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    MICROELECTROMECHANICAL DEVICE WITH MOTION LIMITERS
    2.
    发明公开
    MICROELECTROMECHANICAL DEVICE WITH MOTION LIMITERS 有权
    枸杞子UNG UNG N N N N N N N N N N N N N N N

    公开(公告)号：EP3111232A1

    公开(公告)日：2017-01-04

    申请号：EP15712421.5

    申请日：2015-02-26

    申请人： Murata Manufacturing Co., Ltd.

    发明人： AHTEE, Ville ,  RYTKÖNEN, Ville-Pekka

    IPC分类号： G01P15/125 ,  G01P15/08

    CPC分类号： G01C19/5712 ,  B81B3/0051 ,  B81B2201/0235 ,  B81B2203/0181 ,  B81B2203/058 ,  G01P15/125 ,  G01P2015/0831 ,  G01P2015/0871

    摘要： A microelectromechanical device that comprises a first structural layer, and a movable mass suspended to a primary out-of plane motion relative the first structural layer. A cantilever motion limiter structure is etched into the movable mass, and a first stopper element is arranged on the first structural layer, opposite to the cantilever motion limiter structure. Improved mechanical robustness is achieved with optimal use of element space.

    摘要翻译： 一种微机电装置，其包括第一结构层和相对于第一结构层悬挂到主外面平面运动的可移动质量块。 悬臂运动限制器结构被蚀刻到可移动质量块中，并且在第一结构层上布置有与悬臂运动限制器结构相对的第一止动元件。 通过优化元件空间来实现机械稳定性的提高。

    Mems device mechanism enhancement for robust operation through severe shock and acceleration
    5.
    发明公开
    Mems device mechanism enhancement for robust operation through severe shock and acceleration 审中-公开
    Mems设备机制增强功能，可通过严重的冲击和加速实现稳健的操作

    公开(公告)号：EP2833097A2

    公开(公告)日：2015-02-04

    申请号：EP14177565.0

    申请日：2014-07-17

    申请人： Honeywell International Inc.

    发明人： Hanson, Timothy J. ,  Weber, Mark W. ,  Glenn, Max C. ,  Karnick, Drew A.

    IPC分类号： G01C19/574

    CPC分类号： G01C19/574 ,  G01C19/5783 ,  G01P2015/0871 ,  Y10T29/49002

    摘要： A micro-electro-mechanical systems (MEMS) device comprises at least one proof mass configured to have a first voltage and a motor motion in a first horizontal direction. At least one sense plate is separated from the proof mass by a sense gap, with the sense plate having an inner surface facing the proof mass and a second voltage different than the first voltage. A set of stop structures are on the inner surface of the sense plate and are electrically isolated from the sense plate. The stop structures are configured to prevent contact of the inner surface of the sense plate with the proof mass in a vertical direction. The stop structures have substantially the same voltage as that of the proof mass, and are dimensioned to minimize energy exchange upon contact with the proof mass during a shock or acceleration event.

    摘要翻译： 微机电系统（MEMS）装置包括至少一个检测质量块，其被配置为在第一水平方向上具有第一电压和马达运动。 至少一个感测板与感测质量块隔开感测间隙，其中感测板具有面向检测质量块的内表面和不同于第一电压的第二电压。 一组止挡结构位于感测板的内表面上并且与感测板电隔离。 止挡结构被构造成防止感测板的内表面与检测质量块在垂直方向上接触。 所述止挡结构具有与所述检测质量块的电压基本相同的电压，并且所述止挡结构的尺寸被确定为在冲击或加速事件期间在与所述检测质量块接触时能量交换最小化。

    ACCELEROMETER
    6.
    发明公开
    ACCELEROMETER 有权

    公开(公告)号：EP2649460A1

    公开(公告)日：2013-10-16

    申请号：EP11793473.7

    申请日：2011-12-02

    申请人： Atlantic Inertial Systems Limited

    发明人： MALVERN, Alan

    IPC分类号： G01P15/125 ,  G01P15/18

    CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/0871

    摘要： An accelerometer comprises a support, a first mass element and a second mass element, the mass elements being rigidly interconnected to form a unitary movable proof mass, the support being located at least in part between the first and second mass elements, a plurality of mounting legs securing the mass elements to the support member, at least two groups of movable capacitor fingers provided on the first mass element and interdigitated with corresponding groups of fixed capacitor fingers associated with the support, and at least two groups of movable capacitor fmgers provided on the second mass element and interdigitated with corresponding groups of fixed capacitor fingers associated with the support.

