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    FLAT SCANNING STAGE FOR SCANNED PROBE MICROSCOPY
    1.
    发明授权
    FLAT SCANNING STAGE FOR SCANNED PROBE MICROSCOPY 失效
    FLAT电网的扫描探针显微镜

    公开(公告)号：EP0864181B1

    公开(公告)日：2004-06-09

    申请号：EP96940813.7

    申请日：1996-11-27

    Applicant: Lieberman, Klony ,  LEWIS, Aaron

    Inventor： Lieberman, Klony ,  LEWIS, Aaron

    IPC: H01L41/09

    CPC classification number: G01Q10/04 ,  H02N2/028 ,  Y10S977/872

    Abstract: A three-dimensional scanner incorporates a flat stage for receiving samples. The stage is supported in a scanning frame by four identical quadrant tube piezo-electric scanner elements. Each element is fixed at one end to a fixed chassis and is fastened at its opposite end through a connector to the scanner frame. The scanner elements are operated in pairs to move the stage in an X-Y plane, and are operated together to move the stage in a Z direction perpendicular to the X-Y plane.

    Single stage microactuator for multidimensional actuation with multi-folded spring
    2.
    发明公开
    Single stage microactuator for multidimensional actuation with multi-folded spring 有权
    Einstufiger MikroantriebfürmehrdimensionaleBetätigungmit mehrfach gefalteter Feder

    公开(公告)号：EP1174995A3

    公开(公告)日：2003-12-17

    申请号：EP01116682.4

    申请日：2001-07-17

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Jeong, Hee-moon, Samsung Advanced Inst. of Techn. ,  Jeon, Jong Up, School of Mech. & Aut. Eng.,

    IPC: H02N1/00

    CPC classification number: H02N1/008 ,  B82Y10/00 ,  G11B9/1418 ,  Y10S977/872

    Abstract: A single stage microactuator for multidimensional actuation is provided. The single stage microactuator includes a substrate, a fixed plate electrode, a rectangular stage, a plurality of drive frame parts each having a plurality of drive frames, first spring parts each having a plurality of spring members and a plurality of spring holding members, a plurality of fixed frame parts, drive comb electrodes, fixed comb electrodes, and second spring parts. The microactuator enables multidirectional actuation with only one electrode and can be manufactured by a simple process without a need for an insulation process and coupling of motions in different directions does not occur due to multi-folded spring structure.

    Abstract translation: 提供了用于多维驱动的单级微致动器。 单级微型致动器包括基板，固定板电极，矩形台，多个驱动框架部件，每个具有多个驱动框架，第一弹簧部件各自具有多个弹簧部件和多个弹簧保持部件， 多个固定框架部件，驱动梳电极，固定梳电极和第二弹簧部件。 该微致动器能够仅使用一个电极进行多向致动，并且可以通过简单的工艺制造而不需要绝缘工艺，并且由于多折叠的弹簧结构不会发生不同方向的运动的联接。

    Scanning Probe Microscope
    4.
    发明公开
    Scanning Probe Microscope 有权
    扫描探针显微镜

    公开(公告)号：EP1055901A2

    公开(公告)日：2000-11-29

    申请号：EP00110273.0

    申请日：2000-05-22

    Applicant: JASCO CORPORATION ,  Japan Science and Technology Corporation ,  KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY

    Inventor： Narita, Yoshihito ,  Hisada, Hideho ,  Miyajima, Tatsuya ,  Saito, Osamu ,  Watanabe, Shinichiro ,  Saito, Shinya ,  Akutsu, Koji ,  Teruyama, Susumu ,  Ohtsu, Motoichi, Kanagawa Academy Science & Tech.

    IPC: G01B7/34

    CPC classification number: G01Q70/12 ,  G01Q10/02 ,  G01Q10/06 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/06 ,  G01Q60/22 ,  G01Q60/34 ,  G01Q60/38 ,  G01Q70/02 ,  Y10S977/851 ,  Y10S977/872

    Abstract: In a probe microscope 120 for causing a sample 112 and a tip portion 118a of a probe 118 on the sample side to approach each other, detecting an interaction between the sample 112 and the sample-side probe tip portion 118a, and obtaining surface information of the sample 112 from the interaction, the probe 118 being a flexible needle-like probe; the probe microscope 120 comprises vibrating means 122 capable of rotating the probe 118 while flexing the sample-side tip portion 118a thereof so as to draw a circle having a size corresponding to an increase and decrease in the interaction between the sample surface 112 and the tip portion 118a, and detecting means 124 for detecting the increase and decrease in the size of the circle drawn by the sample-side probe tip portion 118a due to the interaction and obtaining, from the increase and decrease in the size of the circle, information about the distance between the sample 112 and the sample-side probe tip portion 118a.

