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公开(公告)号：EP0668483A3
公开(公告)日：1996-12-11
申请号：EP95300817.4
申请日：1995-02-09
申请人： Renishaw plc
IPC分类号： G01B9/02
CPC分类号： G01B9/02059 , G01B9/02052 , G01B2290/70
摘要： A laser interferometer, used for measuring displacement over long distances (e.g. 100 metres) includes an integral laser/detector unit 10, which emits a beam 12 of laser light. The fraction of the beam 12B which passes undiverted through a beam splitter 14 is laterally displaced by a periscope 18, which is positioned close to the laser 10. After passage through the periscope 18, the undiverted beam is incident upon a large retroreflector 20, whose size is such that the beam reflected by retroreflector 20 is laterally displaced by an amount greater than the lateral displacement due to passage of the beam through the periscope 18. Opaque housing 26 of the periscope 18 is used to screen reflected light from entrance into the laser cavity.
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公开(公告)号：EP0740769A1
公开(公告)日：1996-11-06
申请号：EP95910100.0
申请日：1995-01-13
申请人： Sparta, Inc.
CPC分类号： G01B9/02007 , G01B9/02002 , G01B9/02003 , G01B9/02027 , G01B9/02062 , G01B2290/70
摘要： An improved interferometric measuring system wherein the system projects a first beam of light at a first measurement wavelength along a reference path to a reference reflector and a second beam of light at a second measurement wavelength along a measurement path to a measurement reflector, and determines a change in position of the measurement reflector from an interference pattern produced between a first light beam reflected from the reference reflector and a second light beam reflected from the measurement reflector, and wherein the system can measure atmospheric disturbances along the measurement path, concurrently with measuring a change in the position of the measurement reflector.
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公开(公告)号：EP0401799B1
公开(公告)日：1995-11-02
申请号：EP90110726.8
申请日：1990-06-06
发明人： Ohtsuka, Masaru
IPC分类号： G01B9/02
CPC分类号： G01B9/02007 , G01B9/02003 , G01B9/02069 , G01B2290/45 , G01B2290/70
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84.发明公开
公开(公告)号：EP0671601A2
公开(公告)日：1995-09-13
申请号：EP95102557.6
申请日：1995-02-23
发明人： Robinson, Glen M. , Carlson, Timothy B. , Peterson, Richard W. , Denzer, Steven M. , Groschen, Robert P. , Schmainda, Michael J.
CPC分类号： G01B9/02019 , G01B9/02003 , G01B9/02028 , G01B11/303 , G01B2290/30 , G01B2290/45 , G01B2290/70
摘要： The invention is an on-line manufacturing process control system and method using a twin or dual beam heterodyned optical interferometer as the monitor of changes in the surface characteristics of an object during the manufacturing process.
摘要翻译： 本发明是一种在线制造过程控制系统和方法，其使用双光束或双光束外差光学干涉仪作为在制造过程中物体的表面特性变化的监视器。
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公开(公告)号：EP0448751B1
公开(公告)日：1994-07-13
申请号：EP90105787.7
申请日：1990-03-27
CPC分类号： G01P5/26 , G01B9/02002 , G01B9/02003 , G01B9/02051 , G01B2290/70 , G01D5/266
摘要： A heterodyne interferometer has four fibre optic light guide sections (1, 2, 3, 4) applied to a lithium niobate crystal (CR) by titanium diffusion and interconnected by a polarization divider (T1). One of the light guide sections passes through an electro-acousto-optico converter (M1) in which monomode light (S) is supplied. Each light fraction of a polarization (TM, TE) is sent to a reference branch and a measurement branch from where the light, reflected and/or modulated by a 1/4 wavelength plate, is returned to the waveguide sections (2, 3). It then passes through the polarization divider (T1) and the fourth waveguide section (4) to a second polarization divider (PBS) and from there to photodetectors (D1, D2), where it is evaluated. Other embodiments are disclosed. The interferometer has a high light yield and a broad measurement range and is suitable for use in anemometers, devices for measuring speed and vibration, and displacement sensors.
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公开(公告)号：EP0469718A3
公开(公告)日：1993-10-13
申请号：EP91305917.6
申请日：1991-06-28
申请人： KONICA CORPORATION
CPC分类号： G01B9/02056 , G01B9/02018 , G01B9/02081 , G01B2290/45 , G01B2290/70
摘要： A laser interferometry length measurer for determining a moving distance of an object. The measurer includes a 45° rotatory polarization plate (2) for dividing a source light beam to a measuring beam (P) and a reference beam (S); a reflector (3), which is placed to the object, for reflecting the measuring beam; a prism for composing the reference beam and the reflected measuring beam into a composed source beam; a beam splitter prism for distributing the composed source beam into a plural light beams which have different phases; and a determination unit to determine the moving distance of the object according to those beams.
