公开(公告)号：EP1411333B1

公开(公告)日：2006-03-08

申请号：EP02292544.0

申请日：2002-10-15

Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) ,  ECOLE POLYTECHNIQUE

Inventor： Drevillon, Bernard ,  De Martino, Antonello

IPC: G01J4/04 ,  G01N21/21

CPC classification number: G01J4/04 ,  G01N21/211

公开(公告)号：EP1368678A4

公开(公告)日：2003-12-10

申请号：EP02700829

申请日：2002-02-07

Applicant: DONAM SYSTEMS INC

Inventor： KOH YEON-WAN ,  LEE BONG-WAN ,  KIM JUNG-WON

IPC: G01J4/04 ,  G01J4/00 ,  G01M11/00 ,  G01M11/02 ,  G02B5/30 ,  G02B6/10

CPC classification number: G01M11/337 ,  G02B6/105

Abstract: Disclosed is an apparatus and method for measuring a changing amount of insertion loss of an optical device depending on a polarization state of an incident light, i.e., a polarization-dependent loss. An incident light that is periodically subject to all polarization states passes through a testing optical device by a polarization scrambler including a piezoelectric element type optical fiber birefringence modulator, and an optical detector measures intensity of the passing light, in which the measured intensity values are averaged for birefringence modulation having a constant period, and then the polarization-dependent loss is computed from a ratio of maximum power to minimum power for the period. Use of the birefringence modulator shortens measuring time, and decreases an affect of external disturbance to the incident light that is incident into the testing optical component or occurrence probability of the external disturbance, so that the polarization-dependent loss can be precisely measured.

公开(公告)号：EP1301764A1

公开(公告)日：2003-04-16

申请号：EP01949572.0

申请日：2001-06-28

Applicant: Société de Production et de Recherches Appliquées

Inventor： STEHLE, Jean-Louis ,  BOHER, Pierre ,  LUTTMANN, Michel

IPC: G01J4/04

CPC classification number: G01J4/04 ,  G01N21/211

Abstract: The invention concerns an ellipsometer comprising a source (S) supplying at least an infrared radiation, a sample-holder (PE), a sensor (D), a first optical system mounted between the source (S) and the sample-holder (PE), so as to illuminate a sample placed on the sample-holder, under oblique view with a polarised light beam and a second optical system mounted between the sample-holder (PE) and the sensor (D) for collecting the light reflected by the sample. The ellipsometer further comprises a blocking device (F2) mounted on the reflection path in the focal plane of the focusing device (M2) of the second optical system, and adapted to block parasite rays (RP) derived from the rear surface (FAR) of the sample and to allow through useful rays (RU) derived from the front surface (FAV) of the sample towards the sensor (D), thereby enabling to obtain a resolution with respect to the sample front and rear surfaces.

公开(公告)号：EP1118847A3

公开(公告)日：2003-04-02

申请号：EP01100646.7

申请日：2001-01-11

Applicant: A. Krüss Optronic GmbH

Inventor： Pannhoff, Helge

IPC: G01J4/04

CPC classification number: G01N21/21 ,  G01J4/00

Abstract: Die Erfindung bezieht sich auf ein Polarimeter zur Ermittlung von Eigenschaften einer Probe über Phasenauflösung und Fourieranalyse mit einer Quelle (1, 2, 3, 4, 5) für linear polarisierte Strahlung, einer Probenkammer zur Aufnahme der Polarimeterröhre (6) für die Probe, einen Analysator (7), der am Ausgang der Probenkammer (6) angeordnet ist, der das von der Probe optisch beeinflusste Licht erhält und der kontinuierlich drehbar ist, einen Motor mit Inkrementalgeber (10) als Antrieb für den Analysator (7), einen Detektor (9) mit Linse (8), der das vom Analysator (7) ausgegebene Signal hinsichtlich Analysatorstellung und Intensitätssignal erfasst und an einen Analog-Digitalwandler (11) abgibt, der von dem Inkrementalgeber (19) getriggert wird, und einen Rechner (12), der das Ausgangssignal vom Analog-Digitalwandler (11) erhält und über eine Fourieranalyse eine Aussage über die Eigenschaften der Probe macht.

公开(公告)号：EP1197741A2

公开(公告)日：2002-04-17

申请号：EP01204896.3

申请日：1997-07-22

Applicant: THERMA-WAVE INC.

Inventor： Aspnes , David E. ,  Ospal, Jon

IPC: G01N21/21 ,  G01J4/04 ,  G01B11/06

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01N21/211 ,  G01N2021/213

Abstract: An ellipsometer for analyzing a sample (2) using a broad range of wavelengths includes a light source (4) for generating a beam of polychromatic light for interacting with the sample (2). A polarizer (6) polarizes the light beam before the light beam (14) interacts with the sample (2). A rotating compensator (8) induces phase retardations of a polarization state of the light beam. The range of wavelengths and the compensator (8) are such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 90° to 180°. An analyzer (10) interacts with the light beam after the light beam interacts with the sample (2). A detector (12) measures the intensity of light after interacting with the analyzer (10) as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor (23) determines the polarization state of the light, after interacting with the analyzer (10), from the light intensities measured by the detector (12).

