摘要:
A vibrator 10, which is formed in a silicon wafer 1 by means of MEMS technique, has eight beam portions (beams) 12 supported at a central portion 11 and extending in the radial direction while mutually keeping the same angle and has a ring portion 13 connected to the eight beam portions 12. Outside the ring portion 13, eight electrodes 21a to 21h for electrostatic actuation, capacitance detection, or the like are spaced uniformly with a gap 22 created between the ring portion 13 and the electrodes 21a to 21h. Inside the ring portion 13, sixteen electrodes 23 for frequency adjustment are spaced uniformly with a gap 24 created between the ring portion 13 and the electrodes 23.
摘要:
(1) A laser processing method for silicon substrates wherein a roughness (Ra) of a surface of a silicon substrate is adjusted to 0.05 micron - 1 micron after which a laser is applied. (2) A laser processing device for silicon substrates including: means for adjusting a surface of a silicon substrate to 0.05 micron - 1 micron; and means for applying a laser. This method and device is able to prevent spattering of melted silicon and provides superior processing precision and allows efficient formation of holes and cutting on a silicon substrate. In particular, the present invention is useful for opening short-circuit sections disposed in silicon wiring.
摘要:
A conductive element for a movable electrical circuit (a conductive element most suitable for an electric circuit that is placed on a movable element in which the shape of the circuit itself changes during circuit operation) which is Al-based and has an average cross sectional area for the crystal grain of 1 micron 2 or less. Preferably, this conductive element contains N+O at 550 to 20000 ppm in atomic concentration and also one or more selected from the group consisting of Si at 0.5-5.0 % in atomic concentration, Ta at 0.5-5.0%, and Cu at 0.5-5.0%. More preferably, it contains Nd at 0.5-5.0%. This conductive element for a movable circuit is especially suitable for the wiring pattern in a vibrating gyroscope.
摘要:
A downflow reboiler-condenser which can distribute and introduce an evaporating fluid (fluid to be evaporated) uniformly and securely into evaporation passages and which can also achieve simplification of its structure and reduction in the fabrication cost. This reboiler-condenser is provided with a reservoir 36 above a heat exchanger core 34 and with liquid distributors 37 located above evaporation passages 33 respectively. The liquid distributors 37 distribute the evaporating fluid collected in the reservoir 36 into the evaporation passages 33 uniformly.
摘要:
A double-walled tube type open rack evaporating device comprising a plurality of heat-exchanging pipes each of a double-walled tube constructure having an inner tube (11) and an outer tube (10) in communication with the inner pipe at one end to constitute a heat-exchanging panel, a liquefied gas inlet header tank (12) connected to one end of the inner tube, an exit header tank (14) connected to one end of the outer tube, and a heating means (15,16) for gradually evaporating a liquefied gas that flows from the liquefied gas inlet header tank into the inner tube and then delivering the gas as a gas at a normal temperature to the exit header tank. Deposition of ice can be avoided and the amount of sea water used as a heat medium can be reduced to save electric power consumption in a sea water pump. Fl:ow rate and calorie hunting can be prevented to make LNG and NG flows stable.
摘要:
A vibratory gyroscope is provided comprising a plurality of secondary pickoff transducers which are each sensitive to the secondary response mode, wherein: at least two of the secondary pickoff transducers comprise skew transducers designed to be sensitive to the primary mode which produce an induced quadrature signal in response thereto. A method of using the gyroscope is provided comprising the steps of arranging electrical connections between the secondary pickoff transducers and a pickoff amplifier so that in use the induced quadrature signal is substantially rejected by the amplifier in the absence of a fault condition, and the amplifier outputs an induced quadrature signal when a fault condition disconnects one of the skew transducers from the amplifier, and a comparator compares the quadrature output from the pickoff amplifier with a predetermined threshold value and provides a fault indication when the predetermined threshold is exceeded.
摘要:
The present invention provides a plasma generator capable of generating plasma so that the etching rate is uniform in the circumferential direction of a sample, and a plasma etching apparatus capable of carrying out uniform etching processing in the circumferential direction of the sample. While a process gas is introduced into a plasma generating chamber and while a predetermined pressure is maintained, a high-frequency AC voltage is applied to a coil to generate the plasma of the process gas. By the application of an AC voltage to a substrate electrode, the plasma generated inside the plasma generating chamber is introduced into a reaction chamber, and the sample is etched. The coil is not wound in a uniform spiral, but one turn of the coil has a first winding region in which the coil is wound horizontally or nearly horizontally and a second winding region in which the coil is wound so as to have a steep inclination.
摘要:
A solid oxide fuel cell capable of increasin a thermal cycle resistance by uniformizin the flow and distribution of the as of air and fuel in cells, wherein a center through-hole and a plurality of peripheral through-holes are formed at the center part of a cell formation plate and atthe center parts of gas separator plates, respectively, and a reaction gas passaae is formed at the outer peripheral parts of the gas separator plates.