公开(公告)号：EP0555491A1

公开(公告)日：1993-08-18

申请号：EP92918555.1

申请日：1992-09-01

申请人： ADVANTEST CORPORATION

发明人： TOMIKAWA, Shigeo

IPC分类号： G01R23/173 ,  G01R23/16

CPC分类号： G01R23/173 ,  G01R23/16

摘要： A spectrum analyzer provided with a sync signal input terminal (27A) and a sweep control signal generator (32) inserted between the terminal (27A) and a ramp/address generator (23). When the frequency of a burst wave input signal Sx is analyzed, an external sync signal SY in synchronism with the burst wave is applied to the terminal (27A). As a result the generator (32) generates a sweep control signal SC which rises a predetermined time after the sync signal SY and has a predetermined width. This sweep control signal is applied to the generator (32) so as to sweep a ramp voltage for controlling a local oscillator (16) inside each burst and an address AD for reading a signal take-in memory (19). The sweep operation is stopped during other periods.

摘要翻译： 频谱分析仪具有插入在端子（27A）和斜坡/地址发生器（23）之间的同步信号输入端（27A）和扫描控制信号发生器（32）。 当分析突发波输入信号Sx的频率时，将与突发波同步的外部同步信号SY施加到终端（27A）。 结果，发生器（32）产生扫描控制信号SC，其在同步信号SY之后上升预定时间并具有预定的宽度。 该扫描控制信号被施加到发生器（32），以扫描用于控制每个脉冲串内部的本地振荡器（16）的斜坡电压和用于读取信号获取存储器（19）的地址AD。 扫描操作在其他时间段内停止。

公开(公告)号：EP0543139A1

公开(公告)日：1993-05-26

申请号：EP92117460.3

申请日：1992-10-13

申请人： ADVANTEST CORPORATION

发明人： Hayashi, Mishio

IPC分类号： G01R29/02 ,  H04L1/20 ,  G01R23/16 ,  G01R29/26

CPC分类号： G01R29/02 ,  G01R23/16 ,  G01R29/26 ,  H04L1/205

摘要： Periods P k between the one edges of input pulses (A,B) are measured one after another by a successive period measuring circuit (14), and at the same time, the time interval between the one edge to the other of each input pulse, that is, a pulse width W k , is measured by a time interval measuring circuit (15). The measured periods are sequentially accumulated and each accumulated value is made to correspond to each pulse, as the time at which the measurement of its pulse width was started. In an interpolation part (26), pulse widths, which are assumed to be obtained at regular time intervals, are computed, by an interpolation method, from the sequence of measured pulse widths and the their measurement starting times. In a Fourier transform part (27), the pulse width data obtained by the interpolation is subjected to a Fourier transform to obtain the frequency components of a pulse width jitter.

摘要翻译： 输入脉冲（A，B）的一个边沿之间的周期Pk由连续周期测量电路（14）依次测量，同时，每个输入脉冲之间的一个边缘与另一个边缘之间的时间间隔， 即脉冲宽度Wk由时间间隔测量电路（15）测量。 测量周期被顺序地累积，并且使每个累加值对应于每个脉冲，作为开始其脉冲宽度的测量的时间。 在内插部分（26）中，通过内插方法，从测量的脉冲宽度的顺序和它们的测量开始时间来计算假定以规则时间间隔获得的脉冲宽度。 在傅里叶变换部（27）中，通过内插获得的脉冲宽度数据进行傅立叶变换，得到脉冲宽度抖动的频率成分。

公开(公告)号：EP0535633A1

公开(公告)日：1993-04-07

申请号：EP92116731.8

申请日：1992-09-30

申请人： ADVANTEST CORPORATION

发明人： Watanabe, Masao

IPC分类号： H01L49/00

CPC分类号： H01L49/00 ,  Y10S438/962

摘要： A single-crystal substrate (12) is prepared which has the (100) crystal plane with a step line (13) formed therein by cleaving an MgO single crystal. By evaporating metal onto the cleavage plane, with a mask wire (18) of platinum disposed at a distance from the cleavage plane and extended in a direction across the step line, a pair of metal thin film electrodes (14,15) separated by a gap (24) are epitaxially grown. By this, a step line (17) corresponding to the cleavage-plane step line is formed in the surface of each of the metal thin film electrodes. Metal is further evaporated onto the metal thin film electrodes at a low rate, by which nano-size thin wires (22) extending along the step lines are grown so that they approach each other and are finally connected to each other.

