公开(公告)号：EP0516418A1

公开(公告)日：1992-12-02

申请号：EP92304846.6

申请日：1992-05-28

申请人： CANON KABUSHIKI KAISHA

发明人： Nakayama, Masaru, c/o Canon Kabushiki Kaisha ,  Hira, Yutaka, c/o Canon Kabushiki Kaisha ,  Yagi, Takayuki, c/o Canon Kabushiki Kaisha ,  Kasanuki, Yuji, c/o Canon Kabushiki Kaisha ,  Yamamoto, Keisuke, c/o Canon Kabushiki Kaisha ,  Shimada, Yasuhiro, c/o Canon Kabushiki Kaisha ,  Suzuki, Yoshio, c/o Canon Kabushiki Kaisha

IPC分类号： H01L41/09 ,  G01N27/00 ,  G11B9/00

CPC分类号： G01Q60/16 ,  G01Q10/04 ,  G01Q10/045 ,  G01Q70/06 ,  G01Q80/00 ,  G11B9/1436 ,  H01L41/094 ,  Y10T29/42

摘要： A probe-driving mechanism is shown with a bimorph cantilever having a thin piezoelectric substance film (5, 7) and electrodes (4, 6, 8) holding the film therebetween. The cantilever is supported by a support (1) at one end and has a probe for information input and output at the other. The probe-driving mechanism has a first insulating layer (2) between the support and the cantilever and a second insulating layer (2) at the other side of the support. The first insulating layer has sufficient thickness to reduce parasitic capacitance induced between the electrode of the cantilever and the support. A tunnel current-detecting apparatus and an information-processing apparatus comprise the probe-driving mechanism, respectively.

摘要翻译： 探针驱动机构被示出为具有薄的压电体膜（5,7）和电极（4,6，8）保持所述膜之间有双压电晶片悬臂。 悬臂是由支承件（1）在一个端部支撑，并且具有用于信息输入和输出在其它的探针。 探针驱动机构具有在载体和悬臂和在支持体的另一侧的第二绝缘层（2）之间的第一绝缘层（2）。 第一绝缘层具有足够的厚度，以减少所述悬臂和所述支撑件的电极之间感应寄生电容。 隧道电流检测装置和信息处理装置分别包括探针驱动机构。

公开(公告)号：EP0511763A2

公开(公告)日：1992-11-04

申请号：EP92303507.5

申请日：1992-04-21

申请人： CANON KABUSHIKI KAISHA

发明人： Takamatsu, Osamu, c/o Canon Kabushiki Kaisha ,  Hirai, Yutaka, c/o Canon Kabushiki Kaisha ,  Nakayama, Masaru, c/o Canon Kabushiki Kaisha ,  Yagi, Takayuki, c/o Canon Kabushiki Kaisha ,  Kasanuki, Yuji, c/o Canon Kabushiki Kaisha ,  Shimada, Yasuhiro, c/o Canon Kabushiki Kaisha

IPC分类号： G01N27/00 ,  G11B9/00

CPC分类号： G01Q60/16 ,  G01Q20/04 ,  G01Q80/00 ,  G11B9/1436 ,  Y10S977/837 ,  Y10S977/861 ,  Y10S977/872 ,  Y10S977/873 ,  Y10S977/875

摘要： The probe comprises a cantilever-shaped displacement element and a tip (108) which displacement element has a first electrode layer (105), a first piezoelectric material film (101) and a second piezoelectric material film (102) which films are laminated on respective sides of the first electrode layer, and a second electrode layer (106) and a third electrode layer (103) which layer are laminated on respective surfaces of the piezoelectric material films, and which tip is connected with a leader electrode located at a free end of the surface of the displacement element; wherein in the width direction of the cantilever both ends of the first electrode layer are more protruded out than each end of the second and third electrode layers does. A scanning tunneling microscopy comprises the cantilever type probe (205), a driving means (203) for displacing the probe, a stage for specimen so as to approach and locate the specimen (206) to the tip, and a potential applying means (201) for applying a bias voltage between the tip and the specimen. An information processing apparatus further comprises a second potential applying means (18) for applying a pulse and bias voltage between the tip (13) and the recording medium (14); wherein an information is written on the recording medium and an information in the recording medium is read out by electric current flowing between the tip and the recording medium.

摘要翻译： 一悬臂式探针包括悬臂形位移元件和移动元件具有第一电极层的末端，第一压电材料膜和第二压电材料薄膜层叠而成的薄膜上的第一电极层的respectivement侧面，以及第二 电极层和层被层叠在压电材料膜的表面respectivement的第三电极层，并且其前端与位于所述位移元件的所述表面的自由端的引导电极相连; worin在悬臂的第一电极层的两端的宽度方向上比所述第二和第三电极层确实的每个端部都更凸出出来。 扫描隧道显微镜包括所述悬臂式探针，探针的驱动装置，用于对样本移位，一个阶段以接近并定位在试样至尖端，和一个电位施加装置，用于在尖端和样品之间施加偏置电压 ， 一种信息处理设备进一步包括施加装置，用于施加所述尖端与记录介质之间的脉冲和偏置电压的第二电位; 的信息worin被写入在记录介质上，并在记录介质中的信息是由尖端与记录介质之间流动的电流读出。