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    IDENTIFICATION AND COMPENSATION OF MEMS ACCELEROMETER ERRORS
    65.
    发明公开
    IDENTIFICATION AND COMPENSATION OF MEMS ACCELEROMETER ERRORS 审中-公开

    公开(公告)号：EP3391062A1

    公开(公告)日：2018-10-24

    申请号：EP16813140.7

    申请日：2016-12-09

    申请人： InvenSense, Inc.

    发明人： GAFFORELLI, Giacomo ,  CORONATO, Luca ,  GIAMBASTIANI, Adolfo ,  MAZZARELLA, Federico ,  MUSAZZI, Massimiliano ,  FOLZ, Michele

    IPC分类号： G01P15/125 ,  G01P21/00

    CPC分类号： G01P21/00 ,  G01P15/125

    摘要： A microelectromechanical (MEMS) accelerometer has a proof mass, a sense electrode, and an auxiliary electrode. The sense electrode is located relative to the proof mass such that a capacitance formed by the sense electrode and the proof mass changes in response to a linear acceleration along a sense axis of the accelerometer. The auxiliary electrode is located relative to the proof mass such that a capacitance formed by the auxiliary electrode and proof mass is static in response to the linear acceleration. A sense drive signal is applied at the sense electrode and an auxiliary drive signal is applied at the auxiliary electrode. The sense drive signal and the auxiliary drive signal have difference frequencies. A portion of a sensed signal at the sense drive frequency is used to determine linear acceleration while a portion of the sensed signal at the auxiliary drive frequency is used to identify damage within a sense path from the proof mass.

    STICTION DETECTION AND RECOVERY IN A MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE
    68.
    发明公开
    STICTION DETECTION AND RECOVERY IN A MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE 审中-公开
    微机电系统装置中的剔除检测和恢复

    公开(公告)号：EP3315975A1

    公开(公告)日：2018-05-02

    申请号：EP16306404.1

    申请日：2016-10-26

    申请人： NXP USA, Inc.

    发明人： ENJALBERT, Jerome Romain

    IPC分类号： G01P15/125 ,  G01P21/00 ,  G01P15/18

    CPC分类号： G01P21/00 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0868 ,  G01P2015/0871 ,  G01P2015/0874

    摘要： A method is provided for testing a multi-axis micro-electro-mechanical system (MEMS) acceleration sensor. The method includes applying a first voltage to a first-axis excitation plate to move a first proof mass in contact with a proof mass stop; applying a second voltage to a second-axis excitation plate while maintaining the first voltage to the first-axis excitation plate, to move the first proof mass in a direction orthogonal to the first-axis while in contact with the proof mass stop; applying one or more low voltage excitation signals to the first-axis excitation plate; and detecting if an output voltage of the MEMS device is higher than a threshold voltage.

    摘要翻译： 提供了用于测试多轴微电子机械系统（MEMS）加速度传感器的方法。 该方法包括将第一电压施加到第一轴激励板以移动与检验质量块接触的第一检测质量; 将第二电压施加到第二轴激励板，同时保持到第一轴激励板的第一电压，以在与检测质量块停止接触的同时使第一检测质量块在与第一轴正交的方向上移动; 将一个或多个低电压激励信号施加到第一轴激励板; 并检测MEMS器件的输出电压是否高于阈值电压。

    ACCELEROMETERS
    69.
    发明授权
    ACCELEROMETERS 有权

    公开(公告)号：EP3120158B1

    公开(公告)日：2018-05-02

    申请号：EP15712995.8

    申请日：2015-03-17

    申请人： Atlantic Inertial Systems Limited

    发明人： TOWNSEND, Kevin ,  DURSTON, Michael Terrence

    IPC分类号： G01P15/125 ,  G01P15/13 ,  G01P15/08 ,  G01P21/00

    CPC分类号： G01P15/131 ,  G01P15/125 ,  G01P21/00 ,  G01P2015/0814

    摘要： A method for closed loop operation of a capacitive accelerometer comprising: a proof mass; first and second sets of both fixed and moveable capacitive electrode fingers, interdigitated with each other; the method comprising: applying PWM drive signals to the fixed fingers; sensing displacement of the proof mass and changing the mark:space ratio of the PWM drive signals, to provide a restoring force on the proof mass that balances the inertial force of the applied acceleration and maintains the proof mass at a null position; detecting when the mark:space ratio for the null position is beyond a predetermined upper or lower threshold; and further modulating the PWM drive signals by extending or reducing x pulses in every y cycles, where x>1 and y>1, to provide an average mark:space ratio beyond the upper or lower threshold without further increasing or decreasing the mark length of the other pulses.