摘要翻译： 甲单晶衬底（12）准备具有与由单晶MgO的裂解形成于其中一个步骤管线（13）（100）晶面。 通过蒸发金属电镀到解理面，有铂在从解理面的距离设置，并且在整个步骤线的方向延伸的掩模线（18），一对金属薄膜的电极（14,15）通过一个分隔 间隙（24）上外延生长。 通过这种方式，对应于切割平面线步骤的工序线（17），在各金属薄膜电极的表面被形成。 金属以低速率，通过该纳米尺寸细线（22）沿着所述步骤线延伸的是生长所以thatthey方法海誓山盟并且最终连接到海誓山盟进一步蒸发到金属薄膜电极。

公开(公告)号：EP0527366A1

公开(公告)日：1993-02-17

申请号：EP92112549.8

申请日：1992-07-22

申请人： ADVANTEST CORPORATION

发明人： Ochiai, Katsumi

IPC分类号： G01R31/28 ,  G01R31/3177

CPC分类号： H03K5/131 ,  G01R31/3191 ,  G01R31/31922 ,  G01R31/31926 ,  H03K2005/00104 ,  H03K2005/00143

摘要： A plurality of delay stages (21) are connected in cascade, each delay stage having a construction in which either one of a path of a delay element (17) utilizing the propagation delay of a gate array and a path (18) not passing through the delay element is selected by a path selector (19). Each bit of control data is used to control the path selector of the corresponding delay stages. Composite delays are measured for all combinations of such paths, control data (D C ) which provides a measured composite delay closest to an intended delay corresponding to each set data (D L ) is determined and is prestored in a main conversion table (22). A prediction is made, through calculation, as to a delay for each control data when ambient temperature rises △T°C from a temperature T O at which the main conversion table was produced, the thus predicted delay is used to determine control data which provides a predicted delay closest to an intended delay for each set data, and the relationship between the control data and the set data is prestored in a corrected conversion table (31, 32). Ambient temperature is detected by temperature detection/control circuit (36). When the difference △t between the detected temperature and the temperature t O is △t

摘要翻译： 多个延迟级（21）级联连接，每个延迟级具有利用门阵列的传播延迟的延迟元件（17）的路径和不通过的路径（18）的结构 延迟元件由路径选择器（19）选择。 控制数据的每一位用于控制相应延迟级的路径选择器。 对这种路径的所有组合测量复合延迟，确定提供最接近对应于每个集合数据（DL）的预期延迟的测量复合延迟的控制数据（DC），并将其预存储在主转换表（22）中。 通过计算，当环境温度从产生主转换表的温度T0升高到INCREMENT T°C时，通过计算来预测每个控制数据的延迟，由此预测的延迟用于确定提供 预测延迟最接近于每个设定数据的预期延迟，并且控制数据与设定数据之间的关系预先存储在校正转换表（31,32）中。 环境温度由温度检测/控制电路（36）检测。 当检测温度和温度t0之间的差值INCREMENT t为INCREMENT t / = INCREMENT T DEGC时，选择校正的转换表的控制数据，并且相应地控制每个延迟级的路径选择器。

公开(公告)号：EP0472160A3

公开(公告)日：1993-01-13

申请号：EP91113931.9

申请日：1991-08-20

申请人： ADVANTEST CORPORATION

发明人： Hayashi, Mishio ,  Sotome, Tetsuo

IPC分类号： G06F1/025

CPC分类号： G01R31/31922 ,  G01R31/31919 ,  G01R31/31926 ,  G06F1/025

摘要： Frequency division circuits (12₁-12 n )in n stages sequentially 1/2-frequency-divide an input clock signal. Pattern generating circuit (13) generates and issues a plurality of pattern data parallel to each other in synchronism with a frequency-divided clock from the final frequency division stage thereof. Multiplexing circuits (14₁-14 n ) in n stages are given a plurality of pattern data and multiplex input pattern data in each stage for each two data. Output clock signals of the n-th through first stage frequency division circuits are supplied to the first through n-th multiplexing circuits via respective delay circuits (15₁-15 n ) as multiplexing control clock signals. a retiming circuit (27) is inserted in series to the input of at least one of the multiplexing circuits, and a multiplexing control clock signal applied to said one multiplexing circuit from the corresponding frequency division circuit is given to the retiming circuit as a retiming clock signal. A phase switching circuit (28) is inserted in series to the output of the frequency division circuit which applies the multiplexing control clock signal to said one multiplexing circuit. When a node of the input pattern data in the retiming circuit approaches the edge of a retiming clock signal within a predetermined range, an approach detection signal is issued from the approach detection circuit (31). The phase switching circuit shifts the phase of the input clock signal in response to the approach detection signal by a predetermined quantity and issues the phase-shifted clock signal.

