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    DETERMINING INTERACTION FORCES IN A DYNAMIC MODE AFM DURING IMAGING
    33.
    发明公开
    DETERMINING INTERACTION FORCES IN A DYNAMIC MODE AFM DURING IMAGING 审中-公开

    公开(公告)号：EP3338097A1

    公开(公告)日：2018-06-27

    申请号：EP16760818.1

    申请日：2016-08-17

    申请人： Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO

    发明人： SADEGHIAN MARNANI, Hamed ,  TAMER, Mehmet Selman

    IPC分类号： G01Q40/00 ,  G01Q60/34

    CPC分类号： G01Q40/00 ,  G01Q60/34

    摘要： A method and system for calibrating force (F12) in a dynamic mode atomic force microscope (AFM). An AFM tip (11) is disposed on a first cantilever (12). The first cantilever (12) is actuated to oscillate the AFM tip (11) in a dynamic mode. A first sensor (16) is configured to measure a first parameter (A1) of the oscillating AFM tip (11). A second sensor (26) is configured to measure a second parameter (A2) of a resilient element (22). The oscillating AFM tip (11) is moved in proximity to the resilient element (22) while measuring the first parameter (A1) of the AFM tip (11) and the second parameter (A2) of the resilient element (22). A force (F12) between the oscillating AFM tip (11) and the resilient element (22) is calculated based on the measured second parameter (A2) and a calibrated force constant (K2) of the resilient element (22).

    METHOD FOR MONITORING RADIUS AND SHAPE VARIATIONS OF ATOMIC FORCE MICROSCOPE CANTILEVER TIPS AND DEVICE THEREOF
    34.
    发明公开
    METHOD FOR MONITORING RADIUS AND SHAPE VARIATIONS OF ATOMIC FORCE MICROSCOPE CANTILEVER TIPS AND DEVICE THEREOF 审中-公开
    程序监测和RADIUS形状适应核电显微镜BOOM TIPS及其装置

    公开(公告)号：EP3078973A1

    公开(公告)日：2016-10-12

    申请号：EP15163207.2

    申请日：2015-04-10

    申请人： Consejo Superior de Investigaciones Cientificas (CSIC) ,  Delft University Of Technology

    发明人： Fraxedas Calduch, Jordi ,  Perez-Murano, Francesc ,  Staufer, Urs ,  Rull Trinidad, Enrique

    IPC分类号： G01Q40/00 ,  G01Q60/32

    CPC分类号： G01Q40/00 ,  G01Q60/32

    摘要： A method for monitoring radius and shape variations of the cantilever tips of atomic force microscopes AFM, the method envisages several embodiments and aspects of the invention aimed to the solve the problem of monitoring and assessing the shape of tips of cantilevers used in AFM. The method hereby described is applicable for the amplitude modulation mode of operation of an atomic force microscopes and based in the relationship between the tip characteristics and the determining the condition of the radius of the tip from the amplitude of at least one nth(s) harmonic wherein higher intensity of the value of the amplitude of the nth(s) harmonic implies higher values of the radius of the tip.

    摘要翻译： 一种用于监测原子力显微镜AFM的悬臂尖端的半径和形状的变化的方法，所述方法设想了若干实施例，旨在解决所述监测问题的和assesing在AFM用于悬臂的尖端的形状本发明的方面。 特此描述的方法适用于原子力显微镜的谐波的操作的振幅调制模式和基于在尖端特性和确定性采矿尖端的来自至少一个第n个的振幅半径的条件之间的关系（S） worin第n个（多个）谐波的幅值的值的较高强度意味着尖端的半径的更高的值。

    DISPOSITIF ET PROCEDE DE CARACTERISATION D'UN ECHANTILLON PAR DES MESURES LOCALISEES
    35.
    发明公开
    DISPOSITIF ET PROCEDE DE CARACTERISATION D'UN ECHANTILLON PAR DES MESURES LOCALISEES 审中-公开
    装置和方法用于对样品进行鉴定利用了局部测

    公开(公告)号：EP2877863A1

    公开(公告)日：2015-06-03

    申请号：EP13756599.0

    申请日：2013-07-25

    申请人： Horiba Jobin Yvon S.A.S.

    发明人： ACHER, Olivier ,  PODZOROV, Alexander

    IPC分类号： G01Q40/00 ,  G02B21/36 ,  G02B21/00 ,  B82Y35/00

    CPC分类号： H04N5/2354 ,  G01Q40/00 ,  G02B21/365

    摘要： The invention relates to a device (10) for characterizing a sample (11), comprising a measuring instrument (20) suitable for determining a physical characteristic of the sample at one point thereof. More specifically, the characterization device of the invention comprises a positioning system (30) suitable for positioning the measuring instrument in relation to the sample, in order to obtain a measurement at a measurement point localized on the sample, in an absolute manner. For this purpose, the invention provides a characterization device including a positioning system that comprises: a locating target (31) solidly connected to the sample and defining a reference system linked to the sample; means for acquiring and analysing images, comprising lighting means (321) for illuminating the locating target, an optical imaging system (322) solidly connected to the measuring instrument and suitable for acquiring an image (31P) of at least one portion of the locating target, and image analysis means (33) suitable for analysing the image of the portion of the locating target in order to determine the position and orientation of the optical imaging system in relation to the locating target; calibration means (34, 34A) for determining the relative position of the measuring instrument in relation to the optical imaging system; and processing means (13) for processing the results of the image analysis and of the calibration, suitable for determining the absolute position of the localized measurement point in the reference system linked to the sample, the measuring instrument being positioned to take the measurement at said localized measurement point and the physical characteristic of the sample being determined by the measuring instrument at the localized measurement point.

