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公开(公告)号：EP4442972A1
公开(公告)日：2024-10-09
申请号：EP23166311.3
申请日：2023-04-03
发明人： REZAEIHA, Abdolrahim , JACOBS, Johannes, Henricus, Wilhelmus , HUANG, Zhuangxiong , FEIJTS, Maurice, Wilhelmus,Leonardus, Hendricus , VERSPAY, Jacobus, Johannus, Leonardus, Hendricus , VAN DE MEERENDONK, Remco , VAN DE WETERING, Nick, Hendricus, Martinus , VERMEULEN, Johannes, Petrus, Martinus, Bernardus
CPC分类号： F01N1/00 , G03F7/70858 , G03F7/70875 , G03F7/70891 , G03F7/709 , F16L55/02763
摘要： A silencer is configured to silence an acoustic wave in a thermal conditioning fluid in a thermal conditioning fluid duct and comprises an open inlet configured to be connected to the thermal conditioning fluid duct to be in fluid communication with the thermal conditioning fluid in the thermal conditioning fluid duct, a silencer housing comprising an inner cavity connected to the open inlet, a compliant member which divides the inner cavity into a thermal conditioning fluid cavity and a substantially closed gas cavity, wherein the thermal conditioning fluid cavity is connected to the inlet, an inlet duct configured to receive the thermal conditioning fluid, and an outlet duct wherein the silencer further comprises a plurality of parallel ducts each forming a fluid channel, the plurality of parallel ducts arranged in at least one of the inlet duct and the outlet duct.
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公开(公告)号：EP4437803A1
公开(公告)日：2024-10-02
申请号：EP22817781.2
申请日：2022-11-18
发明人： VAN DE VEN, Bastiaan, Lambertus, Wilhelmus, Marinus , VAN DRENT, William, Peter , REUVERS, Nicolaas, Johannes, Wilhelmus , BUIS, Edwin, Johan , DIRECKS, Daniel, Jozef, Maria , FEIJTS, Maurice, Wilhelmus, Leonardus, Hendricus , JACOBS, Johannes, Henricus, Wilhelmus , KNAPEN, Bart, Leonardus , WESTERLAKEN, Jan, Steven, Christiaan
IPC分类号： H05G2/00
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3.发明公开
公开(公告)号：EP4102297A1
公开(公告)日：2022-12-14
申请号：EP21178831.0
申请日：2021-06-10
发明人： VAN DE MEERENDONK, Remco , NAKIBOGLU, Günes , WATERSON, Nicholas, Peter , KLUGKIST, Joost, André , VAN DER NET, Antonius, Johannus , JACOBS, Johannes, Henricus, Wilhelmus , VAN LIPZIG, Jeroen, Peterus, Johannes , VAN SANTVOORT, Johannes, Franciscus, Martinus
摘要： The invention provides a temperature conditioning system using conditioning liquid to condition a temperature of an object, comprising a conditioning conduit, a return conduit, a supply chamber, and a discharge chamber wherein the temperature conditioning system is arranged to provide a static pressure difference between the supply chamber outlet and the discharge chamber inlet to create a flow through the conditioning conduit. A lithography apparatus and a method of temperature conditioning an object is also described.
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4.发明公开SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD 审中-公开TRÄGERVORRICHTUNG，LITHOGRAFIEVORRICHTUNG UND HERSTELLUNGSVERFAHRENFÜRDIE VORRICHTUNG
公开(公告)号：EP2856262A1
公开(公告)日：2015-04-08
申请号：EP13723161.9
申请日：2013-05-17
发明人： DONDERS, Sjoerd, Nicolaas, Lambertus , FIEN, Menno , HOOGENDAM, Christiaan, Alexander , HOUBEN, Martijn , JACOBS, Johannes, Henricus, Wilhelmus , KOEVOETS, Adrianus, Hendrik , LAFARRE, Raymond, Wilhelmus, Louis , OVERKAMP, Jim, Vincent , TEN KATE, Nicolaas , WESTERLAKEN, Jan, Steven, Christiaan , DE GROOT, Antonius, Franciscus, Johannes , VAN BEIJNUM, Maarten , DE JONG, Rob
IPC分类号： G03F7/20
CPC分类号： G03F7/70716 , G03F7/70341 , G03F7/707 , G03F7/70733
摘要： A support apparatus for a lithographic apparatus has an object holder and an extraction body radially outward of the object holder. The object holder is configured to support an object. The extraction body includes an extraction opening configured to extract fluid from a top surface of the support apparatus. The extraction body is spaced from the object holder such that the extraction body is substantially decoupled from the object holder. The extraction body comprises a projection configured such that it surrounds the object holder and such that, in use, a layer of liquid is retained on the projection and in contact with an object supported on the object holder.
