公开(公告)号：EP4134747A1

公开(公告)日：2023-02-15

申请号：EP21191043.5

申请日：2021-08-12

申请人： ASML Netherlands B.V.

发明人： KLUGKIST, Joost, André

IPC分类号： G03F7/20

摘要： A conditioning apparatus, said conditioning apparatus including at least one channel, wherein a conditioning fluid and a solid thermal conductor are disposed within the at least one channel. Also described is a system or sub-system including such a conditioning apparatus, and a lithographic apparatus including such a conditioning apparatus, system or sub-system. A method of conditioning a system or sub-system, said method including providing a conditioning fluid and a solid thermal conductor within a channel that is in thermal communication with the system or sub-system, and transferring thermal energy between the system or sub-system and the solid thermal conductor via the conditioning fluid is also provided. The use of such apparatuses or methods is also provided.

公开(公告)号：EP4086702A1

公开(公告)日：2022-11-09

申请号：EP21171796.2

申请日：2021-05-03

申请人： ASML Netherlands B.V.

发明人： BOS, Koen, Martin, Willem, Jan ,  KLUGKIST, Joost, André ,  ANAND, Anirudh

IPC分类号： G03F7/20 ,  G01J5/00 ,  G02B7/18

摘要： An optical apparatus is disclosed, the apparatus comprising an optical element having a reflective surface for reflecting incident radiation in a beam path, and at least one sensor configured to sense radiation corresponding to a temperature of a respective portion of a backside surface of the optical element. Also disclosed is a method of controlling a temperature of a reflective surface of an optical element in a lithographic apparatus.

公开(公告)号：EP4334781A1

公开(公告)日：2024-03-13

申请号：EP22715631.2

申请日：2022-03-29

申请人： ASML Netherlands B.V.

发明人： BOS, Koen, Martin, Willem, Jan ,  KLUGKIST, Joost, André ,  ANAND, Anirudh

IPC分类号： G03F7/20 ,  G01J5/00 ,  G02B7/18

公开(公告)号：EP4102297A1

公开(公告)日：2022-12-14

申请号：EP21178831.0

申请日：2021-06-10

申请人： ASML Netherlands B.V.

发明人： VAN DE MEERENDONK, Remco ,  NAKIBOGLU, Günes ,  WATERSON, Nicholas, Peter ,  KLUGKIST, Joost, André ,  VAN DER NET, Antonius, Johannus ,  JACOBS, Johannes, Henricus, Wilhelmus ,  VAN LIPZIG, Jeroen, Peterus, Johannes ,  VAN SANTVOORT, Johannes, Franciscus, Martinus

IPC分类号： G03F7/20 ,  H01L21/67

摘要： The invention provides a temperature conditioning system using conditioning liquid to condition a temperature of an object, comprising a conditioning conduit, a return conduit, a supply chamber, and a discharge chamber wherein the temperature conditioning system is arranged to provide a static pressure difference between the supply chamber outlet and the discharge chamber inlet to create a flow through the conditioning conduit. A lithography apparatus and a method of temperature conditioning an object is also described.

公开(公告)号：EP3559748A1

公开(公告)日：2019-10-30

申请号：EP17803964.0

申请日：2017-11-27

申请人： ASML Netherlands B.V.

发明人： NIKIPELOV, Andrey ,  BANINE, Vadim, Yevgenyevich ,  KLUGKIST, Joost, André ,  NASALEVICH, Maxim, Aleksandrovich ,  STAS, Roland, Johannes, Wilhelmus ,  WRICKE, Sandro

IPC分类号： G03F7/20