SEPARATION AND RECOVERY DEVICE, SEPARATION AND RECOVERY METHOD, DEVELOPMENT SYSTEM, AND DEVELOPER RECYCLING METHOD

    公开(公告)号:EP4293423A1

    公开(公告)日:2023-12-20

    申请号:EP22752876.7

    申请日:2022-02-15

    IPC分类号: G03F7/30

    摘要: The purpose of the invention is to provide a separation and recovery device capable of separating and recovering a liquid having a high solvent concentration from a development waste liquid containing a development residue, with a high processing capacity without mixing the development residue in the recovered liquid. The device is a separation and recovery device 7 for separating and recovering a solvent component from a development waste liquid containing a development residue and has a waste-liquid heating mechanism for heating the development waste liquid, an atomization chamber 71 having an ultrasonic element 71B for atomizing the development waste liquid heated by the waste-liquid heating mechanism into mists, and a mist recovery mechanism 72 for recovering the mists formed in the atomization chamber 71.