ELECTROPLATING SYSTEMS AND METHODS
    10.
    发明公开

    公开(公告)号:EP4209623A1

    公开(公告)日:2023-07-12

    申请号:EP22200154.7

    申请日:2017-12-15

    摘要: An electroplating apparatus (200) is described herein comprising: an enclosure (202) for water sensitive electrolytes having an interior (204) and a plurality of ports for circulating dry inerting gas and electrolyte through the enclosure interior (204); and an air separation module in fluid communication with the enclosure interior for supplying the dry inerting gas to the enclosure interior; and a porous body (230) supported within the enclosure interior (204); wherein the enclosure (102) is divided by a wall (244) into an inner chamber (240) and an outer chamber (242), wherein the inner chamber (240) and the outer chamber (242) are fluidly connected by the porous body (230) seated in a work piece aperture, and wherein an anode (216) is disposed within the inner chamber (240), and wherein the porous body is seated partially within the outer chamber and seated partially within the inner chamber.