    摘要翻译： 设备用于表征样品包括用于确定性的采矿在其一个点上的样品的物理特性的测量仪器; 的定位系统用于相对测量仪器定位到样品中，以局部样品上的点获得测量。 该定位系统包括：定位目标连接到采样和限定与其连接的参考系统; 元件用于采集和分析图像，包括用于照亮目标的照明元件; 到连接到用于获取所述目标中的至少一个部分的图像测量仪光学成像系统; 和用于分析图像，以确定矿的位置和相对于目标的光学成像系统的定向图像分析元件; 校准元件，用于确定性采矿相对于光学成像系统中的测量仪器的位置; 和用于处理所述图像的分析和校准的结果的处理元件。

    PROBE CALIBRATION
    36.
    发明公开
    PROBE CALIBRATION 有权
    SONDENKALIBRIERUNG

    公开(公告)号：EP2810084A1

    公开(公告)日：2014-12-10

    申请号：EP12821147.1

    申请日：2012-12-21

    申请人： Nederlandse Organisatie voor Toegepast -Natuurwetenschappelijk Onderzoek TNO

    发明人： SADEGHIAN MARNANI, Hamed

    IPC分类号： G01Q40/00 ,  G01B21/04 ,  B82Y35/00

    CPC分类号： G01Q40/00

    摘要： The arrangement for calibrating probes comprises a source (10) of coherent photon radiation and at least one optically based strain sensor (12a) for measuring an amount of strain (ε). The at least one optically based strain sensor is optically coupled to said source of coherent photon radiation. The arrangement further comprises at least one calibration lever (14) having a surface for placement of a tip (21) of a probe (2) to be calibrated, and that is mechanically coupled to the at least one optically based strain sensor for converting a force (F) exerted by said tip at said surface into an amount of strain in the optically based strain sensor. The arrangement further comprises at least one probe holder (24) for holding the probe (2) to be calibrated, the at least one probe holder having a controllable position in at least a direction (y) transverse to the surface of the calibration lever (14). The arrangement further comprises a calibration control facility (46) for controlling said controllable position within a range of position values, and for determining a mechanical property of said probe from the measured amount of strain (ε) and a deflection (δc) of the tip (21) of the probe relative to the probe holder as a function of said position. The arrangement may be used as a stand-alone device or may be integrated in a device, such as an AFM-device. The arrangement may also be carried out as a batch-calibration device.

    摘要翻译： 用于校准探针的布置包括相干光子辐射源（10）和用于测量应变量（μ）的至少一个基于光学的应变传感器（12a）。 所述至少一个基于光学的应变传感器光耦合到所述相干光子辐射源。 该装置还包括至少一个校准杆（14），其具有用于放置待校准的探针（2）的尖端（21）的表面，并且机械耦合到至少一个基于光学的应变传感器，用于转换 所述尖端在所述表面施加的力（F）在光学基础应变传感器中的应变量。 该装置还包括用于保持要校准的探针（2）的至少一个探针保持器（24），所述至少一个探针保持器在至少横向于校准杆的表面的方向（y）上具有可控位置（ 14）。 该装置还包括校准控制设备（46），用于在位置值的范围内控制所述可控位置，并且用于根据测量的应变量（μ）和所测量的应变量（μ）来确定所述探头的机械性能 作为所述位置的函数的探针相对于探针支架的尖端（21）。 该装置可以用作独立设备，或者可以集成在诸如AFM设备的设备中。 该装置也可以作为批量校准装置进行。

    ELECTROSTATIC FORCE DETECTOR WITH CANTILEVER FOR AN ELECTROSTATIC FORCE MICROSCOPE
    40.
    发明公开
    ELECTROSTATIC FORCE DETECTOR WITH CANTILEVER FOR AN ELECTROSTATIC FORCE MICROSCOPE 有权
    ELEKTROSTATISCHERKRAFTMESSFÜHLERMIT FREITRAGENDEN AUSLEGERFÜREIN ELEKTRO-统计KRAFTMIKROSKOP

    公开(公告)号：EP1032828A4

    公开(公告)日：2001-05-09

    申请号：EP98955211

    申请日：1998-10-30

    申请人： TREK INC

    发明人： ITOH AKIYOSHI ,  NAKAGAWA KATSUJI ,  TANI MANABU ,  UEHARA TOSHIO ,  WILLIAMS BRUCE T

    IPC分类号： G01B7/34 ,  G01N27/60 ,  G01Q40/00 ,  G01Q60/30 ,  G01Q60/40 ,  G01R29/12 ,  G01N27/00

    CPC分类号： G01Q40/00 ,  G01Q60/30 ,  G01Q60/40 ,  Y10S977/852 ,  Y10S977/864

    摘要： An atomic force microscope using a cantilevered sensor (12) which is influenced by an electrostatic force given by the charge in the Unit Under Test (40). The cantilever sensor is preferably made of nickel foil. Both charge distribution and thickness of the sample are plotted in a 3D graph.

    摘要翻译： 静电力显微镜，其中施加到检测器的静电力是通过在几个不同形状的检测器上获得场分布来确定的，其中利用有限元法计算检测器附近的电压分布，以指示在绝对电荷量的测量下 测试，以便可以定义分析和平行板模型的结果之间的差异。 感兴趣的是电荷检测中的误差与要测试的介电材料的厚度变化一起发生多大。 提供了具有悬臂的检测器，其具有用于静电力显微镜的由镍箔制成的10mu的空间分辨率的适当形状，并且已经计算了出现在其上的静电力。