公开(公告)号：EP0277638B1

公开(公告)日：1992-12-30

申请号：EP88101480.7

申请日：1988-02-02

申请人： ADVANTEST CORPORATION

发明人： Hayashi, Mishio

IPC分类号： G04F10/00 ,  G01R23/02

CPC分类号： G01R23/06 ,  G04F10/105

公开(公告)号：EP0466939A4

公开(公告)日：1992-10-14

申请号：EP91903698

申请日：1991-02-01

申请人： ADVANTEST CORPORATION

发明人： SEKINO, TAKASHI

IPC分类号： G01R31/26 ,  G01R31/28 ,  G01R31/319 ,  G01R35/02 ,  H01L21/66

CPC分类号： G01R31/3191 ,  G01R31/2806 ,  G01R31/2882 ,  G01R31/31905 ,  G01R35/02

公开(公告)号：EP0460603A3

公开(公告)日：1992-07-01

申请号：EP91109108.0

申请日：1991-06-04

申请人： ADVANTEST CORPORATION

发明人： Sasaki, Yasushi

IPC分类号： G06F11/26

CPC分类号： G01R31/31922 ,  G01R31/31908 ,  G01R31/3191

摘要： Pins of an IC under test are classified into pin groups according to the delay time to be set for a test clock for each pin, and a table of pin group data, which has, at a bit position corresponding to each pin, a "1" or "0" which indicates whether the pin belongs to each pin group, is stored in a pin group table memory (24). The bit positions of the logical values "1", indicating that the pins belong to the pin group, in each pin group data read out from the pin group table memory are sequentially encoded by a priority encoder (26) in an ascending (or descending) order and the delay data is provided to a delay data memory (23). The delay time data common to all the pins belonging to the pin group provided from a tester processor (10) is written into sequentially specified addresses, by which the delay time data for all of the pins can be written into the delay data memory from the tester processor in a short time.

公开(公告)号：EP0471202A3

公开(公告)日：1992-04-22

申请号：EP91112055.8

申请日：1991-07-18

申请人： ADVANTEST CORPORATION

发明人： Akira, Goishi ,  Toshiyuki, Ihara

IPC分类号： B23K26/06

CPC分类号： B23K26/066

摘要： A liquid crystal device (17) is disposed on an optical path for irradiating a workpiece (24) with a laser beam from a laser (11). The laser beam is applied via the liquid crystal device to the workpiece after the diameter of the laser beam is enlarged by an expander (14). A beam cross-sectional pattern, which defines desired configuration and a desired intensity distribution of the laser beam, is selectively displayed on the liquid crystal device.

摘要翻译： 液晶装置（17）设置在用于用激光（11）激光束照射工件（24）的光路上。 在激光束的直径被扩张器（14）放大之后，通过液晶装置将激光束施加到工件。 选择性地在液晶装置上显示限定所需配置和所需激光束强度分布的光束横截面图案。

公开(公告)号：EP0478801A1

公开(公告)日：1992-04-08

申请号：EP91908474.9

申请日：1991-04-17

申请人： ADVANTEST CORPORATION

发明人： MATSUMURA, Takashi

IPC分类号： G01J3/453

CPC分类号： G01J3/4535

摘要： A reference beam is allowed to be incident into a Michelson interferometer and a reference interference electric signal which changes sinusoidally with the movement of a movable reflector (14) in accordance with interference of the reference beam is obtained. A control circuit (21) applies a direction control signal representing the direction of the movement of the movable reflector (14) to a two-phase signal generator (32B). In response to the indicated direction, this generator generates a two-phase signal either one of the phases of which is advanced by 90°, and applies this two-phase signal as a feedback signal to a servo driving circuit (19). The control circuit (21) applies a movement control signal to the servo driving circuit (19) and controls the movement of the movable reflector (14), so that high precision control becomes possible in accordance with accuracy of the wavelength of the reference beam.

摘要翻译： 参考光束被允许入射到迈克尔逊干涉仪中，并且获得与根据参考光束的干涉可移动反射器（14）的运动正弦曲线改变的参考干涉电信号。 控制电路（21）将表示可移动反射器（14）的移动方向的方向控制信号施加到两相信号发生器（32B）。 响应于指示的方向，该发生器产生两相信号，其中的一个相位提前90度，并将该两相信号作为反馈信号施加到伺服驱动电路（19）。 控制电路（21）向伺服驱动电路（19）施加移动控制信号并控制可动反射器（14）的移动，从而可以根据参考光束的波长的精度进行高精度控制。