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1.发明公开TREATING MODULE OF AN APPARATUS FOR HORIZONTAL WET-CHEMICAL TREATMENT OF LARGE-SCALE SUBSTRATES 有权处理模块的水平和湿法化学处理大面积基板用设备
公开(公告)号：EP3035375A1
公开(公告)日：2016-06-22
申请号：EP14199222.2
申请日：2014-12-19
发明人： Hahn, Roland , Thomas, Christian , Nößner, Martin , Ott, Thomas , Lorenz, Olaf
IPC分类号： H01L21/67 , H01L21/677
CPC分类号： H01L21/6776 , C03C17/002 , C23C18/1608 , C23C18/1632 , C23C18/165 , C23C18/1889 , C23C18/38 , H01L21/67051 , H01L21/6708
摘要： The present invention is related to a treating module of an apparatus for horizontal wet-chemical treatment of large-scale substrates, in particular glass substrates, comprising a housing with a housing cover; a transport device comprising a plurality of transport elements for horizontal processing of large-scale substrates, wherein the treating module further comprises at least a first liquid nozzle and at least a gas nozzle arranged above the transport level of the large-scale substrates at the entry and at the exit of the treating module for accumulating treatment liquid inside of the treating module, wherein the gas nozzle is arranged more exterior than the respective first liquid nozzle; at least a liquid weir arranged below each first liquid nozzle below the transport level of the large-scale substrates; and at least an adjusting device for adjusting the transport device and the liquid weirs of the treating module.
The present invention is further directed to a method for treating of large-scale substrates in a horizontal apparatus comprising among others such a treating module.摘要翻译： 本发明涉及一种用于水平湿化学处理的大型基板的，特别是玻璃基板，其包括与壳体盖的外壳的装置的处理模块; 一个传送装置，包括输送元件，用于大型基板的水平方向处理worin处理模块进一步的数个包含至少一个第一液体喷嘴和至少一个气体喷嘴在条目中的大型衬底的输送水平之上布置 并且在用于累积处理模块的内部处理液，worin气体喷嘴配置在比第一respectivement液喷嘴多个外的处理模块的出口; 下方设置大型衬底的输送级的每个第一液体喷嘴下方的至少一个液体堰; 和至少在用于调节所述传送装置和所述处理模块的液体堰调节装置。 本发明涉及一种方法，还用于在水平装置等寻求治疗模块，包括大型基板的处理。
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2.发明公开
公开(公告)号：EP3912940A1
公开(公告)日：2021-11-24
申请号：EP20175202.9
申请日：2020-05-18
发明人： Seuß, Steffen , Thomas, Christian , Unterluggauer, Josef , Lorenz, Olaf , Butter, Stefan , Zaschka, Patrick
IPC分类号： B65G49/04
摘要： A device for transporting a plurality of parts to be treated through an apparatus for wet-chemical treatment comprises a transporter (16), comprising at least one runner (39a,b,40a,b) for supporting the transporter (16) for movement along at least one track (5a,b) in a first direction ( x ). At least part of the transporter (16) is located next to the runners (39a,b,40a,b), seen in a second direction ( y ) transverse to the first direction ( x ). This part extends from a level below the runners (39a,b,40a,b) to a level above the runners (39a,b,40a,b) in a third direction (z) transverse to the first and second directions ( x,y ). The device further comprises a container (14) having an interior for accommodating the plurality of parts and a frame (15), at least indirectly connecting the container (14) to the transporter (16) to allow the transporter (16) to carry the container (14) at a level below the runners (39a,b,40a,b). The frame (15) comprises a respective frame part (23a,b) at at least one of opposite axial ends of the container (14) with respect to an axis (18) of the container (14). The container (14) is liquid-pervious between the axial ends to allow liquid to flood the interior when the container (14) is immersed in the liquid. The axis (18) of the container (14) extends in a direction ( x ) transverse to the second and third directions ( y,z ).