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87.发明公开Procédé et dispositif optiques de mesure de distance et leur application au positionnement relatif de pièces 失效装置和用于光学测距和使用用于工件的相对定位方法。
公开(公告)号：EP0549456A1
公开(公告)日：1993-06-30
申请号：EP92403513.2
申请日：1992-12-22
申请人： FRANCE TELECOM
IPC分类号： G01B9/02
CPC分类号： G01B9/02007 , G01B9/02011 , G01B2290/45 , G01B2290/70
摘要： Procédé et dispositif optiques de mesure de distance, consistant à émettre un faisceau lumineux incident (13) comprenant au moins deux ondes de longueurs d'ondes différentes (λ1 et λ2) ; à séparer ce faisceau en un faisceau de référence (15) et un faisceau de mesure (17) qui se réfléchissent sur respectivement un réflecteur de référence (16) et une zone (18) d'une pièce (19) dont on veut mesurer la position dans la direction du faisceau de mesure et se recombinent en un faisceau résultant (20) dans lequel lesdites ondes présentent des états de polarisation dont les composantes tournent lorsque le chemin optique du faisceau précité de mesure varie et qui déterminent dans la direction du faisceau de mesure des plages adjacentes aux extrémités de chacune desquelles les positions angulaires de deux composantes correspondantes de ces états de polarisation sont identiques ; à déterminer dans le faisceau résultant (20) les positions angulaires (α1 et α2) de deux composantes correspondantes desdits états de polarisation desdites ondes ; et à calculer en fonction desdites positions angulaires, la distance séparant la zone précitée de ladite pièce par rapport à une position de référence, de préférence l'image du réflecteur de référence.
Leur application au positionnement de pièces, notamment d'une puce insérée dans un substrat.摘要翻译： 方法和装置，用于光学距离测量，在发射到入射光束（13）包括不同的波长（波长1和λ2）中的至少两个波由...组成; 在此光束分成参考光束（15）和测量光束（17），它们在一个参考反射器（16）和工件的区（18）（19），其在测量方向上的位置分别反射 光束期望来衡量，并重新结合成的结果束（20），其中所述波具有偏振，其组件旋转的状态。当在上述测量光束而变化在所述测量光束的区域的方向上的光路，并且该确定的矿 ，邻近其各自的两个分量对应于偏振状态的角度位置是相同的端部; 在所得到的光束（20）两个分量对应于所述的波的极化的所述状态的角位置（α1和α - 2）开采确定性; 而在计算作为所述角位置的函数，远处分离所述工件的从基准位置的上述区域中，基准反射器的优选的图像。 ... 他们对定位工件应用，特别是芯片插入到基材。 ...
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公开(公告)号：EP0522557A1
公开(公告)日：1993-01-13
申请号：EP92111695.0
申请日：1992-07-09
发明人： Matsumoto, Takahiro, c/o Canon Kabushiki Kaisha , Yoshii, Minoru, c/o Canon Kabushiki Kaisha , Saito, Kenji, c/o Canon Kabushiki Kaisha , Nose, Hiroyasu, c/o Canon Kabushiki Kaisha , Sentoku, Koichi, c/o Canon Kabushiki Kaisha , Takeuchi, Seiji, c/o Canon Kabushiki Kaisha
IPC分类号： G01B9/02
CPC分类号： G01B9/02007 , G01B9/02003 , G01B2290/30 , G01B2290/70 , G03F9/7049
摘要： A measuring arrangement includes forming first and second pairs of light beams each having a low frequency light beam and a high frequency light beam. Both pairs of light beams generate beat signals of the same frequency. The low frequency light beam of either pair and the high frequency of the other pair pass through a predetermined optical path to cause phase changes in the same direction. Beat signals are generated by superposing the first and second beam pair to provide measurement information on the phase changes.
摘要翻译： 测量装置包括形成第一和第二对光束，每对光束具有低频光束和高频光束。 两对光束产生相同频率的差拍信号。 任一对的低频光束和另一对的高频光束通过预定的光路以引起相同方向的相位变化。 通过叠加第一和第二波束对来产生节拍信号，以提供关于相位变化的测量信息。
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公开(公告)号：EP0470710A3
公开(公告)日：1993-01-13
申请号：EP91306413.5
申请日：1991-07-16
CPC分类号： G01B9/0209 , G01B9/0201 , G01B2290/70 , G01C19/64
摘要： An improved Sagnac interferometer includes a broadband light source (100) that comprises a fluorescent optical medium which is pumped by light from a pump source with a sufficient intensity to cause the fluorescent optical medium to generate temporally incoherent light by superfluorescence. In the preferred embodiment, the superfluorescent optical medium comprises an optical fiber (130) which is backward pumped. The light signal input into the sensing loop (142) of the interferometer is amplified by a modulator, output from the interferometer loop (142) and amplified by the optical gain of the superfluorescent fiber which acts as a light source (100) and as an amplifier. In order to avoid gain modulation in the superfluorescent fiber (130), the modulation frequency is selected so that the modulation gain depth is substantially reduced.
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公开(公告)号：EP0476914A3
公开(公告)日：1992-12-30
申请号：EP91308281.4
申请日：1991-09-11
CPC分类号： G01B9/0209 , G01B2290/70 , G01C19/721 , H01S3/06795
摘要： The present invention discloses a thermally stable rare-earth doped fiber source (100) comprising an active medium (110) such as Erbium or Neodymium. The thermal stability of the mean wavelength of such a source (100) is determined by three contributions as expressed by the following differential equation: δ s > δT + ( δ s > δP ) ( δP δT ) + ( δ s δl p ) ( δl p δT ) The first term is the intrinsic temperature dependence of the active medium (110), the second term is the pump power dependence and the third term is a contribution that arises from the dependence of the emission wavelength on the pump wavelength. The method of the present invention minimizes the temperature dependence of the mean wavelength by using the above equation and optimizing the values of the pump power and the pump wavelength so that the three contributions in the governing equation cancel each other.
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