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公开(公告)号：EP0782154A1
公开(公告)日：1997-07-02
申请号：EP96917657.7
申请日：1996-06-12
发明人： ASADA, Norihiro
CPC分类号： H01F17/0013 , H01F19/04 , H01F27/2804 , H01F30/10 , H01F2027/2809
摘要： The reference numeral (2) designates a primary coil substrate formed by printing a coil pattern with resist on a commercial double-sided printed-circuit board and etching it, and the reference numeral (4) designates a secondary coil substrate formed in the same process. The reference numerals (1, 3 and 5) designate insulating boards. A flat transformer is produced by interposing adhesive sheets between these boards (1 to 5), compressing and heating them to form a laminated plate, punching the laminated plate into a desired shape, fitting a core (7) into the laminated plate punched, and fastening it by means of fasteners (8). The transformer can have desirable dielectric strength depending on the materials and thicknesses of the insulation plates (1, 3 and 5).
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公开(公告)号：EP0774681A1
公开(公告)日：1997-05-21
申请号：EP96916314.6
申请日：1996-06-05
IPC分类号： G02B26/10
CPC分类号： G02B26/101 , B81B3/0062 , B81B2201/042 , G02B7/1821 , G02B26/085 , H01H50/005
摘要： An electromagnetic actuator for driving a movable plate equipped with an optical element such as a mirror on the basis of the operation principle of a galvanometer. The structure of the movable plate is simplified, and a driving coil and a wiring are formed by aluminium vapor deposition to improve durability. When an impact brings the movable plate outside the allowable rocking range of the movable plate, a stopper prevents excessive displacement of the movable plate to thereby prevent destruction of a torsion bar that supports the movable plate. Moreover, electrical connection in the torsion bar is eliminated to prolong the service life, and a production process is simplified to reduce a production cost.
摘要翻译： 一种电磁致动器，用于根据检流计的操作原理驱动装有诸如反射镜的光学元件的可动板。 可动板的结构简化，通过铝蒸气沉积形成驱动线圈和布线以提高耐久性。 当冲击使可动板在可动板的允许摇摆范围之外时，止动件防止可动板的过度位移，从而防止支撑可动板的扭力杆的破坏。 此外，消除了扭杆中的电连接以延长使用寿命，并且简化了生产过程以降低生产成本。
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公开(公告)号：EP0866345A4
公开(公告)日：2000-08-30
申请号：EP96916349
申请日：1996-06-07
发明人： ASADA NORIHIRO
CPC分类号： G01J1/04 , G01J1/0204 , G01J1/0266 , G01J1/0403 , G02B26/085
摘要： A movable plate (5) and a torsion bar (6) are integrally formed on a silicon substrate (2). A planar coil (7) is disposed at the peripheral edge portion of the movable plate (5), and a photodiode (8) is disposed at the center. Permanent magnets (10A, 10B, 11A and 11B) are disposed on the upper and lower peripheral edges of the movable plate (5), and detection coils (12A and 12B) for detecting a displacement angle of the movable plate (5) are disposed below the movable plate (5). When a current is supplied to the planar coil (7), a force is generated in association with the magnetic fields of the permanent magnets (10A, 10B, 11A and 11B), and thus the movable plate (5) rotates on the torsion bar (6), so that the direction of the optical axis of the photodiode (8) changes. The displacement angle of the direction of the optical axis can be detected as a change in the mutual inductance between the planar coil (7) and the detection coils (12A, 12B), that is, as a change in voltage induced in the detection coils (12A, 12B).
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公开(公告)号：EP0866345A1
公开(公告)日：1998-09-23
申请号：EP96916349.2
申请日：1996-06-07
发明人： ASADA, Norihiro
CPC分类号： G01J1/04 , G01J1/0204 , G01J1/0266 , G01J1/0403 , G02B26/085
摘要： A movable plate 5 and torsion bars 6 are monolithically formed in a semiconductor substrate 2. A flat coil 7 is formed on peripheries of the movable plate 5 while a photodiode 8 is formed on a central portion of the movable plate 5. Permanent magnets 10A, 10B, 11A and 11B are provided on upper and lower spaces of the peripheries of the movable plate 5 while coils 12A and 12B for detecting a displacement angle of the movable plate 5 are provided on lower spaces of the peripheries of the movable plate 5. Flowing a current into the flat coil 7 generates a driving force depending on a relation with magnetic fields induced by the permanent magnets 10A, 10B, 11A and 11B, which makes the movable plate 5 to rotate axially around the torsion bars 6 to vary an orienting direction of an optical axis of the photodiode 8. The displacement angle of the optical axis is detectable by changes in mutual inductances between the flat coil 7 and the detection coils 12A and 12B, namely, changes in induction voltages of the detection coils 12A and 12B.