    摘要翻译： 一种加速度计包括支撑件，第一质量元件和第二质量元件，所述质量元件刚性地互连以形成整体的可移动检测质量块，所述支撑件至少部分地位于第一质量元件和第二质量元件之间，多个安装 将所述质量元件固定到所述支撑构件的腿，设置在所述第一质量元件上并与相应的与所述支撑件相关联的固定电容指的组相互交叉的至少两组可移动电容指，以及设置在所述第一质量元上的至少两组可移动电容指 第二质量元件并且与与支撑件相关联的相应固定电容器指状元件组相互交叉。

    External force detecting device and external force detecting sensor
    7.
    发明公开
    External force detecting device and external force detecting sensor 审中-公开
    装置，用于检测外力和外力传感器，用于检测

    公开(公告)号：EP2477036A1

    公开(公告)日：2012-07-18

    申请号：EP12151092.9

    申请日：2012-01-13

    申请人： Nihon Dempa Kogyo Co., Ltd.

    发明人： Koyama, Mitsuaki ,  Mutoh, Takeru ,  Iwai, Hiroki ,  Amano, Yoshiaki ,  Ichikawa, Ryoichi

    IPC分类号： G01P15/097 ,  G01P15/125 ,  G01P1/02 ,  G01P1/00 ,  G01L9/00

    CPC分类号： G01P15/097 ,  G01L1/142 ,  G01L1/162 ,  G01P1/023 ,  G01P15/125 ,  G01P2015/0828 ,  G01P2015/0871

    摘要： An external force detecting device capable of accurately and easily detecting external force applied to a piezoelectric piece is provided. A crystal piece 2 is cantilever-supported in a container 1. Excitation electrodes 31, 41 are formed on an upper face and lower face, respectively, for example in a center portion of the crystal piece 2. On a front end portion of a lower face side of the crystal piece 2, a movable electrode 5 connected via a lead-out electrode 42 to the excitation electrode 41 is formed on the lower face side, and a fixed electrode 6 is provided on a bottom portion of the container 1 to face this movable electrode 5. The excitation electrode 31 on the upper face side and the fixed electrode 6 are connected to an oscillation circuit 14. When the crystal piece 2 bends by external force applied, capacitance between the movable electrode 5 and fixed electrode 6 changes, and this capacitance change is regarded as a change in oscillation frequency of the crystal piece.

    摘要翻译： 提供了一种外力检测能够适用于压电片精确地设置，并容易地检测外部力装置。 晶体片2是悬臂支承在一个容器1激励电极31，41形成在与上表面和下表面，分别为实施例中的晶体片2的中心部分上的下端的前端部 晶体片2，通过引出电极42连接到激励电极41的可动电极5的表面侧上形成的下表面侧，并且一个固定电极6设置在容器1的到表面的底部部分 该可动电极5在上表面侧的激励电极31和固定电极6连接到14到振荡电路当晶体片2度的弯曲由外力施加时，可动电极5和固定电极6点之间的变化的电容， 并且该电容变化视为在晶体片的振荡频率的变化。

    Acceleration sensor and manufacturing method for the same
    8.
    发明公开
    Acceleration sensor and manufacturing method for the same 有权
    Beschleunigungsaufnehmer und Verfahren zu seiner Herstellung

