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公开(公告)号：EP4435502A1
公开(公告)日：2024-09-25
申请号：EP23759017.9
申请日：2023-02-08
发明人： LIANG, Hanxiao , SONG, Yipin , ZHOU, Yingcong , WU, Haicang , MAO, Wenhao , SONG, Shiwei , SUN, Weiqi , YU, Qingyang , ZHANG, Zhouyu
IPC分类号： G02F1/03
摘要： An electro-optic modulator is provided, including: a light splitting element; a light combining element; a first waveguide arm and a second waveguide arm that are arranged in parallel and are connected between the light splitting element and the light combining element; and a first ground electrode, a first signal electrode, a second ground electrode, a second signal electrode, and a third ground electrode that are arranged in sequence, where the first waveguide arm is located between the first ground electrode and the first signal electrode, the second waveguide arm is located between the second ground electrode and the second signal electrode, and the first signal electrode and the second signal electrode are configured to receive differential signals. A technical solution of an embodiment of the present disclosure can improve working performance of the electro-optic modulator.
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公开(公告)号：EP4354212A1
公开(公告)日：2024-04-17
申请号：EP22831365.6
申请日：2022-04-20
发明人： LIANG, Hanxiao , SONG, Yipin , ZHOU, Yingcong , WU, Haicang , MAO, Wenhao , SONG, Shiwei , SUN, Weiqi , YU, Qingyang
IPC分类号： G02F1/01
摘要： A thermo-optic phase modulation module and an optical modulator are provided. The thermo-optic phase modulation module comprises: a substrate; an isolation layer located on substrate; a first waveguide located on isolation layer; and at least one heating element located on the isolation layer and not overlapping with the first waveguide in a direction perpendicular to a bottom surface of the substrate. The thermo-optic phase modulation module is provided with a plurality of side heat insulation grooves extending downwardly from a top surface and exposing the substrate, and the plurality of side heat insulation grooves are arranged around the first waveguide and the at least one heating element.
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公开(公告)号：EP4350426A1
公开(公告)日：2024-04-10
申请号：EP22827583.0
申请日：2022-06-21
发明人： LIANG, Hanxiao , SONG, Yipin , ZHOU, Yingcong , WU, Haicang , MAO, Wenhao , SONG, Shiwei , SUN, Weiqi , YU, Qingyang
IPC分类号： G02F1/03
摘要： The present disclosure provides a waveguide line electrode structure and an electro-optic modulator. The waveguide line electrode structure is additionally provided with a covering layer located above an optical waveguide, and an electrode extension portion connected to a signal electrode or a ground electrode extends to an upper surface of the covering layer. By means of the waveguide line electrode structure according to embodiments of the present disclosure, it is ensured that a distance between an electrode extension portion for the signal electrode and an electrode extension portion for the ground electrode is close enough, and it is also ensured that there is a certain distance between the electrode extension portion and the corresponding optical waveguide. Therefore, by means of the waveguide line electrode structure according to the present disclosure, electro-optical conversion efficiency is increased, and normal transmission of light in a first branch or light in a second branch is prevented from being affected, such that a modulation effect of the waveguide line electrode structure is significantly improved.
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公开(公告)号：EP4020070A1
公开(公告)日：2022-06-29
申请号：EP21804238.0
申请日：2021-01-26
发明人： LIANG, Hanxiao , SONG, Yipin , ZHOU, Yincong , WU, Haicang , MAO, Wenhao , SONG, Shiwei
IPC分类号： G02F1/035
摘要： A coplanar waveguide wire electrode structure and a modulator. The coplanar waveguide wire electrode structure comprises a metal electrode and an optical waveguide (3). The metal electrode comprises ground electrodes (1) and a signal electrode (2), and connecting arms (7) are arranged on both sides of the signal electrode (2). The inner sides of the ground electrodes (1) are provided with connecting arms (7), the tail ends of the connecting arms (7) of the signal electrode (2) are provided with signal wire extension electrodes (8), and the tail ends of the connecting arms (7) of the ground electrodes (1) are provided with ground wire extension electrodes (6). A distance D1 is provided between the signal wire extension electrodes (8) and the ground wire extension electrodes (6), and the optical waveguide (3) passes through the spaces between the signal wire extension electrodes (8) and the ground wire extension electrodes (6). By extending the metal electrode, the distance between the electrodes is actually shortened, so that in the case of less influence on a characteristic impedance, an interval between the electrodes is reduced, the electric field intensity between the electrodes is increased, the electro-optic conversion efficiency is greatly improved, and a driving voltage of the modulator is decreased.
