公开(公告)号：EP3314332B1

公开(公告)日：2019-08-07

申请号：EP16731124.0

申请日：2016-06-21

申请人： ASML Netherlands B.V.

发明人： JEUNINK, Andre Bernardus ,  DE JONG, Robbert ,  LEENDERS, Martinus Hendrikus Antonius ,  PACITTI, Evelyn Wallis ,  POIESZ, Thomas ,  VAN DEN BERKMORTEL, Frank Pieter Albert

IPC分类号： G03F7/20

公开(公告)号：EP3314332A1

公开(公告)日：2018-05-02

申请号：EP16731124.0

申请日：2016-06-21

申请人： ASML Netherlands B.V.

发明人： JEUNINK, Andre Bernardus ,  DE JONG, Robbert ,  LEENDERS, Martinus Hendrikus Antonius ,  PACITTI, Evelyn Wallis ,  POIESZ, Thomas ,  VAN DEN BERKMORTEL, Frank Pieter Albert

IPC分类号： G03F7/20

CPC分类号： G03F7/707 ,  G03F7/70341 ,  G03F7/70783 ,  G03F7/70858 ,  G03F7/70875

摘要： A support apparatus configured to support an object, the support apparatus includes a support body including an object holder to hold an object; an opening in the support body adjacent to an edge of the object holder; a channel in fluid communication with the opening via each of a plurality of passageways in the support body; and a passageway liner mounted in at least one of the plurality of passageways, the passageway liner being thermally insulating to substantially thermally decouple the support body from fluid in the at least one of the plurality of passageways.