SUPERFINE INDENTATION TESTER
    80.
    发明公开
    SUPERFINE INDENTATION TESTER 审中-公开
    超精细测试仪

    公开(公告)号:EP1178299A1

    公开(公告)日:2002-02-06

    申请号:EP01902821.6

    申请日:2001-02-09

    IPC分类号: G01N3/40 G01N13/16

    摘要: There is provided a ultra micro indentation testing apparatus comprising: a lever stand (4) provided with a center lever (3) having a silicon probe (1) and a diamond indenter (2) disposed therein; a moving mechanism (7) for moving the lever stand (4) in a triaxial direction; aindentationg-in mechanism (6) for pushing the diamond indenter (2) in a sample; a displacement gage (10) for measuring a displacement of the silicon probe (1) or the diamond indenter (2); and an optical picture device (11) for use in positioning the silicon probe (1) or the diamond indenter (2) and observing the surface of the sample; wherein the apparatus has, in combination, all of the hardness measuring function based on measurement of the force and depth of the diamond indenter pushed in the surface of the sample, the atomic force microscopic function of acquiring the shape of the surface of the sample based on a displacement of the diamond indenter or the silicon probe, and the optical microscopic function of observing the surface of the sample by the optical picture device. Furthermore, the testing apparatus is equipped with both of the function of measuring the hardness of the surface of material in a ultra micro region and the surface observing function with high accuracy.

    摘要翻译: 本发明提供了一种超微压痕测试装置,包括:设有中心杆(3)的杠杆架(4),所述杠杆架具有设置在其中的硅探针(1)和金刚石压头(2); 用于使杆支架(4)沿三轴方向移动的移动机构(7) 用于将金刚石压头(2)推入样本中的压入机构(6) 用于测量硅探针(1)或金刚石压头(2)的位移的位移计(10); 和用于定位硅探针(1)或金刚石压头(2)并观察样品表面的光学图片装置(11) 其中,所述装置具有基于测量被推入样品表面中的金刚石压头的力和深度的所有硬度测量功能,获得基于样品表面的形状的原子力显微镜功能 金刚石压头或硅探头的位移以及光学显微镜观察样品表面的光学显微镜功能。 此外,测试装置具备测量超微小区域中的材料表面的硬度和高精度的表面观察功能两者的功能。