公开(公告)号：EP1560044A4

公开(公告)日：2008-03-19

申请号：EP03741373

申请日：2003-07-14

Applicant: AUTOCLONING TECHNOLOGY LTD

Inventor： KAWAKAMI SHOJIRO ,  SATO TAKASHI ,  KAWASHIMA TAKAYUKI ,  ISHIKAWA WATARU

IPC: G02B5/30 ,  G02B27/28 ,  G01J4/04

CPC classification number: G02B5/3041 ,  G02B5/3033 ,  G02B27/288

Abstract: A thin polarizer array and a wavelength plate array that are composed of micro regions having different optical axis directions and wavelength characteristics and have a high extinction ratio and a low insertion loss, and a polarization analyzer using them are disclosed. An array of micro periodic grooves are formed on a substrate, with the directions changed from one region to another. An alternating multilayer film formed by alternating a layer of high refractive index material such as Si or Ta2O5 and a layer of low refractive index material such as SiO2 is formed by bias sputtering. By selecting a condition that each layer maintains its periodic projecting/recessed shape, an array of photonic crystal polarizer is formed. By mounting this array of photonic crystal polarizer in a photodetector array, a polarization analyzer that is small, has no movable part, is composed of a small number of components, and enables high-precision measurement is constituted.

Abstract translation: 公开了由具有不同的光轴方向和波长特性并具有高消光比和低插入损耗的微区域构成的薄偏振器阵列和波长板阵列以及使用它们的偏振分析器。 在衬底上形成微型周期性沟槽阵列，其方向从一个区域变为另一个区域。 通过偏压溅射形成交替的多层膜，该交替的多层膜通过交替层叠诸如Si或Ta 2 O 5的高折射率材料和诸如SiO 2的低折射率材料层而形成。 通过选择每层保持其周期性投影/凹陷形状的条件，形成光子晶体偏振器阵列。 通过将这种光子晶体偏振器阵列安装在光电检测器阵列中，偏振分析器很小，没有可移动部分，由少量元件组成，并且能够实现高精度测量。