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    TWO-STAGE CHEMICAL MIXING SYSTEM
    1.
    发明授权
    TWO-STAGE CHEMICAL MIXING SYSTEM 失效
    阶段的化学搅拌机

    公开(公告)号：EP0864123B1

    公开(公告)日：2003-05-28

    申请号：EP96939567.2

    申请日：1996-11-07

    申请人： APPLIED CHEMICAL SOLUTIONS, INC.

    发明人： FERRI, Edward, T., Jr. ,  GEATZ, J., Tobin ,  GREEN, Randall, L.

    IPC分类号： G05D9/00 ,  B01F3/08 ,  B01F15/04 ,  G05D11/13

    CPC分类号： G05D11/138 ,  G05D11/133

    摘要： A chemical mixing system (10) for mixing ultra pure water (18) and concentrated HF (16) to a desired concentration within a qualification range. Batches of the mixed chemical are mixed in a relatively small mix vessel (12) and transferred to a relatively large mix drum (14). The concentration of the chemical within the mix drum is measured by a concentration monitor (56). If the measured concentration of the chemical in the mix drum is within the qualification range, the batches of chemical in the mix vessel are mixed to the desired concentration. If the measured concentration of the chemical in the mix drum is below the qualification range, the batches of chemical in the mix vessel are mixed to a high concentration which is greater than the desired concentration. If the measured concentration of the chemical in the mix drum is above the qualification range, the batches of chemical in the mix vessel are mixed to a low concentration which is less than the desired concentration. Batch averaging is thereby performed to maintain the concentration of chemical in the mix drum within the desired qualification range.

    TWO-STAGE CHEMICAL MIXING SYSTEM
    2.
    发明公开
    TWO-STAGE CHEMICAL MIXING SYSTEM 失效
    阶段的化学搅拌机

    公开(公告)号：EP0864123A1

    公开(公告)日：1998-09-16

    申请号：EP96939567.0

    申请日：1996-11-07

    申请人： APPLIED CHEMICAL SOLUTIONS, INC.

    发明人： FERRI, Edward, T., Jr. ,  GEATZ, J., Tobin ,  GREEN, Randall, L.

    IPC分类号： B01F15 ,  G05D11

    CPC分类号： G05D11/138 ,  G05D11/133

    摘要： A chemical mixing system (10) for mixing ultra pure water (18) and concentrated HF (16) to a desired concentration within a qualification range. Batches of the mixed chemical are mixed in a relatively small mix vessel (12) and transferred to a relatively large mix drum (14). The concentration of the chemical within the mix drum is measured by a concentration monitor (56). If the measured concentration of the chemical in the mix drum is within the qualification range, the batches of chemical in the mix vessel are mixed to the desired concentration. If the measured concentration of the chemical in the mix drum is below the qualification range, the batches of chemical in the mix vessel are mixed to a high concentration which is greater than the desired concentration. If the measured concentration of the chemical in the mix drum is above the qualification range, the batches of chemical in the mix vessel are mixed to a low concentration which is less than the desired concentration. Batch averaging is thereby performed to maintain the concentration of chemical in the mix drum within the desired qualification range.

    APPARATUS AND METHOD FOR USE IN CHEMICAL-MECHANICAL POLISHING PROCEDURES
    3.
    发明公开
    APPARATUS AND METHOD FOR USE IN CHEMICAL-MECHANICAL POLISHING PROCEDURES 失效
    用于化学机械抛光程序的装置和方法

    公开(公告)号：EP0771235A1

    公开(公告)日：1997-05-07

    申请号：EP95927147.0

    申请日：1995-07-13

    申请人： APPLIED CHEMICAL SOLUTIONS, INC.

    发明人： FERRI, Edward, T., Jr. ,  GEATZ, J., Tobin ,  CORLETT, Gary, L.

    IPC分类号： B24B57 ,  B01J4 ,  B24B37 ,  C09K3 ,  G01F11

    CPC分类号： G01F11/28 ,  B01J4/02 ,  B01J2219/00006 ,  B24B37/04 ,  B24B57/02 ,  C09K3/1463

    摘要： The present invention is an improved apparatus and method for mixing, storing, and delivering slurry chemicals (12, 14, 16) for use in manufacturing operations (18a, 18b, 18c). The present invention is particularly directed to the effective production and handling of slurry chemicals for use in chemical-mechanical polishing (CMP) processes, where process chemicals tend to be highly abrasive and often difficult to produce and handle. The apparatus (10) of the present invention provides a wide variety of mixing and handling options that have previously been unavailable.

