CHEMICAL MIX AND DELIVERY SYSTEMS AND METHODS THEREOF
    63.
    发明公开
    CHEMICAL MIX AND DELIVERY SYSTEMS AND METHODS THEREOF 审中-公开
    CHEMIIKALIENMISCH- UND -ZUFUHRSYSTEME UND VERFAHRENDAFÜR

    公开(公告)号:EP1509455A4

    公开(公告)日:2006-06-28

    申请号:EP03728742

    申请日:2003-05-05

    申请人: BOC GROUP INC

    摘要: Chemical delivery systems and methods for delivery of liquid chemicals are disclosed. In on embodiment, systems having multi-reservoir load cell assemblies (Figs. 2, 4, 5, 7, 9, 11) for delivering chemicals used in the semiconductor industry are disclosed. In another embodiment (Fig. 12), the present invention provides a multi reservoir load cell assembly (69, 92, 71), including a controller (PLC), a buffer reservoir (92, 71), a main reservoir (69), one or more load cells (12, 13, 67, 68, 91, 96) coupled to the assembly and to the controller, operable to weigh the liquid in the reservoirs, a plurality of supply lines (A-D), each supply reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers. A proportional valve block including a buffer control Intel (80) and outlet (81) valves adjust the pressure to the buffer reservoirs.

    摘要翻译: 公开了用于输送液体化学品的化学输送系统和方法。 在一个实施例中,公开了用于输送半导体工业中使用的化学品的具有多储液箱负载单元组件(图2,4,5,7,9,11)的系统。 在另一个实施例中(图12),本发明提供了一种包括控制器(PLC),缓冲储存器(92,71),主储存器(69)和多个储存器(69)的多储存器负载单元组件(69,92,71) 耦合到所述组件和控制器的一个或多个负载单元(12,13,67,68,91,96),所述负载单元可操作用于称量所述储存器中的液体,多个供应线(AD),每个供应储存器和 气体和真空源,用于当控制器需要时从组件中抽出液体并从供应容器中重新填充组件。 包括缓冲控制器Intel(80)和出口(81)阀门的比例阀块调节缓冲液池的压力。

    Chemical delivery systems and methods of delivery
    64.
    发明公开
    Chemical delivery systems and methods of delivery 审中-公开
    化学品输送系统和交付方法

    公开(公告)号:EP1375414A3

    公开(公告)日:2004-01-07

    申请号:EP03077838.5

    申请日:1999-12-27

    IPC分类号: B67D5/08 B67D5/02 B67D5/56

    摘要: A liquid chemical delivery system for use with a plurality of supply containers (100,102). The system comprising a controller; a multi-reservoir load cell assembly (200), including, a buffer reservoir (208) with a chemical output, a main reservoir (206), a reservoir valve connecting the buffer reservoir to the main reservoir, and a load cell (412), coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir assembly; a plurality of supply lines (306,308), each having a valve coupled to the controller and to one of the supply containers (100,102) to the main reservoir; and means for withdrawing the liquid from the chemical output, opening and closing the reservoir valve, and refilling the main reservoir from the supply containers when demanded by the controller based on signals from the load cell.

    摘要翻译: 一种与多个供应容器(100,102)一起使用的液体化学品输送系统。 该系统包括控制器; (200),其包括具有化学输出物的缓冲储存器(208),主储存器(206),将缓冲储存器连接到主储存器的储存器阀以及负载单元(412),所述负载单元(412) ,联接到所述组件和所述控制器,可操作以称重所述储液器组件中的液体; 多个供应管线(306,308),每个供应管线具有连接到控制器和供应容器(100,102)中的一个到主储存器的阀; 以及用于当来自所述测力传感器的信号被所述控制器要求时从所述化学输出中抽出所述液体,打开和关闭所述储存器阀并且从所述供应容器中重新填充所述主储存器的装置。

    VERFAHREN UND VORRICHTUNG ZUR DURCHFÜHRUNG CHEMISCHER UND PHYSIKALISCHER PROZESSE
    65.
    发明授权
    VERFAHREN UND VORRICHTUNG ZUR DURCHFÜHRUNG CHEMISCHER UND PHYSIKALISCHER PROZESSE 有权
    VERFAHREN UND VORRICHTUNG ZURDURCHFÜHRUNGCHEMISCHER UND PHYSIKALISCHER PROZESSE

    公开(公告)号:EP1165224B1

    公开(公告)日:2002-09-18

    申请号:EP00931014.5

    申请日:2000-04-07

    申请人: Penth, Bernd

    发明人: Penth, Bernd

    摘要: The invention relates to a method and a device for carrying out chemical and physical processes. The aim of the invention is to be able to carry out such processes with better results and in the same apparatus. To this end, for the initiation of chemical or physical processes the invention provides for at least two liquid media to be injected by means of pumps, preferably high-pressure pumps, into a reactor chamber (5) enclosed by a reactor housing (53) and on to a shared collision point (25), each medium being injected through one nozzle (1). Through an opening (3a) in the reactor chamber a gas, an evaporating liquid, a cooling liquid or a cooling gas is introduced so as to maintain the gas atmosphere in the reactor interior, notably in the collision point (25) of the liquid jets, and to cool the resulting products. The resulting products and excess gas are removed from the reactor housing (53) via a further opening (3) by positive pressure on the gas input side or negative pressure on the product and gas discharge side.

