公开(公告)号：EP0549733A4

公开(公告)日：1993-09-08

申请号：EP92902207

申请日：1991-09-17

申请人： APPLIED CHEMICAL SOLUTIONS

发明人： GEATZ, J., TOBIN

IPC分类号： F17D1/08 ,  B01F15/04 ,  B24B37/04 ,  B67D7/02 ,  G01F11/28 ,  H01L21/00 ,  H01L21/304 ,  G01F11/00

CPC分类号： B67D7/0272 ,  B01F15/00422 ,  B01F15/0454 ,  B01F2215/0036 ,  B24B37/04 ,  B67D7/0283 ,  G01F11/28 ,  H01L21/67253 ,  H01L21/67276 ,  Y10T137/3109 ,  Y10T137/3124 ,  Y10T137/3127

摘要： The present invention provides improved method and apparatus for the transfer and delivery of very high purity chemicals for use in semiconductor production and similar processes. By employing multiple alternating pressure vessels (26, 74a, 74b), chemicals are drawn from virtually any bulk source (10) and delivered to one or more end-users (106). The use of a vacuum system (32) to draw chemicals through sealed conduits eliminates the need for pumps which are a source of both maintenance problems and contamination in the system. Multiple vessels (26, 74a, 74b) provide for a variety of flow options, which include continuous chemical delivery to the end-users (106), recirculation and regular filtration (120, 64, 102) during periods of low use, and built-in redundancy to avoid system shut down if there is a component failure.