专利检索 ap:("AXCELIS TECHNOLOGIES, INC.") AND inv:"Divergilio, Wiliam" 第 1 页

1.

发明授权
FLUORINE BASED CLEANING OF AN ION SOURCE 有权
标题翻译：对离子源的FLUOR-基清洗

公开(公告)号：EP1964148B1

公开(公告)日：2010-01-20

申请号：EP06848020.1

申请日：2006-12-20

申请人： AXCELIS TECHNOLOGIES, INC.

发明人： Reynolds, William , Hodgdon, Christopher , Divergilio, Wiliam , Tieger, Daniel , Joyce, Sean

IPC分类号： H01J37/08 , H01J37/317

CPC分类号： H01J37/3171 , B08B7/0035 , H01J27/022 , H01J37/08 , H01J2237/022 , H01J2237/31705

摘要： A deposit cleaning system for removing deposits from interior surfaces of ion sources includes a fluorine source, a throttle mechanism, and a controller. The fluorine source supplies fluorine to the ion source as a cleaning material. The throttle mechanism mitigates loss of fluorine through a source aperture of the ion source by at least partially covering the source aperture. The controller controls the supply and flow rate from the fluorine source to the ion source and also controls the positioning of the throttle mechanism.