公开(公告)号：EP0745015B1

公开(公告)日：2006-05-03

申请号：EP95909534.0

申请日：1995-02-09

申请人： NEW WAVE RESEARCH

发明人： LEONG, Tony, P. ,  NORTH, Edward, S. ,  HERBST, Richard, Linsley

IPC分类号： B23K26/06

CPC分类号： B23K26/0665 ,  B23K26/032 ,  B23K26/06 ,  B23K26/0648 ,  G02B5/3083 ,  G02B26/007 ,  G02B26/023 ,  G02F1/1309 ,  G02F1/37 ,  G02F2001/354 ,  H01L22/22 ,  H01L2924/0002 ,  H01L2924/00

摘要： A probe station which includes a base machine (10), a probe platen (17) mounted on the base machine (10), and a single passive air cooled Nd:YAG laser (100), mounted with a microscope (22). The single laser supplies an output beam to a first non-linear crystal (106) for generating the second harmonic of the fundamental output wavelength. A mirror (107) then directs the beam at a 90 degree angle through a polarizer (108) to repolarize the fundamental wavelength. The beam then passes to a second non-linear crystal (109) for generating the third and fourth harmonic of the fundamental wavelength. A reflecting mirror (111) then directs the beam to a variable attenuator (112) to select the appropriate output wavelength in the infrared (1064 nm), in the green (532 nm), or in the ultraviolet (355 or 266 nm).

公开(公告)号：EP1422796A2

公开(公告)日：2004-05-26

申请号：EP03257173.9

申请日：2003-11-13

申请人： New Wave Research

发明人： Liu, Kuo-Ching

IPC分类号： H01S3/23 ,  H01S3/081 ,  H01S3/109

CPC分类号： H01S3/081 ,  H01S3/07 ,  H01S3/08054 ,  H01S3/0813 ,  H01S3/0815 ,  H01S3/082 ,  H01S3/109 ,  H01S3/11

摘要： A laser system includes a resonator having two gain modules generating pulses, coupled with intra-cavity polarization into a single beam line, using a single output coupler. A laser controller controls the laser heads to emit pulses in rapid succession, such as pulse pairs separated by a time interval of less than about 1 millisecond, and in some embodiments in a range from about zero (overlapping) to about 100 microseconds. Also a system adapted for metrology using particle image velocimetry PIV uses the resonator. For PIV, optics are provided in the output beam paths which expand the beam to form pulsed illumination sheets. A camera is used to capture images of the pulsed illumination sheets for analysis.

摘要翻译： 激光系统包括具有两个增益模块（350A，350B）的谐振器，该增益模块使用单个输出耦合器（354）产生与腔内偏振耦合到单个光束线（362）中的脉冲。 激光控制器（340）控制激光头（350A，353A，350B，353B）以快速连续的方式发射脉冲，例如以小于约1毫秒的时间间隔分开的脉冲对（505），并且在一些实施例中 从大约零（重叠）到大约100微秒的范围。 同样，使用粒子图像测速法PIV的计量系统也使用谐振器。 对于PIV，在输出光束路径（504）中提供光学器件（515,520,521），其使光束膨胀以形成脉冲照明片材（525）。 相机（533）用于捕获脉冲照明片材（525）的图像（532）用于分析。

公开(公告)号：EP1422796B1

公开(公告)日：2007-07-11

申请号：EP03257173.9

申请日：2003-11-13

申请人： NEW WAVE RESEARCH

发明人： Liu, Kuo-Ching

IPC分类号： H01S3/23 ,  H01S3/081 ,  H01S3/109

CPC分类号： H01S3/081 ,  H01S3/07 ,  H01S3/08054 ,  H01S3/0813 ,  H01S3/0815 ,  H01S3/082 ,  H01S3/109 ,  H01S3/11

公开(公告)号：EP1021822A2

公开(公告)日：2000-07-26

申请号：EP98946037.3

申请日：1998-09-11

申请人： New Wave Research

发明人： MARCUSE, Arno, G. ,  NORTH, Edward, S. ,  MOST, Robert, A.

IPC分类号： H01L21/00

CPC分类号： B08B7/0035 ,  B08B7/0042 ,  G01R3/00

摘要： A method and device for cleaning an electrical contact (310a). Semiconductor testing device. Process of manufacturing integrated circuits. The method comprises directing electromagnetic radiation (210) at the contact. The electromagnetic energy reacts with at least one of the contact (310a) and the debris (314) so as to cause at least a portion of the debris (314) on the contact (310a) to be removed. The electromagnetic radiation (210) may comprise coherent radiation, such as electromagnetic radiation generated using a laser. According to one aspect of the invention, the contact (310a) comprises a conductive material and the electromagnetic radiation (210) causes removal of the portion of the debris (314) substantially without removal of the conductive material. According to another aspect of the invention, the electromagnetic radiation (210) at least partially melts the conductive material. In one preferred system, the contact (310a) comprises a probe tip. In such a system the probe tip may comprise the tip of a probe needle mounted to a probe card used for testing integrated circuits.