    公开(公告)号：EP1371993A2

    公开(公告)日：2003-12-17

    申请号：EP03010605.8

    申请日：2003-05-12

    申请人： WACOH CORPORATION

    发明人： Okada, Kazuhiro

    IPC分类号： G01P15/08 ,  G01P15/18 ,  G01P1/02 ,  G01P15/12 ,  B81C3/00 ,  B81B1/00

    CPC分类号： G01P15/125 ,  B81B3/0062 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2203/056 ,  B81B2203/058 ,  G01P15/08 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/084 ,  G01P2015/0842 ,  G01P2015/0871

    摘要： The present invention easily achieves an accurate control structure for limiting displacement of a weight (310; 310B). An SOI substrate with a trilaminar structure including a silicon layer (10), a silicon oxide layer (20), and a silicon layer (30) is prepared, and slits (S1-S4) are opened by applying induced coupling plasma etching which can selectively remove only silicon from the upper side. Then, the same etching is applied from the lower side to form grooves (G1, G2), whereby the silicon layer (30) is separated into a weight (310; 310B) and a pedestal (330; 330B). Next, the structure is immersed in an etchant which can selectively remove only silicon oxide, whereby the vicinities of exposed portions of the silicon oxide layer (20) are removed to form joint layers. A glass substrate (400) is joined to the bottom surface of the pedestal (330; 330B). Piezo resistor elements (Rx1-Rx4, Ry1-Ry4, Rz1-Rz4) are formed on the upper surface of the silicon layer (100) to detect bending. The degree of freedom of upward displacements of the weight (310; 310B) is accurately set based on the thickness of the joint layer (200; 200B).

    摘要翻译： 本发明容易实现用于限制配重（310; 310B）的位移的精确的控制结构。 制备具有硅层（10），氧化硅层（20）和硅层（30）的三层结构的SOI衬底，并通过施加感应耦合等离子体蚀刻来打开缝隙（S1-S4） 有选择地从上侧除去硅。 然后，从下侧施加相同的蚀刻以形成沟槽（G1，G2），由此将硅层（30）分离成重物（310; 310B）和基座（330; 330B）。 接下来，将该结构浸渍在可以仅选择性地除去氧化硅的蚀刻剂中，由此去除氧化硅层（20）的暴露部分附近以形成接合层。 玻璃基板（400）与基座（330; 330B）的底面接合。 压电电阻元件（Rx1-Rx4，Ry1-Ry4，Rz1-Rz4）形成在硅层（100）的上表面上以检测弯曲。 基于接合层（200; 200B）的厚度，精确地设定重量（310; 310B）向上位移的自由度。

    STICTION DETECTION AND RECOVERY IN A MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE
    9.
    发明公开
    STICTION DETECTION AND RECOVERY IN A MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE 审中-公开
    微机电系统装置中的剔除检测和恢复

    公开(公告)号：EP3315975A1

    公开(公告)日：2018-05-02

    申请号：EP16306404.1

    申请日：2016-10-26

    申请人： NXP USA, Inc.

    发明人： ENJALBERT, Jerome Romain

    IPC分类号： G01P15/125 ,  G01P21/00 ,  G01P15/18

    CPC分类号： G01P21/00 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0868 ,  G01P2015/0871 ,  G01P2015/0874

    摘要： A method is provided for testing a multi-axis micro-electro-mechanical system (MEMS) acceleration sensor. The method includes applying a first voltage to a first-axis excitation plate to move a first proof mass in contact with a proof mass stop; applying a second voltage to a second-axis excitation plate while maintaining the first voltage to the first-axis excitation plate, to move the first proof mass in a direction orthogonal to the first-axis while in contact with the proof mass stop; applying one or more low voltage excitation signals to the first-axis excitation plate; and detecting if an output voltage of the MEMS device is higher than a threshold voltage.

    摘要翻译： 提供了用于测试多轴微电子机械系统（MEMS）加速度传感器的方法。 该方法包括将第一电压施加到第一轴激励板以移动与检验质量块接触的第一检测质量; 将第二电压施加到第二轴激励板，同时保持到第一轴激励板的第一电压，以在与检测质量块停止接触的同时使第一检测质量块在与第一轴正交的方向上移动; 将一个或多个低电压激励信号施加到第一轴激励板; 并检测MEMS器件的输出电压是否高于阈值电压。