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1.发明公开ISFET SENSOR ARRAY COMPRISING TITANIUM NITRIDE AS A SENSING LAYER LOCATED ON THE BOTTOM OF A MICROWELL STRUCTURE 审中-公开WITH氮化钛ISFET阵列传感器层ON微孔结构的底部
公开(公告)号：EP2807478A1
公开(公告)日：2014-12-03
申请号：EP13702546.6
申请日：2013-01-18
发明人： BUSTILLO, James , REARICK, Todd , HINZ, Wolfgang , FIFE, Keith
IPC分类号： G01N27/414
CPC分类号： B01L3/5027 , B01L3/502707 , B01L2200/0668 , B01L2300/0636 , B01L2300/0645 , B01L2300/0819 , B01L2300/0877 , B01L2300/0893 , G01N27/4145
摘要： A method of fabricating a microwell in an array structure is disclosed herein. The array structure can include a plurality of field effect transistors (FETs), where each FET has a gate structure. The method can include disposing a titanium nitride (TiN) layer on at least one conductive layer coupled to the gate structure of at least one FET. A insulation layer can also be disposed on the array structure, where the insulation layer lies above the TiN layer. Further, an opening above the gate structure of the at least one FET can be etched to remove the insulation layer above the gate structure and to expose the TiN layer. A microwell with at least one sidewall formed from the insulation layer and with a bottom surface formed from the TiN layer is a result of the etching process.
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公开(公告)号：EP2805157B1
公开(公告)日：2017-07-12
申请号：EP13704843.5
申请日：2013-01-18
发明人： LI, Shifeng , BUSTILLO, James , HINZ, Wolfgang
IPC分类号： G01N27/414
CPC分类号： G01N27/4145 , C12Q1/6869 , G01N27/414 , Y10T436/143333
摘要： A system includes a sensor including a sensor pad and a well wall structure defining a well operatively coupled to the sensor pad. The well is further defined by a lower surface disposed over the sensor pad. The well wall structure defines an upper surface and defines a wall surface extending between the upper surface and the lower surface. The system further includes a conductive layer disposed over the lower surface and the wall surface.
摘要翻译： 一种系统包括传感器，该传感器包括传感器垫和限定可操作地耦合到传感器垫的井的井壁结构。 井由设置在传感器垫上的下表面进一步限定。 井壁结构限定上表面并限定在上表面和下表面之间延伸的壁表面。 该系统还包括设置在下表面和壁表面上的导电层。
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公开(公告)号：EP2807478B1
公开(公告)日：2019-07-31
申请号：EP13702546.6
申请日：2013-01-18
发明人： BUSTILLO, James , REARICK, Todd , HINZ, Wolfgang , FIFE, Keith
IPC分类号： G01N27/414 , B01L3/00
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4.发明公开
公开(公告)号：EP2805157A2
公开(公告)日：2014-11-26
申请号：EP13704843.5
申请日：2013-01-18
发明人： LI, Shifeng , BUSTILLO, James , HINZ, Wolfgang
IPC分类号： G01N27/414
CPC分类号： G01N27/4145 , C12Q1/6869 , G01N27/414 , Y10T436/143333
摘要： A system includes a sensor including a sensor pad and a well wall structure defining a well operatively coupled to the sensor pad. The well is further defined by a lower surface disposed over the sensor pad. The well wall structure defines an upper surface and defines a wall surface extending between the upper surface and the lower surface. The system further includes a conductive layer disposed over the lower surface and the wall surface.
摘要翻译： 一种系统包括传感器，其包括传感器垫和井壁结构，该结构限定了可操作地耦合到传感器垫的井。 该阱还由设置在传感器垫上的下表面限定。 井壁结构限定了上表面并限定了在上表面和下表面之间延伸的壁表面。 该系统还包括设置在下表面和壁表面上的导电层。
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