公开(公告)号：EP3988996A1

公开(公告)日：2022-04-27

申请号：EP20202720.7

申请日：2020-10-20

申请人： ASML Netherlands B.V.

发明人： TRAVERS, John Colin ,  BELLI, Federico ,  BRAHMS, Malte Christian ,  BROUNS, Andreas Johannes Antonius ,  HUGERS, Ronald Franciscus Herman

IPC分类号： G02F1/35 ,  G02F1/01 ,  G03F7/20

摘要： A broadband radiation source device, comprising a fiber assembly comprising a plurality of optical fibers, each optical fiber being filled with a gas medium; wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving a beam of input radiation so as to generate a broadband output from only a subset of said plurality of optical fibers at any one time.