公开(公告)号：EP2395546A3

公开(公告)日：2013-04-24

申请号：EP11169577.1

申请日：2011-06-10

申请人： ASM International N.V.

发明人： de Ridder, Chris G.M. ,  Boonstra, Klaas P. ,  Garssen, Adriaan ,  Huussen, Frank

IPC分类号： H01L21/673 ,  H01L31/18 ,  C23C16/458 ,  F27B17/00

CPC分类号： H01L21/67303 ,  C23C16/45546 ,  C23C16/4587 ,  F27B17/0025 ,  F27D5/0037 ,  H01L21/67109 ,  H01L21/67313 ,  H01L21/67757 ,  H01L31/1864 ,  H01L31/1876 ,  Y02E10/547 ,  Y02P70/521

摘要： A method for processing solar cells comprising:
- providing a vertical furnace to receive an array of mutually spaced circular semiconductor wafers for integrated circuit processing;
- composing a process chamber loading configuration for solar cell substrates, wherein a size of the solar cell substrates that extends along a first surface to be processed is smaller than a corresponding size of the circular semiconductor wafers, such that multiple arrays of mutually spaced solar cell substrates can be accommodated in the process chamber,
- loading the solar cell substrates into the process chamber;
- subjecting the solar cell substrates to a process in the process chamber.

公开(公告)号：EP2395546A2

公开(公告)日：2011-12-14

申请号：EP11169577.1

申请日：2011-06-10

申请人： ASM International N.V.

发明人： de Ridder, Chris G.M. ,  Boonstra, Klaas P. ,  Garssen, Adriaan ,  Huussen, Frank

IPC分类号： H01L21/673 ,  H01L31/18 ,  C23C16/458 ,  F27B17/00

CPC分类号： H01L21/67303 ,  C23C16/45546 ,  C23C16/4587 ,  F27B17/0025 ,  F27D5/0037 ,  H01L21/67109 ,  H01L21/67313 ,  H01L21/67757 ,  H01L31/1864 ,  H01L31/1876 ,  Y02E10/547 ,  Y02P70/521

摘要： A method for processing solar cells comprising:
- providing a vertical furnace to receive an array of mutually spaced circular semiconductor wafers for integrated circuit processing;
- composing a process chamber loading configuration for solar cell substrates, wherein a size of the solar cell substrates that extends along a first surface to be processed is smaller than a corresponding size of the circular semiconductor wafers, such that multiple arrays of mutually spaced solar cell substrates can be accommodated in the process chamber,
- loading the solar cell substrates into the process chamber;
- subjecting the solar cell substrates to a process in the process chamber.

摘要翻译： 一种用于处理太阳能电池的方法，包括： - 提供垂直炉以接收用于集成电路处理的相互间隔开的圆形半导体晶片阵列; - 构成用于太阳能电池基板的处理室装载配置，其中沿着待处理的第一表面延伸的太阳能电池基板的尺寸小于圆形半导体晶片的相应尺寸，使得相互间隔开的太阳能电池的多个阵列 基板可以容纳在处理室中， - 将太阳能电池基板装载到处理室中; - 对太阳能电池基板进行处理室中的处理。