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公开(公告)号：EP4006629A1
公开(公告)日：2022-06-01
申请号：EP20892864.8
申请日：2020-03-30
发明人： LIANG, Hanxiao , SONG, Yipin
摘要： Provided is a distributed optical phase modulator, comprising: a substrate (10); an optical waveguide (20) arranged on the substrate (10); a drive electrode (30) that is arranged on the substrate (10) and comprises a plurality of sub drive electrodes (31) arranged at intervals; and at least one shielding electrode (40), wherein at least some shielding electrodes and the sub drive electrodes (31) are arranged at intervals. The optical waveguide (20) sequentially passes through the sub drive electrodes (31) and the shielding electrodes (40). The length of each part of the drive electrode (30) is far less than the total length of an equivalent traditional modulator, and the drive signal voltage of each part is also far less than the drive signal voltage of the equivalent traditional modulator. In each part of the drive electrode (30), the propagation of an optical signal and the propagation of an electrical signal can be approximately synchronous, even synchronous. The phenomenon of walk-off between the optical signal and the electrical signal is minimized, and the upper limit of a modulation bandwidth is improved. The shielding electrodes (40) are respectively arranged between the sub drive electrodes (31), so that crosstalk between the sub drive electrodes (31) can be shielded, and crosstalk between the sub drive electrodes (31) can be greatly reduced.
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公开(公告)号：EP4459366A1
公开(公告)日：2024-11-06
申请号：EP22928404.7
申请日：2022-12-15
发明人： LIANG, Hanxiao , SONG, Yipin , ZHOU, Yingcong , WU, Haicang , MAO, Wenhao , SONG, Shiwei , SUN, Weiqi , YU, Qingyang , ZHANG, Zhouyu
IPC分类号： G02F1/035
摘要： Provided is an electro-optic modulator, comprising: a first light-splitting element, comprising a first input port configured to input an operating signal, a first output port configured to output a main path signal, and a second output port configured to output a first monitoring signal; a second light-splitting element, which has a one-in two-out structure and an input port thereof being connected to the first output port; two waveguide arms, with one end of each of the waveguide arms being correspondingly connected to two output ports of the second light-splitting element; a bias voltage modulation module, which is configured to apply a bias voltage to the two waveguide arms on the basis of a bias voltage signal; a radio frequency modulation module, which is configured to apply a radio frequency voltage to the two waveguide arms on the basis of a radio frequency signal; a third light-splitting element, which has a two-in three-out structure and two input ports thereof being correspondingly connected to the other end of each of the two waveguide arms; and a fourth light-splitting element, which has a one-in two-out structure and an input port thereof being connected to a first output port of the third light-splitting element, the fourth light-splitting element comprising a third output port configured to output a maximum optical power value and a fourth output port configured to output a second monitoring signal.
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公开(公告)号：EP4382975A1
公开(公告)日：2024-06-12
申请号：EP22874362.1
申请日：2022-07-07
发明人： LIANG, Hanxiao , SONG, Yipin , ZHOU, Yingcong , WU, Haicang , MAO, Wenhao , SONG, Shiwei , SUN, Weiqi , YU, Qingyang
摘要： A spot-size conversion structure (100) and a photonic device (1). The spot-size conversion structure (100) includes: a substrate (101), an isolation layer (102) and a waveguide layer (103) arranged in sequence. The waveguide layer (103) includes N sub-waveguide layers (1030) arranged in sequence along a direction away from the substrate (101), each of the sub-waveguide layers being of a protrusion shape, and N being a natural number and N ≥ 3. Wherein, the spot-size conversion structure (100) has a first end face (100a) configured to be coupled to an integrated optical waveguide, and a second end face (100b) opposite to the first end face (100a) and configured to be coupled to an optical fiber. In the direction away from the substrate (101), an orthographic projection of an (n+1)th sub-waveguide layer (1030) on the substrate (101) falls within an orthographic projection of an nth sub-waveguide layer (1030) on the substrate (101), n being a natural number and 1 ≤ n ≤ N-1. In a direction away from the first end face (100a), a width of an orthographic projection of each sub-waveguide layer (1030) on the substrate (101) is gradually narrowed. A wide end of each sub-waveguide layer (1030) extends to the first end face (100a), a narrow end of a first sub-waveguide layer (1030) extends to the second end face (100b) or is at a distance from the second end face (100b), and a narrow end of the (n+1)th sub-waveguide layer (1030) is at a distance from a narrow end of the nth sub-waveguide layer (1030).
