公开(公告)号：EP4019961A1

公开(公告)日：2022-06-29

申请号：EP20216378.8

申请日：2020-12-22

申请人： ASML Netherlands B.V.

发明人： ARABUL, Mustafa Ümit ,  ZHOU, Zili ,  COENE, Willem Marie Julia Marcel ,  VERSCHUREN, Coen Adrianus ,  VAN NEER, Paul Louis Maria Joseph ,  PIRAS, Daniele ,  BLAAK, Sandra ,  KOEK, Wouter, Dick ,  WILLEKERS, Robert Wilhelm

IPC分类号： G01N29/04 ,  G01N29/22 ,  G01N29/24 ,  G01N29/26 ,  G01N29/28 ,  G01N29/34

摘要： A metrology apparatus for determining one or more parameters of a structure fabricated in or on a semiconductor substrate. The apparatus comprises a transducer array comprising a plurality of transducers positioned in a plane. The plurality of transducers comprises at least one transmitter transducer for emitting acoustic radiation in a frequency range from 1 GHz to 100 GHz towards the structure, and at least one receiver transducer for receiving acoustic radiation reflected and/or diffracted from the structure.

公开(公告)号：EP3779600A1

公开(公告)日：2021-02-17

申请号：EP19191736.8

申请日：2019-08-14

申请人： ASML Netherlands B.V.

发明人： ZHOU, Zili ,  ARABUL, Mustafa Ümit ,  VERSCHUREN, Coen Adrianus

IPC分类号： G03F9/00 ,  G01N29/24 ,  B82Y35/00 ,  G03F7/20 ,  G01N29/34 ,  G01Q60/38

摘要： The disclosure relates to determining information about a target structure formed on a substrate using a lithographic process. In one arrangement, a cantilever probe is provided having a cantilever arm and a probe element. The probe element extends from the cantilever arm towards the target structure. Ultrasonic waves are generated in the cantilever probe. The ultrasonic waves propagate through the probe element into the target structure and reflect back from the target structure into the probe element or into a further probe element extending from the cantilever arm. The reflected ultrasonic waves are detected and used to determine information about the target structure.