    摘要翻译： 本发明是用于混合，储存和输送用于制造操作（18a，18b，18c）的浆料化学品（12,14,16）的改进设备和方法。 本发明特别涉及用于化学机械抛光（CMP）工艺中的浆料化学品的有效生产和处理，其中工艺化学品倾向于具有高磨蚀性并且通常难以生产和处理。 本发明的设备（10）提供了以前不可用的各种各样的混合和处理选项。

    TWO-STAGE CHEMICAL MIXING SYSTEM
    7.
    发明公开
    TWO-STAGE CHEMICAL MIXING SYSTEM 失效
    ZWEISTUFIGE CHEMISCHE MISCHVORRICHTUNG

    公开(公告)号：EP0864123A4

    公开(公告)日：1999-01-20

    申请号：EP96939567

    申请日：1996-11-07

    申请人： APPLIED CHEMICAL SOLUTIONS

    发明人： FERRI EDWARD T JR ,  GEATZ J TOBIN ,  GREEN RANDALL L

    IPC分类号： B01F15/04 ,  G05D11/13 ,  G05D9/00

    CPC分类号： G05D11/138 ,  G05D11/133

    摘要： A chemical mixing system (10) for mixing ultra pure water (18) and concentrated HF (16) to a desired concentration within a qualification range. Batches of the mixed chemical are mixed in a relatively small mix vessel (12) and transferred to a relatively large mix drum (14). The concentration of the chemical within the mix drum is measured by a concentration monitor (56). If the measured concentration of the chemical in the mix drum is within the qualification range, the batches of chemical in the mix vessel are mixed to the desired concentration. If the measured concentration of the chemical in the mix drum is below the qualification range, the batches of chemical in the mix vessel are mixed to a high concentration which is greater than the desired concentration. If the measured concentration of the chemical in the mix drum is above the qualification range, the batches of chemical in the mix vessel are mixed to a low concentration which is less than the desired concentration. Batch averaging is thereby performed to maintain the concentration of chemical in the mix drum within the desired qualification range.

    摘要翻译： 用于将超纯水和浓缩HF混合至合格范围内所需浓度的化学混合系统。 将混合化学品的批料在相对小的混合容器中混合并转移到相对较大的混合鼓中。 通过浓度监测器测量混合鼓中化学品的浓度。 如果混合桶中化学品的测量浓度在合格范围内，则将混合容器中的化学品批次混合至所需浓度。 如果混合桶中化学品的测量浓度低于限定范围，则将混合容器中的化学品批次混合至高于所需浓度的高浓度。 如果混合鼓中化学品的测量浓度高于限定范围，则将混合容器中的化学品批次混合至低于所需浓度的低浓度。 从而进行批量平均，以将混合鼓中的化学品浓度保持在所需的限定范围内。

    IMPROVED APPARATUS AND METHOD FOR THE TRANSFER AND DELIVERY OF HIGH PURITY CHEMICALS
    8.
    发明公开
    IMPROVED APPARATUS AND METHOD FOR THE TRANSFER AND DELIVERY OF HIGH PURITY CHEMICALS 失效
    转化为产品和本产品的使用减少氮氧化物废气甲醛和气体氮。

    公开(公告)号：EP0549733A1

    公开(公告)日：1993-07-07

    申请号：EP92902207.0

    申请日：1991-09-17

    申请人： APPLIED CHEMICAL SOLUTIONS

    发明人： GEATZ, J., Tobin

    IPC分类号： F17D1 ,  B01F15 ,  B24B37 ,  B67D7 ,  G01F11 ,  H01L21

    CPC分类号： B67D7/0272 ,  B01F15/00422 ,  B01F15/0454 ,  B01F2215/0036 ,  B24B37/04 ,  B67D7/0283 ,  G01F11/28 ,  H01L21/67253 ,  H01L21/67276 ,  Y10T137/3109 ,  Y10T137/3124 ,  Y10T137/3127

    摘要： Procédé et appareil amélioré de transfert et d'acheminement de produits chimiques de grande pureté utilisés dans la production de semi-conducteurs ainsi que dans des procédés similaires. Le fait d'employer des cuves de pression alternantes multiples (26, 74a, 74b) permet d'acheminer des produits chimiques virtuellement à partir de n'importe quelle source (10) de produit en vrac vers un ou plusieurs utilisateurs finaux (106). L'emploi d'un système à vide (32) permet de soutirer des produits chimiques par des conduits étanches, évite d'avoir à utiliser des pompes constituant une source à la fois de problèmes d'entretien et de contamination dans le système. Des cuves multiples (26, 74a, 74b) permettent diverses options de débit, parmi lesquelles l'acheminement continu de produits chimiques vers les utilisateurs finaux (106), le recyclage et le filtrage réguliers (120, 64, 102) pendant les périodes creuses, ainsi qu'une redondance intégrée évitant la coupure du système en cas de panne d'un constituant.