摘要翻译： 用于光刻设备的支撑设备具有物体保持器和物体保持器径向外侧的抽出体。 对象持有者被配置为支持对象。 提取体包括提取开口，其构造成从支撑装置的顶表面提取流体。 提取体与物体保持器间隔开，使得提取体基本上与物体保持器分离。 提取体包括突出部，其被构造为使得其围绕物体保持器并且使得在使用中，一层液体保持在突出部上并与支撑在物体保持器上的物体接触。
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公开(公告)号：EP4455783A1
公开(公告)日：2024-10-30
申请号：EP23169511.5
申请日：2023-04-24
发明人： DE HOOGH, Joost , NAKIBOGLU, Günes , JACOBS, Johannes, Henricus, Wilhelmus , MCGRAW, Aaron , DIRECKS, Daniel, Jozef, Maria
IPC分类号： G03F7/00
摘要： A vacuum system configured to provide a vacuum to a heat transfer fluid of a fluid-conditioned lithographic system element, the vacuum system comprising: a venturi, configured to generate a partial vacuum; and a buffer vessel, configured to contain a partial vacuum. The buffer vessel is in fluid communication with a constriction of the venturi, and the buffer vessel is further configured to be in fluid communication with a heat transfer fluid of a fluid-conditioned lithographic system element.
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公开(公告)号：EP4443238A1
公开(公告)日：2024-10-09
申请号：EP23166310.5
申请日：2023-04-03
发明人： REZAEIHA, Abdolrahim , HUANG, Zhuangxiong , JACOBS, Johannes, Henricus, Wilhelmus , VAN DE MEERENDONK, Remco , VERSPAY, Jacobus, Johannus, Leonardus, Hendricus , FEIJTS, Maurice, Wilhelmus, Leonardus, Hendricus , VAN DE WETERING, Nick, Hendricus, Martinus , VERMEULEN, Johannes, Petrus, Martinus, Bernardus , WIJCKMANS, Maurice, Willem, Jozef, Etiënne , KLAVER, Renatus, Gerardus
CPC分类号： G03F7/70858 , G03F7/70875 , G03F7/70891 , G03F7/709 , F16L55/02763
摘要： A silencer is configured to silence an acoustic wave in a thermal conditioning fluid in a thermal conditioning fluid duct. The silencer comprises an open inlet configured to be connected to the thermal conditioning fluid duct to be in fluid communication with the thermal conditioning fluid, a silencer housing comprising an inner cavity connected to the open inlet, a compliant member arranged in the inner cavity, wherein the compliant member divides the inner cavity into a thermal conditioning fluid cavity and a gas cavity, wherein the thermal conditioning fluid cavity is connected to the open inlet and wherein the gas cavity forms a substantially closed space, wherein the gas cavity comprises a plurality of gas channels extending in a direction substantially perpendicular to a surface of the compliant member facing the gas cavity.
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公开(公告)号：EP4443237A1
公开(公告)日：2024-10-09
申请号：EP23166309.7
申请日：2023-04-03
发明人： REZAEIHA, Abdolrahim , HUANG, Zhuangxiong , JACOBS, Johannes, Henricus, Wilhelmus , FEIJTS, Maurice, Wilhelmus, Leonardus, Hendricus
IPC分类号： G03F7/00 , F01N1/00 , F01N1/02 , F16L55/033
CPC分类号： G03F7/70858 , G03F7/709 , G03F7/70875 , G03F7/70891 , F16L55/02772
摘要： A silencer is configured to silence an acoustic wave in a thermal conditioning fluid at a target frequency. The silencer comprises an open inlet to be connected to a thermal conditioning fluid duct to be in fluid communication with the thermal conditioning fluid in the duct, a closed end to reflect the acoustic wave in the thermal conditioning fluid, and a silencer duct forming a thermal conditioning fluid passage therebetween. The silencer is configured to silence the acoustic wave.
The silencer duct comprises a three dimensional shape configured to provide at least one revolution in the thermal conditioning fluid passage The silencer duct comprises a viscoelastic material.-
8.发明公开
公开(公告)号：EP4094125A1
公开(公告)日：2022-11-30
申请号：EP20838574.0
申请日：2020-12-24
发明人： ALBRIGHT, Ronald, Peter , BAL, Kursat , BANINE, Vadim, Yevgenyevich , BRULS, Richard, Joseph , DE VRIES, Sjoerd, Frans , FRIJNS, Olav, Waldemar, Vladimir , HUANG, Yang-Shan , HUANG, Zhuangxiong , JACOBS, Johannes, Henricus, Wilhelmus , MOORS, Johannes, Hubertus, Josephina , NENCHEV, Georgi, Nenchev , NIKIPELOV, Andrey , RAASVELD, Thomas, Maarten , RANJAN, Manish , TE SLIGTE, Edwin , UMSTADTER, Karl, Robert , UZGÖREN, Eray , VAN DE KERKHOF, Marcus, Adrianus , YAGHOOBI, Parham
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