公开(公告)号：EP0867933A3

公开(公告)日：2000-03-15

申请号：EP98301298.0

申请日：1998-02-23

申请人： APPLIED MATERIALS, INC.

发明人： Kholodenko, Arnold ,  Veytser, Alexander M. ,  Shamouilian, Shamouil

IPC分类号： H01L21/68

CPC分类号： C23C16/45521 ,  C23C16/4586 ,  H01L21/6831 ,  H01L21/6833 ,  H02N13/00 ,  Y10T279/23

摘要： An electrostatic chuck (20) for holding a substrate in a process chamber (80), having a voltage supply terminal (65) for charging the chuck. The chuck includes an electrostatic member (25) comprising at least one electrode (30) covered by an electrically insulated holding surface (40) for holding a substrate thereon, and an electrical contact surface (48) for providing charge to the electrode. A unidirectionally conducting coupler (70) electrically couples the contact surface (48) of the electrostatic member to the voltage supply terminal (65) to conduct charge substantially only in a single direction from the terminal to the contact surface. Preferably, an electrical connector (50) having a junction surface (55) is bonded to the electrical contact surface (48), and a terminal surface (60) for electrically contacting the voltage supply terminal, electrically couples the unidirectionally conducting coupler (70) to the voltage supply terminal (65).

公开(公告)号：EP0867933A2

公开(公告)日：1998-09-30

申请号：EP98301298.0

申请日：1998-02-23

申请人： APPLIED MATERIALS, INC.

发明人： Kholodenko, Arnold ,  Veytser, Alexander M. ,  Shamouilian, Shamouil

IPC分类号： H01L21/68

CPC分类号： C23C16/45521 ,  C23C16/4586 ,  H01L21/6831 ,  H01L21/6833 ,  H02N13/00 ,  Y10T279/23

摘要： An electrostatic chuck (20) for holding a substrate in a process chamber (80), having a voltage supply terminal (65) for charging the chuck. The chuck includes an electrostatic member (25) comprising at least one electrode (30) covered by an electrically insulated holding surface (40) for holding a substrate thereon, and an electrical contact surface (48) for providing charge to the electrode. A unidirectionally conducting coupler (70) electrically couples the contact surface (48) of the electrostatic member to the voltage supply terminal (65) to conduct charge substantially only in a single direction from the terminal to the contact surface. Preferably, an electrical connector (50) having a junction surface (55) is bonded to the electrical contact surface (48), and a terminal surface (60) for electrically contacting the voltage supply terminal, electrically couples the unidirectionally conducting coupler (70) to the voltage supply terminal (65).

摘要翻译： 一种用于将基板保持在处理室（80）中的静电卡盘（20），具有用于对卡盘充电的电压供给端子（65）。 卡盘包括静电构件（25），该静电构件包括被电绝缘的保持表面（40）覆盖的至少一个电极（30），用于将基板保持在其上，以及用于向电极提供电荷的电接触表面（48）。 单向导电耦合器（70）将静电部件的接触表面（48）电耦合到电压供应端子（65），以基本上仅在从端子到接触表面的单个方向上进行充电。 优选地，具有接合面（55）的电连接器（50）被接合到电接触表面（48），并且用于电接触电压端子的端子表面（60）电耦合单向导电耦合器（70） 到电源端子（65）。