公开(公告)号：EP0745015A1

公开(公告)日：1996-12-04

申请号：EP95909534.0

申请日：1995-02-09

申请人： NEW WAVE RESEARCH

发明人： LEONG, Tony, P. ,  NORTH, Edward, S. ,  HERBST, Richard, Linsley

IPC分类号： G01R31 ,  B23K26 ,  G02B5 ,  G02B7 ,  G02F1 ,  H01L21 ,  H01S3

CPC分类号： B23K26/0665 ,  B23K26/032 ,  B23K26/06 ,  B23K26/0648 ,  G02B5/3083 ,  G02B26/007 ,  G02B26/023 ,  G02F1/1309 ,  G02F1/37 ,  G02F2001/354 ,  H01L22/22 ,  H01L2924/0002 ,  H01L2924/00

摘要： A probe station which includes a base machine (10), a probe platen (17) mounted on the base machine (10), and a single passive air cooled Nd:YAG laser (100), mounted with a microscope (22). The single laser supplies an output beam to a first non-linear crystal (106) for generating the second harmonic of the fundamental output wavelength. A mirror (107) then directs the beam at a 90 degree angle through a polarizer (108) to repolarize the fundamental wavelength. The beam then passes to a second non-linear crystal (109) for generating the third and fourth harmonic of the fundamental wavelength. A reflecting mirror (111) then directs the beam to a variable attenuator (112) to select the appropriate output wavelength in the infrared (1064 nm), in the green (532 nm), or in the ultraviolet (355 or 266 nm).

公开(公告)号：EP1422796A3

公开(公告)日：2005-02-23

申请号：EP03257173.9

申请日：2003-11-13

申请人： New Wave Research

发明人： Liu, Kuo-Ching

IPC分类号： H01S3/23 ,  H01S3/081 ,  H01S3/109

CPC分类号： H01S3/081 ,  H01S3/07 ,  H01S3/08054 ,  H01S3/0813 ,  H01S3/0815 ,  H01S3/082 ,  H01S3/109 ,  H01S3/11

摘要： A laser system includes a resonator having two gain modules (350A,350B) generating pulses, coupled with intra-cavity polarization into a single beam line (362), using a single output coupler (354). A laser controller (340) controls the laser heads (350A,353A,350B,353B) to emit pulses in rapid succession, such as pulse pairs (505) separated by a time interval of less than about 1 millisecond, and in some embodiments in a range from about zero (overlapping) to about 100 microseconds. Also a system adapted for metrology using particle image velocimetry PIV uses the resonator. For PIV, optics (515,520,521) are provided in the output beam paths (504) which expand the beam to form pulsed illumination sheets (525). A camera (533) is used to capture images (532) of the pulsed illumination sheets (525) for analysis.

公开(公告)号：EP0745015A4

公开(公告)日：1997-12-03

申请号：EP95909534

申请日：1995-02-09

申请人： NEW WAVE RESEARCH

发明人： LEONG TONY P ,  NORTH EDWARD S ,  HERBST RICHARD LINSLEY

IPC分类号： G01R31/28 ,  B23K26/00 ,  B23K26/03 ,  B23K26/06 ,  B23K26/067 ,  G01R31/00 ,  G02B5/30 ,  G02B7/00 ,  G02F1/13 ,  G02F1/35 ,  G02F1/37 ,  H01L21/66 ,  H01S3/00 ,  H01S3/109

CPC分类号： B23K26/0665 ,  B23K26/032 ,  B23K26/06 ,  B23K26/0648 ,  G02B5/3083 ,  G02B26/007 ,  G02B26/023 ,  G02F1/1309 ,  G02F1/37 ,  G02F2001/354 ,  H01L22/22 ,  H01L2924/0002 ,  H01L2924/00

摘要： A probe station which includes a base machine (10), a probe platen (17) mounted on the base machine (10), and a single passive air cooled Nd:YAG laser (100), mounted with a microscope (22). The single laser supplies an output beam to a first non-linear crystal (106) for generating the second harmonic of the fundamental output wavelength. A mirror (107) then directs the beam at a 90 degree angle through a polarizer (108) to repolarize the fundamental wavelength. The beam then passes to a second non-linear crystal (109) for generating the third and fourth harmonic of the fundamental wavelength. A reflecting mirror (111) then directs the beam to a variable attenuator (112) to select the appropriate output wavelength in the infrared (1064 nm), in the green (532 nm), or in the ultraviolet (355 or 266 nm).