INTERLACED MULTI-ENERGY RADIATION SOURCES
    2.
    发明公开
    INTERLACED MULTI-ENERGY RADIATION SOURCES 审中-公开
    巢状多能量辐射源

    公开(公告)号:EP2319281A2

    公开(公告)日:2011-05-11

    申请号:EP09806964.4

    申请日:2009-08-12

    摘要: Multi-energy radiation sources comprising charged particle accelerators driven by power generators providing different RF powers to the accelerator, capable of interlaced operation, are disclosed. Automatic frequency control techniques are provided to match the frequency of RF power provided to the accelerator with the accelerator resonance frequency. In one example where the power generator is a mechanically tunable magnetron, an automatic frequency controller is provided to match the frequency of RF power pulses at one power to the accelerator resonance frequency when those RF power pulses are provided, and the magnetron is operated such that frequency shift in the magnetron at the other power at least partially matches the resonance frequency shift in the accelerator when those RF power pulses are provided. In other examples, when the power generator is a klystron or electrically tunable magnetron, separate automatic frequency controllers are provided for each RF power pulse. Methods and systems are disclosed.

    RÖNTGENRÖHRE SOWIE VERFAHREN ZUR PRÜFUNG EINES TARGETS DURCH ABTASTEN MIT ELEKTRONENSTRAHL
    3.
    发明公开
    RÖNTGENRÖHRE SOWIE VERFAHREN ZUR PRÜFUNG EINES TARGETS DURCH ABTASTEN MIT ELEKTRONENSTRAHL 审中-公开
    X射线管和方法用于测试的目标到扫描电子WITH

    公开(公告)号:EP2102885A1

    公开(公告)日:2009-09-23

    申请号:EP07857154.4

    申请日:2007-12-28

    发明人: REINHOLD, Alfred

    IPC分类号: H01J35/24 H01J35/14 H05G1/34

    摘要: The invention relates to an X-ray tube, especially a microfocus X-ray tube (2), comprising means (18) for orienting an electron beam (10) towards a target (4). A control device (20) is used to control the means for orienting the electron beam (10) towards the target (4) in such a way that the electron beam (10) scans the target (4), in addition to a measuring device (22) for measuring the intensity of the target current which flows to different scanning sites when the target (4) is scanned by the electron beam (10), or a measuring variable dependent on the target current, and an evaluation device (24) for associating each measured value of the target flow with the corresponding scanning site. Said X-ray tube enables the easy and economical implementation of a method for checking the operability of the target (4).

    A PHOTOELECTRON SPECTROSCOPY APPARATUS AND METHOD OF USE
    4.
    发明公开
    A PHOTOELECTRON SPECTROSCOPY APPARATUS AND METHOD OF USE 审中-公开
    光电子能谱装置和使用方法

    公开(公告)号:EP1929258A4

    公开(公告)日:2014-05-28

    申请号:EP06814252

    申请日:2006-09-08

    申请人: REVERA INC

    摘要: According to one aspect of the present invention, a substrate processing system is provided. The system may include a chamber wall enclosing a chamber, a substrate support positioned within the chamber to support a substrate, an electromagnetic radiation source to emit electromagnetic radiation onto the substrate on the substrate support, the electromagnetic radiation causing photoelectrons to be emitted from a material on the substrate, an analyzer to capture the photoelectrons emitted from the substrate, and a magnetic field generator to generate a magnetic field within the chamber and guide the photoelectrons from the substrate to the analyzer.

