APPARATUS FOR THE GENERATION OF LOW-ENERGY X-RAYS
    2.
    发明公开
    APPARATUS FOR THE GENERATION OF LOW-ENERGY X-RAYS 有权
    VORRICHTUNG ZUR ERZEUGUNG VONRÖNTGENSTRAHLENMIT GERINGER ENERGIE

    公开(公告)号:EP2962323A2

    公开(公告)日:2016-01-06

    申请号:EP14709739.8

    申请日:2014-02-25

    申请人: Enxray Limited

    IPC分类号: H01J35/06 H01J35/18 H01J35/12

    摘要: An X-ray source for producing soft X-rays, the X-ray source comprising: a cathode having an electron-emitting structure supported by a support structure, the electron-emitting structure being at least partially transparent to X-rays within a region bounded by the support structure;an anode having an X-ray emitting surface parallel to the electron-emitting structure of the cathode; and an electrically insulating spacer arranged between the anode and the cathode;wherein the electron-emitting structure of the cathode and the X-ray emitting surface of the anode are arranged such that, in use, the electron-emitting structure is operable to bombard the anode with electrons, causing X-rays to be emitted from the X-ray emitting surface and to pass through the cathode; and wherein the insulating spacer is arranged between the anode and the support structure of the cathode and projects beyond the support structure, across part of the anode,into the said region.

    摘要翻译: 一种用于产生软X射线的X射线源,所述X射线源包括:具有由支撑结构支撑的电子发射结构的阴极,所述电子发射结构对于区域内的X射线至少部分透明 以支撑结构为界; 具有平行于阴极的电子发射结构的X射线发射表面的阳极; 以及布置在所述阳极和所述阴极之间的电绝缘间隔物; 其中阴极的电子发射结构和阳极的X射线发射表面被布置为使得在使用中电子发射结构可操作地用电子轰击阳极,从而使X射线从 X射线发射表面并通过阴极; 并且其中所述绝缘间隔件布置在所述阳极和所述阴极的所述支撑结构之间,并且跨过所述阳极的一部分突出到所述支撑结构之外的所述区域中。