the final wavelength of interest using the calibrated wavemeter (111).

公开(公告)号：EP0795120A4

公开(公告)日：2000-01-12

申请号：EP95903500

申请日：1994-08-31

申请人： CYMER INC

发明人： FOMENKOV IGOR

IPC分类号： G01J3/51 ,  G01J20060101 ,  G01J1/42 ,  G01J3/12 ,  G01J3/28 ,  G01J9/00 ,  H01S20060101 ,  H01S3/10 ,  H01S3/13 ,  H01S3/139 ,  H01S3/225

CPC分类号： H01S3/1303 ,  G01J3/12 ,  G01J9/00 ,  G01J2003/2866 ,  H01S3/1392

摘要： Calibration of a wavelength adjustment mechanism (104) of a laser is achieved using a hollow cathode absorption lamp (114). The lamp is provided with a vaporous material having a precisely known wavelength of maximum absorption. A photo-detector (130) detects the amount of light from the laser beam absorbed by the vaporous material as a function of wavelength. The wavelength of the laser is adjusted to achieve maximum absorption such that the actual laser beam wavelength may be compared with an expected wavelength to determine a calibration offset. The hollow cathode lamp (114) is operated to produce a vaporous material of known absorption characteristic but is illuminated at a level substantially below a level required for conventional opto-galvanic resonance.

公开(公告)号：EP0845166A1

公开(公告)日：1998-06-03

申请号：EP96928768.0

申请日：1996-08-16

申请人： TELEFONAKTIEBOLAGET LM ERICSSON

发明人： LAGERSTRÖM, Bo

IPC分类号： H01S3 ,  H01S5

CPC分类号： H01S5/0687 ,  H01S3/1392 ,  H01S5/06837

摘要： A laser wavelength control system (20) stabilizes laser output wavelength. The control system includes a reflector/filter device (40) upon which laser radiation is incident for yielding both a filtered-transmitted signal (FS) and a reflected signal (RS). A controller (45) uses both the filtered-transmitted signal (FS) and the reflected signal (RS) to generate a control signal (CS). The control signal is utilized by a temperature converter (100) to adjust laser output wavelength of the laser (22). In one embodiment, the reflector/filter device is an optical fiber grating. The wavelength control system facilitates construction of a modular optical multichannel transmission system (200).

公开(公告)号：EP0414194B1

公开(公告)日：1996-03-06

申请号：EP90115938.4

申请日：1990-08-20

申请人： ANRITSU CORPORATION

发明人： Ohtsu, Motoichi

IPC分类号： G04F5/14

CPC分类号： H01S3/1392 ,  G04F5/14 ,  H03L7/26

公开(公告)号：EP0094709A3

公开(公告)日：1984-04-25

申请号：EP83200651

申请日：1983-05-06

申请人： N.V. Philips' Gloeilampenfabrieken

发明人： Dil, Jan Gerard ,  van Hijningen, Nicolaas C. J. A.

IPC分类号： H01S03/13 ,  G01J09/02

CPC分类号： G01J9/02 ,  H01S3/1392

摘要： According to the invention, in a laser device the effective wave length of which is stabilized, the Fabry-Perot interferometer (15) which forms an effective wave length etalon is also used as a mode selector so that a simple, cheap multimode He-Ne laser can be used. Such a laser device can very readily be used in interferometers.

公开(公告)号：EP2800213B1

公开(公告)日：2017-08-02

申请号：EP14001535.5

申请日：2014-04-30

申请人： Mitutoyo Corporation

发明人： Yano, Ryunosuke

IPC分类号： H01S3/139

CPC分类号： H01S3/1305 ,  H01S3/025 ,  H01S3/08027 ,  H01S3/09415 ,  H01S3/109 ,  H01S3/1312 ,  H01S3/1392 ,  H01S3/1611 ,  H01S3/1673 ,  H01S5/06213 ,  H01S5/06804

公开(公告)号：EP3050181A4

公开(公告)日：2017-05-17

申请号：EP14848092

申请日：2014-09-26

申请人： KUMARAKRISHNAN ANANTHARAMAN ,  AFKHAMI-JEDDI NIMA ,  CAREW ADAM ,  VOROZCOVS ANDREJS ,  BEICA HERMINA

发明人： KUMARAKRISHNAN ANANTHARAMAN ,  AFKHAMI-JEDDI NIMA ,  CAREW ADAM ,  VOROZCOVS ANDREJS ,  BEICA HERMINA

IPC分类号： H01S3/131 ,  G01S7/484 ,  G01V7/00 ,  G09B19/00 ,  H01S3/04

CPC分类号： G01S7/484 ,  G09B23/06 ,  H01S3/1303 ,  H01S3/1307 ,  H01S3/1392 ,  H01S3/2383 ,  H01S5/0687 ,  H01S5/143