摘要翻译： 可移动板5和扭力杆6在半导体衬底2中单片地形成。在可动板5的中心部分形成光电二极管8时，在可动板5的周边形成平面线圈7.永磁体10A， 10B，11A和11B设置在可移动板5的周边的上部和下部空间中，而用于检测可动板5的位移角的线圈12A和12B设置在可动板5的周边的下部空间上。 进入扁平线圈7的电流产生取决于与由永磁体10A，10B，11A和11B引起的磁场的关系的驱动力，这使得可动板5围绕扭杆6轴向旋转以改变定向方向 光轴的光轴的位移角可以通过扁平线圈7和检测线圈12A和12B之间的互感的变化来检测，即感应变化 检测线圈12A和12B的电压。
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公开(公告)号：EP0825458A1
公开(公告)日：1998-02-25
申请号：EP97906865.7
申请日：1997-03-10
发明人： ASADA, Norihiro, Nihon Shingo K.K. Yono Jigyosho , FUTSUHARA, Koichi, Nihon Shingo K.K. Yono Jigyosho
IPC分类号： G01V8/10
摘要： A laser beam generated from a laser beam generating means 201 is reflected on a semiconductor mirror galvanometer 102. A region 105 to be inspected is scanned with the reflected laser beam 106. The laser beam 106 passing through the region 105 to be inspected is received by a light receiving device array 130. A pulse train included in an output signal produced from the light receiving device array 130 are monitored by a signal processing circuit 206. If an obstacle intrudes into the region 105 to be inspected and induces a pulse deficiency in the pulse train, the deficiency is detected by use of a pulse deficiency detecting circuit 204. A constitution mentioned above provides an optical barrier apparatus capable of reducing manufacturing costs without endangering a fail-safe property.
摘要翻译： 从激光束产生装置201产生的激光束被反射在半导体反射镜电流计102上。被检查的区域105被反射的激光束106扫描。通过要检查的区域105的激光束106被 光接收装置阵列130.由光接收装置阵列130产生的输出信号中包括的脉冲串由信号处理电路206监视。如果障碍物进入待检查的区域105，并引起脉冲不足 脉冲串，通过使用脉冲缺陷检测电路204检测不足。上述结构提供了能够降低制造成本而不危及故障安全性的光阻挡装置。
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公开(公告)号：EP0866345B1
公开(公告)日：2003-09-03
申请号：EP96916349.2
申请日：1996-06-07
发明人： ASADA, Norihiro
CPC分类号： G01J1/04 , G01J1/0204 , G01J1/0266 , G01J1/0403 , G02B26/085
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公开(公告)号：EP0782154A4
公开(公告)日：1999-08-11
申请号：EP96917657
申请日：1996-06-12
发明人： ASADA NORIHIRO
CPC分类号： H01F17/0013 , H01F19/04 , H01F27/2804 , H01F30/10 , H01F2027/2809
摘要： The reference numeral (2) designates a primary coil substrate formed by printing a coil pattern with resist on a commercial double-sided printed-circuit board and etching it, and the reference numeral (4) designates a secondary coil substrate formed in the same process. The reference numerals (1, 3 and 5) designate insulating boards. A flat transformer is produced by interposing adhesive sheets between these boards (1 to 5), compressing and heating them to form a laminated plate, punching the laminated plate into a desired shape, fitting a core (7) into the laminated plate punched, and fastening it by means of fasteners (8). The transformer can have desirable dielectric strength depending on the materials and thicknesses of the insulation plates (1, 3 and 5).
摘要翻译： 附图标记（2）表示通过在商业双面印刷电路板上印刷具有抗蚀剂的线圈图案并进行蚀刻而形成的初级线圈基板，附图标记（4）表示以相同方法形成的次级线圈基板 。 附图标记（1,3和5）表示绝缘板。 通过在这些板（1至5）之间插入粘合片，压缩并加热它们以形成层压板，将层压板冲压成所需形状，将芯（7）装配到冲压的层压板中，制造扁平变压器，以及 通过紧固件（8）固定。 根据绝缘板（1,3和5）的材料和厚度，变压器可以具有期望的绝缘强度。
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公开(公告)号：EP0774681B1
公开(公告)日：2007-12-05
申请号：EP96916314.6
申请日：1996-06-05
IPC分类号： G02B26/10
CPC分类号： G02B26/101 , B81B3/0062 , B81B2201/042 , G02B7/1821 , G02B26/085 , H01H50/005
摘要： An electromagnetic actuator for driving a movable plate equipped with an optical element such as a mirror on the basis of the operation principle of a galvanometer. The structure of the movable plate is simplified, and a driving coil and a wiring are formed by aluminium vapor deposition to improve durability. When an impact brings the movable plate outside the allowable rocking range of the movable plate, a stopper prevents excessive displacement of the movable plate to thereby prevent destruction of a torsion bar that supports the movable plate. Moreover, electrical connection in the torsion bar is eliminated to prolong the service life, and a production process is simplified to reduce a production cost.
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公开(公告)号：EP0825458B1
公开(公告)日：2002-10-30
申请号：EP97906865.7
申请日：1997-03-10
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公开(公告)号：EP0825458A4
公开(公告)日：1998-07-01
申请号：EP97906865
申请日：1997-03-10
发明人： ASADA NORIHIRO , FUTSUHARA KOICHI
摘要： A laser beam generated by a laser beam source (201) is reflected on a semiconductor galvanomirror (102) to allow the reflected beam (106) to scan a region (105) to be detected. The laser beam (106) passing through the region (105) is received by a photodetector array (130). An output pulse train from the photodetector array(130) is monitored by a signal processing circuit (206). When an obstruction enters the region (105) and causes some missing pulses in the pulse train, that incident is detected by a pulse detecting circuit (204). This configuration provides a low-cost optical barrier without spoiling the fail-safe characteristics thereof.
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