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    MEMS SWITCHING DEVICE PROTECTION
    1.
    发明公开
    MEMS SWITCHING DEVICE PROTECTION 有权
    MEMS开关设置保护

    公开(公告)号：EP1908088A1

    公开(公告)日：2008-04-09

    申请号：EP06774526.5

    申请日：2006-07-06

    申请人： Analog Devices, Inc.

    发明人： HAIGH, Geoffrey ,  CHAN, Cammen

    IPC分类号： H01H9/54 ,  H01H59/00 ,  H01P1/12

    CPC分类号： H01H59/0009 ,  H01H9/542 ,  H01H9/548

    摘要： A micro-machined switching system for equalizing an electrical property, such as charge due to parasitic capacitance formed at an input and an output of a micro-machined switching device. The micro-machined switching device may be a MEMS relay or a MEMS switch. In addition to the micro-machined switching device, the switching system also includes a balancing module for equalizing the electrical property between the input and the output of the micro-machined switching device. In certain embodiments, the balancing module includes a switch operable in a first state causing charge due to the parasitic capacitance on the input and the output of the micro-machined switching device to substantially balance. The switch is also operable in a second state wherein parasitic capacitance can separately accumulate at the input and the output of the micro-machined switching device.