    摘要翻译: 本发明涉及用于进行化学和物理过程的方法和设备。 本发明的目的是能够以更好的结果和相同的装置进行这样的过程。 为此,为了引发化学或物理过程,本发明提供了至少两种液体介质借助于泵,优选高压泵被注入由反应器壳体(53)包围的反应室(5)中, 并到达共同的碰撞点(25),每个介质通过一个喷嘴(1)喷射。 通过反应室中的开口(3a)引入气体,蒸发液体,冷却液或冷却气体,以保持反应器内部的气氛,特别是在液体射流的碰撞点(25) ,并冷却所得到的产品。 所得到的产物和过量的气体通过另一开口(3)通过气体输入侧上的正压或产品和气体排出侧上的负压从反应器壳体(53)中移除。

    VERFAHREN UND VORRICHTUNG ZUR DURCHFÜHRUNG CHEMISCHER UND PHYSIKALISCHER PROZESSE
    66.
    发明公开
    VERFAHREN UND VORRICHTUNG ZUR DURCHFÜHRUNG CHEMISCHER UND PHYSIKALISCHER PROZESSE 有权
    方法和设备实施化学和物理过程

    公开(公告)号:EP1165224A2

    公开(公告)日:2002-01-02

    申请号:EP00931014.5

    申请日:2000-04-07

    申请人: Penth, Bernd

    发明人: Penth, Bernd

    摘要: The invention relates to a method and a device for carrying out chemical and physical processes. The aim of the invention is to be able to carry out such processes with better results and in the same apparatus. To this end, for the initiation of chemical or physical processes the invention provides for at least two liquid media to be injected by means of pumps, preferably high-pressure pumps, into a reactor chamber (5) enclosed by a reactor housing (53) and on to a shared collision point (25), each medium being injected through one nozzle (1). Through an opening (3a) in the reactor chamber a gas, an evaporating liquid, a cooling liquid or a cooling gas is introduced so as to maintain the gas atmosphere in the reactor interior, notably in the collision point (25) of the liquid jets, and to cool the resulting products. The resulting products and excess gas are removed from the reactor housing (53) via a further opening (3) by positive pressure on the gas input side or negative pressure on the product and gas discharge side.

    METHOD AND APPARATUS FOR STORING AND DISPENSING CHEMICAL SOLUTIONS
    67.
    发明公开
    METHOD AND APPARATUS FOR STORING AND DISPENSING CHEMICAL SOLUTIONS 失效
    DEVICE AND METHOD FOR分布化学溶液

    公开(公告)号:EP0768984A1

    公开(公告)日:1997-04-23

    申请号:EP95919806.0

    申请日:1995-05-12

    申请人: ECOLAB INC.

    IPC分类号: G01N1 B01F13 B01J4 B67D7

    摘要: A solution storage and dispensing apparatus and method of operation therefor are disclosed. The solution storage and dispensing apparatus includes a selector valve (68) and a control valve (62) which selectively output a liquid such as water to one of a plurality of storage containers (11a, 11b, 11c, 11d). Each container (11) has an aspirator (26) mounted therein which receives the water and a chemical concentrate to form a solution therein. A container is filled by selecting the container using the selector valve and actuating the control valve to dispense water to the selected container.

    Device for preparation of photographic liquid
    69.
    发明公开
    Device for preparation of photographic liquid 失效
    Herstellungsvorrichtung摄影师Flüssigkeit。

    公开(公告)号:EP0290968A2

    公开(公告)日:1988-11-17

    申请号:EP88107259.9

    申请日:1988-05-05

    IPC分类号: B01J19/00 G03C1/00

    摘要: The present invention relates to a device for preparing a photographic liquid which is to be applied in the manufacture of a photographic photosensitive material wherein multiple layers of photographic liquids are applied simultaneously. The present invention has at least one chemical measuring station (3, 4) which measures various kinds of chemicals sent from chemical storage tanks and prepares a photographic liquid which is to be applied to a film, supplies the measured chemicals to a pot (5) and a conveys (6) the chemicals in the pot to a hopper (H) from which the chemicals are supplied to a liquid preparation tank (8).

    摘要翻译: 本发明涉及一种用于制备照相液体的装置,其应用于制造照相感光材料,其中同时施加多层照相液体。 本发明具有至少一个化学测量站(3,4),该化学测量站测量从化学品储存箱输送的各种化学品,并准备要施加到胶片上的照相液体,将测量的化学品供应到罐(5) 并且将罐中的化学品(6)输送到料斗(H),从该料斗(H)将化学品从其供应到液体制备罐(8)。