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1.发明授权
公开(公告)号：EP0716417B1
公开(公告)日：2001-07-04
申请号：EP95119132.9
申请日：1995-12-05
CPC分类号： G11B9/1436 , G01Q80/00 , G11B5/40 , G11B19/04 , Y10S977/849 , Y10S977/851 , Y10S977/861 , Y10S977/872 , Y10S977/947 , Y10S977/953
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公开(公告)号：EP0537642B1
公开(公告)日：1999-01-07
申请号：EP92117292.0
申请日：1992-10-09
发明人： Shido, Shunichi, c/o Canon Kabushiki Kaisha , Hatanaka, Katsunori, c/o Canon Kabushiki Kaisha , Sakai, Kunihiro, c/o Canon Kabushiki Kaisha , Oguchi, Takahiro, c/o Canon Kabushiki Kaisha , Yamano, Akihiko, c/o Canon Kabushiki Kaisha
CPC分类号： G11B9/1454 , B82Y10/00 , Y10S977/861 , Y10S977/881 , Y10S977/947
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3.发明授权
公开(公告)号：EP0518240B1
公开(公告)日：1998-10-14
申请号：EP92109596.4
申请日：1992-06-05
发明人： Yamano, Akihiko, c/o Canon Kabushiki Kaisha , Hatanaka, Katsunori, c/o Canon Kabushiki Kaisha , Sakai, Kunihiro, c/o Canon Kabushiki Kaisha , Oguchi, Takahiro, c/o Canon Kabushiki Kaisha , Shido, Shunichi, c/o Canon Kabushiki Kaisha
IPC分类号： G11B9/00
CPC分类号： G11B9/14 , B82Y10/00 , Y10S977/849 , Y10S977/861 , Y10S977/881
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4.发明公开
公开(公告)号：EP0716417A3
公开(公告)日：1997-01-22
申请号：EP95119132.9
申请日：1995-12-05
CPC分类号： G11B9/1436 , G01Q80/00 , G11B5/40 , G11B19/04 , Y10S977/849 , Y10S977/851 , Y10S977/861 , Y10S977/872 , Y10S977/947 , Y10S977/953
摘要： An information processing apparatus, which utilizes a physical phenomenon occurring between a probe (101) and a sample (102) to detect information from the sample, includes a device (103,104) for moving the probe in order to adjust a clearance between the probe and the sample, a device for detecting a physical phenomenon occurring between the probe and the sample, a device (201,202) for generating a control signal for the moving device to change the clearance between the probe and the sample to a desired clearance, based on a result of detection of the detecting device, and a device (206) for applying an offset signal to the control signal in order that the probe can move with respect to a reference located at a position deviated from a center position of a movable range of the probe by means of the moving device.
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公开(公告)号：EP0383182B1
公开(公告)日：1996-05-01
申请号：EP90102414.1
申请日：1990-02-07
IPC分类号： G01N27/00
CPC分类号： G01Q60/16 , G01Q30/025 , G01Q70/02 , Y10S977/861
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公开(公告)号：EP0537642A3
公开(公告)日：1995-02-15
申请号：EP92117292.0
申请日：1992-10-09
发明人： Shido, Shunichi, c/o Canon Kabushiki Kaisha , Hatanaka, Katsunori, c/o Canon Kabushiki Kaisha , Sakai, Kunihiro, c/o Canon Kabushiki Kaisha , Oguchi, Takahiro, c/o Canon Kabushiki Kaisha , Yamano, Akihiko, c/o Canon Kabushiki Kaisha
CPC分类号： G11B9/1454 , B82Y10/00 , Y10S977/861 , Y10S977/881 , Y10S977/947
摘要： An information processing apparatus effects at least one of recording, reproduction and erasure of information on a recording medium (103) having a track groove (105) by use of a probe electrode (102). Relative movement between the probe electrode and the recording medium is effected by the moving mechanism (104). A predetermined driving signal is inputted to the moving mechanism so that a predetermined movement of the probe electrode to the groove track is effected. The physical phenomenon caused between the probe electrode and the recording medium is detected, so that the track groove is detected and a correction value for correcting the movement of the probe electrode from the driving signal on the basis of the timing of the detection. The moving mechanism is controlled on the basis of the driving signal and the correction value.