    Abstract translation: 在探针显微镜120中，使试样侧的探针118的试样112和尖端部118a接近，检测试样112与试样侧探针尖端部118a的相互作用，得到表面信息 来自相互作用的样本112，探针118是柔性针状探针; 探测显微镜120包括振动装置122，该振动装置能够在弯曲探针118的样本侧尖端部分118a的同时旋转探针118，从而绘制具有与样本表面112和尖端之间的相互作用的增加和减小相对应的尺寸的圆 部分118a和检测装置124，该检测装置124用于检测由于相互作用引起的由样本侧探针尖端部分118a画出的圆的大小的增大和减小，并且从圆的大小的增加和减小获得关于 样本112与样本侧探针尖端部分118a之间的距离。

    Apparatus for machining, recording, or reproducing, using scanning probe microscope
    7.
    发明公开
    Apparatus for machining, recording, or reproducing, using scanning probe microscope 失效
    Vorrichtung zur Materialbearbeitung，Datenaufzeichnung oder Datenwiedergabe mit Rastersondenmikroskop

    公开(公告)号：EP0871166A1

    公开(公告)日：1998-10-14

    申请号：EP98302889.5

    申请日：1998-04-09

    Applicant: Seiko Instruments Inc.

    Inventor： Tomita, Eisuke

    IPC: G11B9/00 ,  G01B7/34 ,  G01N27/00

    CPC classification number: G11B9/1454 ,  G01Q10/045 ,  G01Q80/00 ,  G11B9/1445 ,  Y10S977/851 ,  Y10S977/872

    Abstract: A machining, recording, or reproducing apparatus using a scanning probe microscope comprising: a probe 1 equipped with a probe tip at its front end, a vibration application portion consisting of a piezoelectric vibrating body 2 and an AC voltage-generating portion 3, a vibration-detecting portion consisting of a quartz oscillator 4 and a current/voltage amplifier circuit 5, a coarse displacement means 6 for bringing the probe close to a surface of a sample, a sample-to-probe distance control means consisting of a Z fine displacement element 11 and a Z servo circuit 12, a two-dimensional scanning means consisting of an XY fine displacement element 13 and an XY scanning circuit 14, and a data-processing means 15 for converting a measurement signal into a three-dimensional image. The probe 1 is held to the quartz oscillator 4 by resilient pressure.

    Abstract translation: 一种使用扫描探针显微镜的加工，记录或再现装置，包括：在其前端配备有探针尖端的探针1，由压电振动体2和交流电压产生部3组成的振动施加部，振动 由石英振荡器4和电流/电压放大器电路5组成的检测部分，用于使探针靠近样品表面的粗位移装置6，由Z精细位移构成的探针间距控制装置 元件11和Z伺服电路12，由XY精细位移元件13和XY扫描电路14构成的二维扫描装置，以及用于将测量信号转换为三维图像的数据处理装置15。 探头1通过弹性压力保持在石英振荡器4上。

    FLAT SCANNING STAGE FOR SCANNED PROBE MICROSCOPY
    8.
    发明公开
    FLAT SCANNING STAGE FOR SCANNED PROBE MICROSCOPY 失效
    FLAT电网的扫描探针显微镜

    公开(公告)号：EP0864181A1

    公开(公告)日：1998-09-16

    申请号：EP96940813.0

    申请日：1996-11-27

    Applicant: Lieberman, Klony ,  LEWIS, Aaron

    Inventor： Lieberman, Klony ,  LEWIS, Aaron

    IPC: G01B7 ,  G01N13 ,  G01N37 ,  G02B21 ,  H01L41

    CPC classification number: G01Q10/04 ,  H02N2/028 ,  Y10S977/872

    Abstract: A three-dimensional scanner incorporates a flat stage for receiving samples. The stage is supported in a scanning frame by four identical quadrant tube piezo-electric scanner elements. Each element is fixed at one end to a fixed chassis and is fastened at its opposite end through a connector to the scanner frame. The scanner elements are operated in pairs to move the stage in an X-Y plane, and are operated together to move the stage in a Z direction perpendicular to the X-Y plane.

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