Abstract translation: 用于使用宽范围波长分析样品（2）的椭圆偏振仪包括用于产生用于与样品（2）相互作用的多色光束的光源（4）。 偏振器（6）在光束（14）与样本（2）相互作用之前使光束偏振。 旋转补偿器（8）引起光束的偏振状态的相位延迟。 波长范围和补偿器（8）使得至少第一相位延迟值被感应，该第一相位延迟值处于基本上90°至180°的有效延迟的主要范围内。 分析仪（10）在光束与样品（2）相互作用后与光束相互作用。 检测器（12）根据补偿器角度和波长（优选同时在所有波长）测量与分析器（10）相互作用后的光强度。 处理器（23）根据由检测器（12）测量的光强度在与分析器（10）相互作用之后确定光的偏振状态。

公开(公告)号：EP1000330A4

公开(公告)日：2001-11-21

申请号：EP98936981

申请日：1998-07-24

Applicant: HINDS INSTRUMENTS INC

Inventor： OAKBERG THEODORE C

IPC: G01B11/06 ,  G01J4/00 ,  G01J4/04 ,  G01M11/00 ,  G01N21/23

CPC classification number: G01N21/23

Abstract: A practical system and method for measuring waveplate retardation. The system employs a photoelastic modulator (22) in an optical setup and provides high sensitivity. The analysis is particularly appropriate for quality-control testing of waveplates (26). The system is also adaptable for slightly varying the retardation provided by a waveplate (26) (or any other retarder device) in a given optical setup. To this end, the waveplate (26) position may be precisely altered to introduce correspondingly precise adjustments of the retardation values that the waveplate (26) provides. The system is further refined to permit one to compensate for errors in the retardation measurements just mentioned. Such errors may be attributable to static birefringence present in the optical element of the photoelastic modulator (22) that is incorporated in the system.

公开(公告)号：EP1060369A1

公开(公告)日：2000-12-20

申请号：EP99934336.1

申请日：1999-02-17

Applicant: HINDS INSTRUMENTS, INC.

Inventor： WANG, Baoliang ,  OAKBERG, Theodore, C. ,  KADLEC, Paul

IPC: G01J4/04 ,  G01B9/02

CPC classification number: G01J4/04 ,  G01N21/23

Abstract: A practical system and method for precisely measuring low-level birefrigence properties (retardance and fast axis orientation) of optical materials (26). The system permits multiple measurements to be taken across the area of a sample to detect and graphically display (100) variations in the birefrigence properties across the sample area. In a preferred embodiment, the system incorporates a photoelastic modulator (24) for modulating polarized light that is then directed through a sample (26). The beam ('Bi') propagating from the sample is separated into two parts, with one part ('B1') having a polarization direction different than the polarization direction of the other beam part ('B2'). These separate beam parts are then processed as distinct channels. Detection mechanisms (32, 50) associated with each channel detect the time varying light intensity corresponding to each of the two parts of the beam. This information is combined for calculating a precise measure of the retardance induced by the sample, as well as the sample's fast axis orientation.

公开(公告)号：EP0632256B1

公开(公告)日：1998-08-26

申请号：EP93110277.6

申请日：1993-06-28

Applicant: International Business Machines Corporation ,  INSTITUT FÜR MIKROTECHNIK MAINZ GmbH

Inventor： Pokrowsky, Peter, Dr. ,  Kiefer, Eckehard, Dr. Dipl.-Chem. ,  Abraham, Michael, Dr. ,  Stenkamp, Bernd, Dipl.-Phys. ,  Ehrfeld, Wolfgang, Prof. Dr. ,  Zetterer, Thomas, Dr.

IPC: G01J4/04 ,  G01N21/21

CPC classification number: G01J4/04 ,  G01N21/211

公开(公告)号：EP0802407A3

公开(公告)日：1998-04-29

申请号：EP97106400.1

申请日：1997-04-17

Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA ,  Toyota School Foundation

Inventor： Suzuki, Takao ,  van Drent, William

IPC: G01N21/21 ,  G01N21/17 ,  G01J4/04

CPC classification number: G01N21/21

Abstract: An apparatus for measuring magneto-optical effect includes a light source 102, a spectroscope 120, a first polarizer 150 to polarize the light with a required wavelength taken out by the spectroscope 120, means 172 for applying magnetic field on a sample 176, a second polarizer 156 to admit the light transmitted or reflected by a sample 176 to pass, a photo-detector 162 for detecting intensity of light that has passed the second polarizer 156. The light source 102 includes a heavy hydrogen lamp and the spectroscope does not contain a lens and/or prism. A light path from the light source to the photo-detector is housed in a container, and the container is filled with a gas containing no oxygen.

Abstract translation: 用于测量磁光效应的装置包括光源102，分光镜120，使由分光镜120取出的所需波长的光偏振的第一偏振器150，用于在样本176上施加磁场的装置172，第二偏振器 偏振器156允许由样本176透射或反射的光通过，用于检测通过第二偏振器156的光强度的光电检测器162.光源102包括重氢灯，并且分光器不包含 透镜和/或棱镜。 从光源到光检测器的光路容纳在容器中，并且容器中填充有不含氧的气体。

公开(公告)号：EP0536985B1

公开(公告)日：1996-12-18

申请号：EP92309109.4

申请日：1992-10-07

Applicant: OPTICAL ACTIVITY LIMITED

Inventor： Norris, Harry ,  Horn, Jennifer Lynne

IPC: G01J4/04

CPC classification number: G01J4/04 ,  G01N21/21 ,  Y10S250/91