METAL COMPONENT
    79.
    发明公开
    METAL COMPONENT 审中-公开

    公开(公告)号:EP4124678A1

    公开(公告)日:2023-02-01

    申请号:EP22185760.0

    申请日:2022-07-19

    摘要: Provided is a metal component that is configured to be used for manufacturing a semiconductor device, the metal component including: a substrate having a conductivity; and a noble metal plating layer formed on all or part of a surface of the substrate, wherein the noble metal plating layer has a surface with irregularities, and a protrusion of the irregularities has an aspect ratio of 0.3 or more.