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    ELLIPSOMETER
    41.
    发明授权
    ELLIPSOMETER 失效
    椭偏仪

    公开(公告)号：EP0527230B1

    公开(公告)日：1996-06-05

    申请号：EP92903726.5

    申请日：1992-01-27

    Applicant: NKK CORPORATION

    Inventor： KAZAMA, Akira ,  OSHIGE, Takahiko ,  YAMADA, Yoshiro ,  YAMADA, Takeo ,  YAMAZAKI, TAKESHI ,  TAKAYAMA, Takamitsu ,  NOMURA, Shuichiro

    IPC: G01B11/06 ,  G01J4/04 ,  G01N21/21 ,  G02B5/30

    CPC classification number: G01B11/065

    Abstract: An ellipsometer according to the present invention is provided with: a non-polarized light beam splitter (18) for branching a reflected light (17) reflected by an object to be measured (16) into first and second light paths (18a, 18b); a light detecting element (19) transmitting a polarized light component in a direction of reference in the reflected light branched into the first light path; and a polarized light beam splitter (20) for separating the reflected light branched into the second light path into polarized light components in directions different from the said reference direction. Then, the lights which have passed through the light detecting element (19) and the polarized light beam splitter (20) are received by respective first, second and third light receivers (21a, 21b, 21c). Furthermore, in the method of controlling a coating thickness according to the present invention, first and second ellipsometers (35a, 35b) are provided in the front and in the rear of a coating device (36) arranged along a conveying path of a belt-like plate to be coated (31).

    METHOD AND APPARATUS FOR USE OF POLARIZED LIGHT VECTORS IN EVALUATING CONSTITUENT COMPOUNDS IN A SPECIMEN
    42.
    发明公开
    METHOD AND APPARATUS FOR USE OF POLARIZED LIGHT VECTORS IN EVALUATING CONSTITUENT COMPOUNDS IN A SPECIMEN 失效
    FOR使用偏振光向量用于确定的样品的方法和装置包含的组件

    公开(公告)号：EP0721575A4

    公开(公告)日：1996-02-15

    申请号：EP93920479

    申请日：1993-09-03

    Applicant: MICRO RES INC ,  KAPLAN MILTON R

    Inventor： KAPLAN MILTON R ,  CERNOSEK JOHN D

    IPC: G01N21/21 ,  G01J4/00 ,  A61B5/00 ,  A61B5/02 ,  A61B6/00 ,  G01J4/04 ,  G01N33/48

    CPC classification number: G01N21/21

    Abstract: A device and method for determining the identity and concentration of constituent compounds of a test specimen (14) based on polarization effect when the specimen (14) is subjected to randomly or partially polarized light (12). The polarization effect will cause the intensity of light passing through the specimen (14) at one angle of polarization to be different than the intensity of light exiting the specimen (14) at a second angle at a specific wavelength and will result in an elliptically polarized light. The intensity of light exiting the specimen (14) in various planes of polarization is measured by irradiating the specimen (14) with randomly or partially polarized light and then polarizing the light reflected from or passing through the specimen (14) in different planes of polarization angles and measuring (24) the intensity of light in each of the these polarization planes at one or more wavelenghts of light (Fig. 3).

    Micropolarimeter, microsensor system and method of characterizing thin films
    43.
    发明公开
    Micropolarimeter, microsensor system and method of characterizing thin films 失效
    Mikropolarimeter，Mikrosensorsystem und Methode zum charakterisierenDünnerFilme。

    公开(公告)号：EP0632256A1

    公开(公告)日：1995-01-04

    申请号：EP93110277.6

    申请日：1993-06-28

    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION ,  INSTITUT FÜR MIKROTECHNIK MAINZ GmbH

    Inventor： Pokrowsky, Peter, Dr. ,  Kiefer, Eckehard, Dr. Dipl.-Chem. ,  Abraham, Michael, Dr. ,  Stenkamp, Bernd, Dipl.-Phys. ,  Ehrfeld, Wolfgang, Prof. Dr. ,  Zetterer, Thomas, Dr.

    IPC: G01J4/04 ,  G01N21/21

    CPC classification number: G01J4/04 ,  G01N21/211

    Abstract: A micropolarimeter comprises an analyzer (1) and a detector (3), typically a photodetector array, having a circular configuration of a number N of sectors. Analyzer (1) and detector (3) form a unit with the analyzer assigning different polarization values to the sectors, which contains no moving parts.
    For the analyser three different embodiments are proposed: a glass cone, covered with a polarizing thin film stack; a metal grid polarizing array; an array of polarizing waveguides.
    The micropolarimeter (14) is used preferably in a microellipsometer system which further comprises, also positioned on a microoptical table (6), light collimating means (7) and polarizing means (8). Light generating means (11) may also be integrated into the microsensor system. The microsensor system serves as tool for film diagnostics, especially optical characterization of thin films.