摘要翻译： 信息处理装置通过使用探针电极对具有轨道槽的记录介质进行信息的记录，再现和擦除中的至少一个。 探针电极和记录介质之间的相对移动由移动机构实现。 将预定的驱动信号输入到移动机构，使得探针电极到凹槽轨道的预定移动得以实现。 检测在探针电极和记录介质之间产生的物理现象，从而根据检测的定时检测轨迹槽和校正探针电极与驱动信号的移动的校正值。 基于驱动信号和校正值来控制移动机构。
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公开(公告)号：EP0587165A3
公开(公告)日：1995-01-25
申请号：EP93114502.3
申请日：1993-09-09
发明人： Oguchi, Takahiro, c/o Canon Kabushiki Kaisha , Hatanaka, Katsunori, c/o Canon Kabushiki Kaisha , Sakai, Kunihiro, c/o Canon Kabushiki Kaisha , Yamano, Akihiko, c/o Canon Kabushiki Kaisha , Shido, Shunichi, c/o Canon Kabushiki Kaisha
CPC分类号： G11B9/14 , G01Q70/06 , G01Q80/00 , Y10S977/849 , Y10S977/861 , Y10S977/874 , Y10S977/943 , Y10S977/953
摘要： An information processing apparatus is provided with a plurality of probes (101i) facing a sample, a signal detection circuit (103), a selection circuit (102) and a memory circuit. The signal detection circuit is selectively connected to the plurality of probes by the selection circuit. A compensation value (gi) for compensating a variation in a detection signal detected by the signal detection circuit when the selection circuit connects one of the plurality of proves to the detection circuit is stored in the memory circuit (111). The compensation value is provided for the respective probe.
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公开(公告)号：EP0383323B1
公开(公告)日：1995-01-11
申请号：EP90102960.3
申请日：1990-02-15
申请人： HITACHI, LTD.
IPC分类号： G01N27/00
CPC分类号： G01Q30/02 , G01N2291/048 , G01Q60/12 , G01Q60/16 , Y10S977/851 , Y10S977/861
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9.发明授权
公开(公告)号：EP0391429B1
公开(公告)日：1994-12-28
申请号：EP90106621.7
申请日：1990-04-06
CPC分类号： G01Q20/04 , G01B7/003 , G01B7/28 , G01Q70/02 , G02B21/002 , Y10S977/861 , Y10S977/872
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公开(公告)号：EP0404799B1
公开(公告)日：1994-09-07
申请号：EP89903417.7
申请日：1989-01-26
CPC分类号： H01L41/0966 , G01Q10/045 , G01Q60/16 , G01Q80/00 , G11B9/14 , G11B9/1418 , G11B9/1436 , G11B9/1472 , H01J37/20 , H01L41/316 , Y10S977/837 , Y10S977/861 , Y10S977/872 , Y10S977/873 , Y10S977/943 , Y10S977/947 , Y10T29/42
摘要： There is disclosed herein an integrated scanning tunneling microscope and an integrated piezoelectric transducer and methods for making both. The device consists of one or two arm piezoelectric bimorph cantilevers (42, 46) formed by micromachining using standard integrated circuit processing steps. These cantilevers are attached to the substrate (32) at one area (80) and are free to move under the influence of piezoelectric forces which are caused by the application of appropriate voltages generated by control circuitry (88) and applied to pairs of electrodes (48, 36, 44; 52, 49, 44) formed as an integral part of the bimorph cantilever structure. The electric fields caused by the control voltages cause the piezoelectric bimorphs to move in any desired fashion within ranges determined by the design. The bimorph cantilevers have tips (66) with very sharp points formed thereon which are moved by the action of the control circuit (88) and the piezoelectric bimorphs so to stay within a very small distance of a conducting surface (84). The movements of the tip can be tracked to yield an image of the surface at atomic resolution.
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