摘要:
An X-ray generation device which can be efficiently used is provided. The X-ray generation device 1 has an electron gun 3, a target unit T, a tubular portion 5, a reflected electron detector 31, and a coil unit 9, and the target unit T includes a plurality of targets 23, and a plurality of mark portions 27 having a predetermined location relationship with the targets 23 and each having a surface area larger than a surface area of the target 23, when viewed from a normal direction to principal faces of the target unit T.
摘要:
Multi-energy radiation sources comprising charged particle accelerators driven by power generators providing different RF powers to the accelerator, capable of interlaced operation, are disclosed. Automatic frequency control techniques are provided to match the frequency of RF power provided to the accelerator with the accelerator resonance frequency. In one example where the power generator is a mechanically tunable magnetron, an automatic frequency controller is provided to match the frequency of RF power pulses at one power to the accelerator resonance frequency when those RF power pulses are provided, and the magnetron is operated such that frequency shift in the magnetron at the other power at least partially matches the resonance frequency shift in the accelerator when those RF power pulses are provided. In other examples, when the power generator is a klystron or electrically tunable magnetron, separate automatic frequency controllers are provided for each RF power pulse. Methods and systems are disclosed.
摘要:
The invention relates to an X-ray tube, especially a microfocus X-ray tube (2), comprising means (18) for orienting an electron beam (10) towards a target (4). A control device (20) is used to control the means for orienting the electron beam (10) towards the target (4) in such a way that the electron beam (10) scans the target (4), in addition to a measuring device (22) for measuring the intensity of the target current which flows to different scanning sites when the target (4) is scanned by the electron beam (10), or a measuring variable dependent on the target current, and an evaluation device (24) for associating each measured value of the target flow with the corresponding scanning site. Said X-ray tube enables the easy and economical implementation of a method for checking the operability of the target (4).
摘要:
According to one aspect of the present invention, a substrate processing system is provided. The system may include a chamber wall enclosing a chamber, a substrate support positioned within the chamber to support a substrate, an electromagnetic radiation source to emit electromagnetic radiation onto the substrate on the substrate support, the electromagnetic radiation causing photoelectrons to be emitted from a material on the substrate, an analyzer to capture the photoelectrons emitted from the substrate, and a magnetic field generator to generate a magnetic field within the chamber and guide the photoelectrons from the substrate to the analyzer.
摘要:
The present invention relates to X-ray generating technology in general. Providing an electron collecting element of an X-ray generating device statically may allow for the manufacture of X-ray systems with reduced moving parts and actuating parts, possibly reducing manufacturing costs and sources for failure. Consequently, an electron collecting element with increased thermal loadability is presented. According to the present invention, an electron collecting element (28) is provided, comprising a surface element (22) and a heat conducting element (26). The heat conducting element (26) comprises a first thermal conductivity in a first direction and at least a second thermal conductivity in at least a second direction. The first thermal conductivity is greater than the second thermal conductivity. The first direction is substantially perpendicular to the surface element (22).
摘要:
A method for obtaining a concentrated, monochromatic x-ray beam from a standard x-ray tube or other source of polychromatic emission. X-rays from the anode of the x-ray tube fluoresce an adjoining, independent target that produces a monochromatic spectrum, a portion of which is focused by the x-ray optical system. This two-stage method gives the system considerably versatility without undue loss in signal. The two-stage concentrator makes practical the use of focusing optics in hand-held and portable instruments.
摘要:
An X-ray source for producing soft X-rays, the X-ray source comprising: a cathode having an electron-emitting structure supported by a support structure, the electron-emitting structure being at least partially transparent to X-rays within a region bounded by the support structure;an anode having an X-ray emitting surface parallel to the electron-emitting structure of the cathode; and an electrically insulating spacer arranged between the anode and the cathode;wherein the electron-emitting structure of the cathode and the X-ray emitting surface of the anode are arranged such that, in use, the electron-emitting structure is operable to bombard the anode with electrons, causing X-rays to be emitted from the X-ray emitting surface and to pass through the cathode; and wherein the insulating spacer is arranged between the anode and the support structure of the cathode and projects beyond the support structure, across part of the anode,into the said region.