    ELECTRON COLLECTING ELEMENT WITH INCREASED THERMAL LOADABILITY, X-RAY GENERATING DEVICE AND X-RAY SYSTEM
    6.
    发明公开
    ELECTRON COLLECTING ELEMENT WITH INCREASED THERMAL LOADABILITY, X-RAY GENERATING DEVICE AND X-RAY SYSTEM 有权
    X射线发生器,X射线系统和X射线发生器的使用

    公开(公告)号:EP2494575A2

    公开(公告)日:2012-09-05

    申请号:EP10782026.8

    申请日:2010-10-18

    发明人: PIETIG, Rainer

    IPC分类号: H01J35/10

    摘要: The present invention relates to X-ray generating technology in general. Providing an electron collecting element of an X-ray generating device statically may allow for the manufacture of X-ray systems with reduced moving parts and actuating parts, possibly reducing manufacturing costs and sources for failure. Consequently, an electron collecting element with increased thermal loadability is presented. According to the present invention, an electron collecting element (28) is provided, comprising a surface element (22) and a heat conducting element (26). The heat conducting element (26) comprises a first thermal conductivity in a first direction and at least a second thermal conductivity in at least a second direction. The first thermal conductivity is greater than the second thermal conductivity. The first direction is substantially perpendicular to the surface element (22).

    TWO-STAGE X-RAY CONCENTRATOR
    7.
    发明公开
    TWO-STAGE X-RAY CONCENTRATOR 有权
    两级X射线浓缩器

    公开(公告)号:EP2084715A2

    公开(公告)日:2009-08-05

    申请号:EP07854356.8

    申请日:2007-10-23

    IPC分类号: G21K1/06

    摘要: A method for obtaining a concentrated, monochromatic x-ray beam from a standard x-ray tube or other source of polychromatic emission. X-rays from the anode of the x-ray tube fluoresce an adjoining, independent target that produces a monochromatic spectrum, a portion of which is focused by the x-ray optical system. This two-stage method gives the system considerably versatility without undue loss in signal. The two-stage concentrator makes practical the use of focusing optics in hand-held and portable instruments.

    摘要翻译: 一种从标准X射线管或其他多色发射源获得浓缩的单色X射线束的方法。 来自X射线管阳极的X射线发出相邻的独立靶,产生单色光谱,其一部分由X射线光学系统聚焦。 这种两阶段方法使系统具有相当的多功能性,而不会在信号中产生不适当的损失。 两级聚光器使得聚焦光学元件在手持式和便携式仪器中得到实际应用。

    APPARATUS FOR THE GENERATION OF LOW-ENERGY X-RAYS
    10.
    发明公开
    APPARATUS FOR THE GENERATION OF LOW-ENERGY X-RAYS 有权
    VORRICHTUNG ZUR ERZEUGUNG VONRÖNTGENSTRAHLENMIT GERINGER ENERGIE

    公开(公告)号:EP2962323A2

    公开(公告)日:2016-01-06

    申请号:EP14709739.8

    申请日:2014-02-25

    申请人: Enxray Limited

    IPC分类号: H01J35/06 H01J35/18 H01J35/12

    摘要: An X-ray source for producing soft X-rays, the X-ray source comprising: a cathode having an electron-emitting structure supported by a support structure, the electron-emitting structure being at least partially transparent to X-rays within a region bounded by the support structure;an anode having an X-ray emitting surface parallel to the electron-emitting structure of the cathode; and an electrically insulating spacer arranged between the anode and the cathode;wherein the electron-emitting structure of the cathode and the X-ray emitting surface of the anode are arranged such that, in use, the electron-emitting structure is operable to bombard the anode with electrons, causing X-rays to be emitted from the X-ray emitting surface and to pass through the cathode; and wherein the insulating spacer is arranged between the anode and the support structure of the cathode and projects beyond the support structure, across part of the anode,into the said region.

    摘要翻译: 一种用于产生软X射线的X射线源,所述X射线源包括:具有由支撑结构支撑的电子发射结构的阴极,所述电子发射结构对于区域内的X射线至少部分透明 以支撑结构为界; 具有平行于阴极的电子发射结构的X射线发射表面的阳极; 以及布置在所述阳极和所述阴极之间的电绝缘间隔物; 其中阴极的电子发射结构和阳极的X射线发射表面被布置为使得在使用中电子发射结构可操作地用电子轰击阳极,从而使X射线从 X射线发射表面并通过阴极; 并且其中所述绝缘间隔件布置在所述阳极和所述阴极的所述支撑结构之间,并且跨过所述阳极的一部分突出到所述支撑结构之外的所述区域中。