    Abstract translation: 微波偏振器包括具有N个扇区的圆形构造的分析器（1）和检测器（3），通常为光电检测器阵列。 分析仪（1）和检测器（3）形成一个单位，分析仪将不同的极化值分配给不含运动部件的扇区。 对于分析仪，提出了三个不同的实施例：玻璃锥，覆盖有偏振薄膜叠层; 金属栅极偏振阵列; 偏振波导阵列。 微型计量器（14）优选地用于还位于微光学桌（6），光准直装置（7）和偏振装置（8）上的微偏振仪系统中。 发光装置（11）也可以集成到微传感器系统中。 微传感器系统用作薄膜诊断的工具，特别是薄膜的光学表征。

    ELLIPSOMETER
    46.
    发明公开
    ELLIPSOMETER 失效
    ELLIPSOMETER UND VERFAHREN ZUR KONTROLLE DER BESCHICHTUNGSDICKE MIT HILEL EINES ELLIPSOMETERS。

    公开(公告)号：EP0527230A1

    公开(公告)日：1993-02-17

    申请号：EP92903726.5

    申请日：1992-01-27

    Applicant: NKK CORPORATION

    Inventor： KAZAMA, Akira ,  OSHIGE, Takahiko ,  YAMADA, Yoshiro ,  YAMADA, Takeo ,  YAMAZAKI, TAKESHI ,  TAKAYAMA, Takamitsu ,  NOMURA, Shuichiro

    IPC: G01B11/06 ,  G01J4/04 ,  G01N21/21 ,  G02B5/30

    CPC classification number: G01B11/065

    Abstract: An ellipsometer according to the present invention is provided with: a non-polarized light beam splitter (18) for branching a reflected light (17) reflected by an object to be measured (16) into first and second light paths (18a, 18b); a light detecting element (19) transmitting a polarized light component in a direction of reference in the reflected light branched into the first light path; and a polarized light beam splitter (20) for separating the reflected light branched into the second light path into polarized light components in directions different from the said reference direction. Then, the lights which have passed through the light detecting element (19) and the polarized light beam splitter (20) are received by respective first, second and third light receivers (21a, 21b,21c). Furthermore, in the method of controlling a coating thickness according to the present invention, first and second ellipsometers (35a, 35b) are provided in the front and in the rear of a coating device (36) arranged along a conveying path of a belt-like plate to be coated (31).

    Abstract translation: 根据本发明的椭偏仪提供有：用于将由待测物体（16）反射的反射光（17）分支到第一和第二光路（18a，18b）中的非偏振光束分离器（18） ; 光检测元件（19），其在被分支到所述第一光路中的反射光中透射偏振光分量在参考方向上; 以及偏振光分束器（20），用于将分支成第二光路的反射光分离成与所述参考方向不同的方向的偏振光分量。 然后，通过光检测元件（19）和偏振光分束器（20）的光被各自的第一，第二和第三光接收器（21a，21b，21c）接收。 此外，在根据本发明的控制涂层厚度的方法中，第一和第二椭偏仪（35a，35b）设置在沿着带状物的输送路径布置的涂布装置（36）的前部和后部， （31）。

    Optical polarimeter
    49.
    发明公开
    Optical polarimeter 失效
    光学极化仪

    公开(公告)号：EP0352133A3

    公开(公告)日：1991-03-20

    申请号：EP89307447.6

    申请日：1989-07-21

    Applicant: UNIVERSITY OF ESSEX

    Inventor： Siddiqui, Ahmed Shamim

    IPC: G01J4/04

    CPC classification number: G01J4/04

    Abstract: A method of and apparatus for rapidly determining the polarisation state of an incoming beam of light, such as from a fibre optic (11). The incoming beam is passed through a beam expander (13,14) and then four separate portions of the beam are passed simultaneously through four Stokes filters (F1,F2,F3,F4) arranged in a common plane. The four filtered beam portions are directed by respective lenses 25 on to four detectors 26 providing electrical signals indicative of the intensity of the respective filtered beams. From these four signals, the Stokes parameters may be deduced.

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