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公开(公告)号：EP3486283A1
公开(公告)日：2019-05-22
申请号：EP17839496.1
申请日：2017-08-08
发明人： MATSUMOTO, Kazuya , JIKEI, Mitsutoshi , YAMAKAWA, Sumito , SAKURADA, Tadatake , KAMIYA, Fumihiro , NOGUCHI, Tsuyoshi
摘要： The invention provides a composition capable of providing a molded article that has excellent heat resistance and a small weight change against oxygen plasma exposure and fluorine plasma exposure during a semiconductor manufacturing step. The composition contains a fluorine-containing polymer and a hyperbranched polymer of a cage silsesquioxane with a specific structure.
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公开(公告)号：EP3904450A1
公开(公告)日：2021-11-03
申请号：EP19904237.5
申请日：2019-12-27
发明人： MATSUMOTO, Kazuya , JIKEI, Mitsutoshi , YAMADA, Shushi , NOGUCHI, Tsuyoshi , KAMIYA, Fumihiro , YANAGIDA, Yoshiho
IPC分类号： C08L27/12 , C08L77/02 , C08L83/04 , C08L101/06
摘要： Provided is a composition comprising a fluorine-containing polymer and a silicon-containing compound, wherein the phosphorus content in the composition is 20 ppm or less.
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公开(公告)号：EP3260490A1
公开(公告)日：2017-12-27
申请号：EP16752494.1
申请日：2016-02-17
IPC分类号： C08L27/12 , C08G69/00 , C08K5/5419 , C08L77/00 , C08L83/10
CPC分类号： C08K5/5419 , C08G69/00 , C08L27/12 , C08L77/00 , C08L83/10
摘要： The invention provides a composition capable of providing a molded article that has excellent heat resistance and a small weight change against both fluorine plasma exposure and oxygen plasma exposure during a semiconductor manufacturing step. The composition contains a fluorine-containing polymer and a cage silsesquioxane having a specific structure.
摘要翻译： 本发明提供了一种组合物，其能够提供在半导体制造步骤期间具有优异的耐热性和相对于氟等离子体暴露和氧等离子体暴露两者的小重量变化的模制品。 该组合物含有具有特定结构的含氟聚合物和笼式倍半硅氧烷。
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公开(公告)号：EP3835762A1
公开(公告)日：2021-06-16
申请号：EP19864020.3
申请日：2019-09-20
发明人： KAMIHARA, Nobuyuki , ISHIKAWA, Naomoto , TAKAGI, Kiyoka , KAMO, Sota , YAMAGUCHI, Makoto , JIKEI, Mitsutoshi , MATSUMOTO, Kazuya , MURAOKA, Mikio
IPC分类号： G01N21/65
摘要： Provided are a crystallinity measurement device, a resin-containing material manufacturing device, a crystallinity measurement method, and a resin-containing material manufacturing method capable of calculating crystallinity easily and accurately even when materials other than crystalline thermoplastic resin are included in addition to crystalline thermoplastic resin. A crystallinity measurement device 10 includes a Raman spectroscopy unit 11 and an analysis unit 13. The Raman spectroscopy unit 11 acquires a Raman spectrum of resin-containing material 1 including crystalline thermoplastic resin. The analysis unit 13 calculates the crystallinity of the crystalline thermoplastic resin based on the intensity of a low-wavenumber spectrum that is a spectrum in a region of less than 600 cm -1 , in the Raman spectrum.
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