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公开(公告)号：EP4006630A1
公开(公告)日：2022-06-01
申请号：EP20893527.0
申请日：2020-01-09
发明人： LIANG, Hanxiao , SONG, Yipin
摘要： A distributed light intensity modulator, comprising: a substrate (60); a light splitting element (10), an optical waveguide (20) and a light combining element (30) which are sequentially connected and provided on the substrate (60); a driving electrode (40) provided on the substrate (60) and comprising a plurality of sub-driving electrodes (41) arranged at intervals, the optical waveguide (20) sequentially passing through the sub-driving electrodes (41); and at least one voltage bias electrode (50), at least some of which are provided spaced apart from the sub-driving electrodes (41). The length of each sub-driving electrode (41) is far less than the total length of such conventional modulator, and in each sub-driving electrode (41), an optical signal and an electrical signal can be synchronously propagated approximately. The distributed light intensity modulator minimizes the walk-off phenomenon between photoelectric signals. The voltage bias electrodes (50) are provided between the sub-driving electrodes (41) to serve as crosstalk prevention devices for shielding crosstalk between the sub-driving electrodes (41), so that while improving the modulation bandwidth and reducing the driving voltage, the modulator can reduce the bias-drift phenomenon, and prevent the crosstalk between the sub-driving electrodes (41) caused by improving the modulation bandwidth and reducing the driving voltage.
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公开(公告)号：EP4451045A1
公开(公告)日：2024-10-23
申请号：EP24167931.5
申请日：2024-03-29
发明人： LIANG, Hanxiao , SONG, Yipin , ZHOU, Yingcong , WU, Haicang , MAO, Wenhao , SONG, Shiwei , SUN, Weiqi , YU, Qingyang , ZHANG, Zhouyu
摘要： A phase modulation module and an electro-optic modulator are provided. The phase modulation module has an input end face and an output end face and comprises a substrate, an isolation layer, a waveguide layer, and an electrode layer which are arranged in sequence. The electrode layer includes a plurality of electrodes which are arranged at intervals and configured to form a modulating electric field region. The waveguide layer comprises a plate layer, a first ridge layer and a second ridge layer which are arranged in sequence in a direction away from the substrate, wherein the plate layer extends to the input end face and the output end face; the first ridge layer protrudes in a ridge shape from a surface of the plate layer, extends to the input end face and the output end face, and is partially located in the modulating electric field region; the second ridge layer protrudes in a ridge shape from a surface of the first ridge layer, has a spacing from each of the input end face and the output end face, and is partially located in the modulating electric field region; and the second ridge layer and the first ridge layer form at least one waveguide arm extending to the input end face and the output end face and modulated by the modulating electric field region.
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公开(公告)号：EP4382974A1
公开(公告)日：2024-06-12
申请号：EP23855751.6
申请日：2023-08-15
发明人： LIANG, Hanxiao , SONG, Yipin , ZHOU, Yingcong , WU, Haicang , MAO, Wenhao , SONG, Shiwei , SUN, Weiqi , YU, Qingyang , ZHANG, Zhouyu
摘要： Provided are a spot-size converter structure and a photonic device. The spot-size converter structure comprises: a first end face configured to be coupled to an integrated optical waveguide, and a second end face parallel to the first end face configured to be coupled to an optical fiber and. The spot-size converter structure comprises: a substrate; an isolation layer located on one side of the substrate, the isolation layer comprising a first etched portion, a second etched portion and a first transmission portion which extend to the second end face in a longitudinal direction, wherein the first transmission portion is located between the first etched portion and the second etched portion, and the longitudinal direction is orthogonal to the second end face; a waveguide layer located on one side of the isolation layer away from the substrate, the width of the waveguide layer decreasing in a gradient manner in a direction approaching the second end face, wherein the width direction is orthogonal to the longitudinal direction and parallel to a bottom face of the substrate; and a covering layer located on one side of the waveguide layer away from the substrate and covering the waveguide layer, the covering layer comprising a second transmission portion extending to the second end face in the longitudinal direction and protruding in the form of a ridge on a surface of the first transmission portion.
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