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    Rotation angle measuring device
    71.
    发明公开
    Rotation angle measuring device 有权
    旋转角度测量装置

    公开(公告)号：EP2843374A1

    公开(公告)日：2015-03-04

    申请号：EP14182506.7

    申请日：2014-08-27

    Applicant: Kabushiki Kaisha Topcon

    Inventor： Ohtomo, Fumio ,  Kumagai, Kaoru

    IPC: G01D5/34

    CPC classification number: G01B11/26 ,  G01B11/14 ,  G01D5/345 ,  G01J4/00

    Abstract: A rotation angle measuring device (1) provided with a fixed unit (18) and a movable unit (9) relatively rotating with respect to the fixed unit, comprising a light source (2) installed on either one of the fixed unit or the movable unit and for emitting a detection light and a reference position signal light, a polarizing plate (4) for converting a detection light emitted from the light source to a polarized light, a polarized light rotating unit for rotating the polarized light around an optical axis (7) of the light source as the center, a reference position signal light emitted at a reference rotating position of the polarized light, a stationary polarizing plate (5) provided on either one of the fixed unit or the movable unit (10) and to stand still with respect to a rotation of the polarized light, a photodetection sensor (6) provided on the fixed unit or on the movable unit and for receiving the polarized light passing through the stationary polarizing plate and the reference position signal light, and an arithmetic unit (10) for calculating a detection waveform (21, 22, 23) of a change of light amount based on a signal from the photodetection sensor, for detecting the reference position signal light and for calculating a relative rotation angle between the fixed unit and the movable unit from a phase of the detection waveform and a predetermined detection reference phase when the reference position signal light is detected.

    Abstract translation: 本发明提供一种旋转角度测量装置（1），该旋转角度测量装置（1）具有固定单元（18）和相对于固定单元相对旋转的可动单元（9），其包括安装在固定单元或可动单元 用于发射检测光和参考位置信号光;偏振板（4），用于将从光源发射的检测光转换为偏振光;偏振光旋转单元，用于使偏振光围绕光轴旋转（ 7），在偏振光的参考旋转位置发射的参考位置信号光，设置在固定单元或可移动单元（10）中的任一个上的静止偏振板（5），以及 相对于偏振光的旋转静止;设置在固定单元上或可移动单元上的光检测传感器（6），用于接收穿过静止偏振板和参考位置的偏振光 （10），用于基于来自光电检测传感器的信号计算光量变化的检测波形（21,22,23），用于检测参考位置信号光并且用于计算相对于所述参考位置信号光 当检测到参考位置信号光时，根据检测波形的相位和预定的检测基准相位计算固定单元和可移动单元之间的旋转角度。

    TERAHERTZ ELLIPSOMETER SYSTEM, AND METHOD OF USE
    72.
    发明公开
    TERAHERTZ ELLIPSOMETER SYSTEM, AND METHOD OF USE 审中-公开
    太赫兹椭偏仪及其使用方法

    公开(公告)号：EP2798322A1

    公开(公告)日：2014-11-05

    申请号：EP12861672.9

    申请日：2012-04-06

    Applicant: J.A. Woollam Co., Inc.

    Inventor： HERZINGER, Craig, M.

    IPC: G01J4/00

    CPC classification number: G01J4/00 ,  G01N21/211 ,  G01N21/3581

    Abstract: A terahertz ellipsometer, the basic preferred embodiment being a sequential system having a backward wave oscillator (BWO); a first rotatable polarizer that includes a wire grid (WGP1); a rotating polarizer that includes a wire grid (RWGP); a stage (STG) for supporting a sample (S); a rotating retarder (RRET) comprising first (RP), second (RM1), third (RM2) and fourth (RM3) elements; a second rotatable polarizer that includes a wire grid (WGP2); and a Golay cell detector (DET).

    MULTI-ANALYZER ANGLE SPECTROSCOPIC ELLIPSOMETRY
    74.
    发明公开
    MULTI-ANALYZER ANGLE SPECTROSCOPIC ELLIPSOMETRY 审中-公开
    多分析仪角度光谱椭偏仪

    公开(公告)号：EP2729789A1

    公开(公告)日：2014-05-14

    申请号：EP12807285.7

    申请日：2012-07-03

    Applicant: KLA-Tencor Corporation

    Inventor： KWAK, Hindong ,  DIXON, Ward ,  POSLAVSKY, Leonid ,  KAACK, Torsten

    IPC: G01N21/21 ,  G01J4/00

    CPC classification number: G01J4/00 ,  G01N21/211 ,  G01N2021/213

    Abstract: Ellipsometry systems and ellipsometry data collection methods with improved stabilities are disclosed. In accordance with the present disclosure, multiple predetermined, discrete analyzer angles are utilized to collect ellipsometry data for a single measurement, and data regression is performed based on the ellipsometry data collected at these predetermined, discrete analyzer angles. Utilizing multiple discrete analyzer angles for a single measurement improves the stability of the ellipsometry system.

    Abstract translation: 公开了具有改进的稳定性的椭圆偏光测量系统和椭圆偏光测量数据收集方法。 根据本公开，利用多个预定的离散分析器角度来收集用于单次测量的椭圆偏光测量数据，并且基于以这些预定离散分析仪角度收集的椭圆偏振数据来执行数据回归。 利用多个离散分析仪角度进行单次测量，可以提高椭偏仪系统的稳定性。

    POLARIZATION STATE CONVERSION IN OPTICALLY ACTIVE SPECTROSCOPY
    75.
    发明授权
    POLARIZATION STATE CONVERSION IN OPTICALLY ACTIVE SPECTROSCOPY 有权
    光的偏振态转换中主动光学光谱

    公开(公告)号：EP1466147B1

    公开(公告)日：2012-06-13

    申请号：EP01957092.8

    申请日：2001-07-07

    Applicant: Biotools, Inc.

    Inventor： HUG, Werner

    IPC: G01J4/00 ,  G02B5/30

    CPC classification number: G01N21/19 ,  G01J4/00 ,  G01N21/21 ,  G01N21/47 ,  G01N2021/4792 ,  G02B5/3083

    Abstract: The invention describes a method to eliminate instrumental offset in measurement of optically active scattering and circular dichroism. The method uses the time-average measurement of the light that is systematically transformed by series of optical devices. The optical devises perform the function of rotating linearly polarized light, interconventing left and right circular polarized light, converting circular polarized light to rotating linear polarized light and converting linear polarized light to alternating left and right circular polarized light.

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