CONDUCTOR FOR MOVABLE ELECTRIC CIRCUIT AND VIBRATION TYPE GYRO
    3.
    发明公开
    CONDUCTOR FOR MOVABLE ELECTRIC CIRCUIT AND VIBRATION TYPE GYRO 有权
    LEITERFÜREINE BEWEGLICHE ELEKTRISCHE SCHALTUNG UND KREISEL DES VIBRATIONSTYPS

    公开(公告)号:EP1521274A1

    公开(公告)日:2005-04-06

    申请号:EP03738512.7

    申请日:2003-06-25

    IPC分类号: H01B1/02 C22C21/00 G01C19/56

    摘要: A conductive element for a movable electrical circuit (a conductive element most suitable for an electric circuit that is placed on a movable element in which the shape of the circuit itself changes during circuit operation) which is Al-based and has an average cross sectional area for the crystal grain of 1 micron 2 or less. Preferably, this conductive element contains N+O at 550 to 20000 ppm in atomic concentration and also one or more selected from the group consisting of Si at 0.5-5.0 % in atomic concentration, Ta at 0.5-5.0%, and Cu at 0.5-5.0%. More preferably, it contains Nd at 0.5-5.0%.
    This conductive element for a movable circuit is especially suitable for the wiring pattern in a vibrating gyroscope.

    摘要翻译: 一种用于可移动电路的导电元件(最适合于电路的电路的导电元件,该导电元件放置在电路自身在电路运行期间的形状变化的可移动元件上),其基于Al并且具有平均截面面积 对于1微米以下的晶粒。 优选地,该导电元件在原子浓度为550〜20000ppm的条件下含有N + O,还含有选自原子浓度为0.5〜5.0%的Si,0.5〜5.0%的Ta,0.5〜5.0%的Cu, 5.0%。 更优选地,其含有0.5-5.0%的Nd。 用于可移动电路的该导电元件特别适用于振动陀螺仪中的布线图案。

    Panel type heat exchanger
    6.
    发明公开
    Panel type heat exchanger 失效
    Wärmeaustauschervom Doppelwandrohrtyp。

    公开(公告)号:EP0450906A1

    公开(公告)日:1991-10-09

    申请号:EP91302865.0

    申请日:1991-04-02

    IPC分类号: F17C9/02

    摘要: A double-walled tube type open rack evaporating device comprising a plurality of heat-exchanging pipes each of a double-walled tube constructure having an inner tube (11) and an outer tube (10) in communication with the inner pipe at one end to constitute a heat-exchanging panel, a liquefied gas inlet header tank (12) connected to one end of the inner tube, an exit header tank (14) connected to one end of the outer tube, and a heating means (15,16) for gradually evaporating a liquefied gas that flows from the liquefied gas inlet header tank into the inner tube and then delivering the gas as a gas at a normal temperature to the exit header tank. Deposition of ice can be avoided and the amount of sea water used as a heat medium can be reduced to save electric power consumption in a sea water pump. Fl:ow rate and calorie hunting can be prevented to make LNG and NG flows stable.

    摘要翻译: 一种双壁管式开放式架式蒸发装置,包括多个热交换管,每个热交换管均具有内管(11)和外管(10)的双壁管结构,所述内管与内管(10)在一端连接至内管 构成热交换板,连接到内管的一端的液化气进口集水箱(12),连接到外管的一端的出口集水箱(14)和加热装置(15,16) 用于逐渐蒸发从液化气进口集水箱流入内管的液化气体,然后将气体作为常温下的气体输送到出口集水箱。 可以避免沉积冰,并且可以减少用作热介质的海水量,以节省海水泵的电力消耗。 可以防止流量和卡路里狩猎使LNG和NG流动稳定。

    FAULT DETECTION USING SKEWED TRANSDUCERS
    7.
    发明授权
    FAULT DETECTION USING SKEWED TRANSDUCERS 有权
    使用变形传感器的故障检测

    公开(公告)号:EP2786095B1

    公开(公告)日:2018-01-10

    申请号:EP12806087.8

    申请日:2012-11-27

    IPC分类号: G01C19/5684

    CPC分类号: G01C19/5684

    摘要: A vibratory gyroscope is provided comprising a plurality of secondary pickoff transducers which are each sensitive to the secondary response mode, wherein: at least two of the secondary pickoff transducers comprise skew transducers designed to be sensitive to the primary mode which produce an induced quadrature signal in response thereto. A method of using the gyroscope is provided comprising the steps of arranging electrical connections between the secondary pickoff transducers and a pickoff amplifier so that in use the induced quadrature signal is substantially rejected by the amplifier in the absence of a fault condition, and the amplifier outputs an induced quadrature signal when a fault condition disconnects one of the skew transducers from the amplifier, and a comparator compares the quadrature output from the pickoff amplifier with a predetermined threshold value and provides a fault indication when the predetermined threshold is exceeded.

    PLASMA GENERATOR AND PLASMA ETCHING DEVICE
    9.
    发明公开
    PLASMA GENERATOR AND PLASMA ETCHING DEVICE 审中-公开
    PLASMAGENERATOR UNDPLASMAÄTZEINRICHTUNG

    公开(公告)号:EP1699076A1

    公开(公告)日:2006-09-06

    申请号:EP04819806.3

    申请日:2004-11-29

    IPC分类号: H01L21/3065

    CPC分类号: H01J37/3211 H01J37/321

    摘要: The present invention provides a plasma generator capable of generating plasma so that the etching rate is uniform in the circumferential direction of a sample, and a plasma etching apparatus capable of carrying out uniform etching processing in the circumferential direction of the sample. While a process gas is introduced into a plasma generating chamber and while a predetermined pressure is maintained, a high-frequency AC voltage is applied to a coil to generate the plasma of the process gas. By the application of an AC voltage to a substrate electrode, the plasma generated inside the plasma generating chamber is introduced into a reaction chamber, and the sample is etched. The coil is not wound in a uniform spiral, but one turn of the coil has a first winding region in which the coil is wound horizontally or nearly horizontally and a second winding region in which the coil is wound so as to have a steep inclination.

    摘要翻译: 本发明提供一种等离子体发生器,其能够产生等离子体,使得蚀刻速率在样品的圆周方向上是均匀的,以及能够在样品的圆周方向上进行均匀蚀刻处理的等离子体蚀刻装置。 当将工艺气体引入等离子体发生室中并且在保持预定压力时,将高频AC电压施加到线圈以产生处理气体的等离子体。 通过向基板电极施加AC电压,将等离子体产生室内产生的等离子体引入反应室,对样品进行蚀刻。 线圈没有以均匀的螺旋卷绕,但是线圈的一圈具有第一绕组区域,线圈被水平或几乎水平地缠绕,并且线圈缠绕在其中具有陡峭倾斜的第二绕组区域。