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公开(公告)号：EP3761348A1
公开(公告)日：2021-01-06
申请号：EP19184721.9
申请日：2019-07-05
IPC分类号： H01L21/67 , H01L21/677
摘要： A system for conveying an object comprising at least a substrate (3) between processing stations (1a,b,2) of a processing apparatus comprises a transporter (4), arranged for movement from processing station to processing station (1a,b,2). The transporter (4) comprises a support part (5) and a holding component (19) for releasably holding the object. The system comprises at least one object movement device (34a-d,43a,b) for moving the object along a path predominantly directed in parallel to a reference axis (z) in a reference co-ordinate system. Each object movement device (34a-d,43a,b) is associated with a respective processing station (1a,b,2) and capable of moving the object along the path towards the transporter (4) to a transfer position and towards the associated processing station (1a,b,2) from the transfer position. The holding component (19) is configured to release and engage the object in the transfer position when the transporter (4) is positioned at the processing station (1a,b,2). The transporter (4) includes at least one
actuator (25a,b,26a,b,27a,b) for moving the holding component (19) relative to the support part (5) along a holding component path predominantly directed in parallel to the reference axis (z).-
4.发明公开
公开(公告)号：EP4332277A1
公开(公告)日：2024-03-06
申请号：EP22192691.8
申请日：2022-08-29
发明人： Schirmer, Christian , Schafsteller, Britta , Weinhold, Ray , Kiehl, Markus , Jang, Don , Lorenz, Olaf , Gaul, Florian
IPC分类号： C25D17/06 , C23G3/02 , H01L21/687 , B08B3/04 , B05C5/00
摘要： A device for holding a planar substrate (1) in an apparatus for non-immersive wet-chemical treatment of the substrate (1) comprises a support structure (34). The support structure (34) comprises at least one part (36a,b) for engaging a support such as to suspend the support structure (34) in the apparatus. The device comprises at least one clamping device, supported by the support structure (34), for holding the substrate (1) in a plane; and at least a first upper flow guidance part (37), arranged on one side of the plane and having an inward-facing surface (44) facing inwards and an outward-facing surface facing outwards with respect to the plane. The outward-facing surface comprises an upper outward-facing surface section (46), wettable by a stream of liquid directed onto the upper outward-facing surface section (46), and a lower outward-facing surface section (47), extending from a transition between at least a central part of the upper outward-facing surface section (46) and the lower outward-facing surface section (47) to a lower edge (49). A strip (45) of the inward-facing surface extends longitudinally along the lower edge (49) and transversely up to the lower edge (49). At least a central longitudinal section of the strip (45) is movable into engagement with a major surface of the substrate (1) over an entire length of that section.
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公开(公告)号：EP3936407A1
公开(公告)日：2022-01-12
申请号：EP20185240.7
申请日：2020-07-10
IPC分类号： B61J1/08
摘要： A device for interconnecting a first line (1a) and a second line (1b) of a system for conveying parts to be treated through a processing apparatus by means of at least one product carrier (7) comprising a transporter (19) comprising at least one runner (36,37) supported on at least one track (10a,b) comprises a main support structure (47). The device further comprises a movable support structure (48), at least indirectly supported by and movable relative to the main support structure (47) between at least a first position and a second position. The movable support structure (48) comprises at least one track segment (50a,b) for supporting at least one runner (36,37) of a transporter (19) in a support direction (z). Each track segment (50a,b) is alignable with a respective track (10a,b) of the first line (1a) in the first position and with a respective track (10a,b) of the second line (lb) in the second position such that an end of the track segment (50a,b) adjoins an end of the aligned track (10a,b) to allow a runner (36,37) to cross over between the aligned track (10a,b) and track segment (50a,b). The movement between the first position and the second position comprises a rotation about an axis (54) parallel to the support direction (z) and a translation with at least a component in axial direction.
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公开(公告)号：EP3725922A1
公开(公告)日：2020-10-21
申请号：EP19170254.7
申请日：2019-04-18
发明人： Weinhold, Ray , Lorenz, Olaf , Hahn, Roland , Sporer, Matthias
摘要： This invention concerns a substrate holder reception apparatus (1) for holding a substrate holder (3) that is connected to a substrate (2) for treatment in an electrolyte tank (14), the substrate holder reception apparatus (1) comprising a first positioning device (11), that comprises a first connection device (71) for connecting the substrate holder (3) and a first guiding device (41) for guiding the substrate holder (3) and a drive unit (43) for moving the substrate holder (3) relative to the electrolyte tank (14), and a second positioning unit (12), that comprises a second connection device (72) for connecting the substrate holder (3) and a second guiding device (42) for guiding the substrate holder (3), wherein, in a state of connection with the first connection device (71) and the second connection device (72) with the substrate holder (3), the first guide device (41) and the second guiding device (42) are movable together with the substrate holder (3) by the drive unit (43), wherein the first guide device (41) and the second guide device (42) are movable independently from each other in a state of disconnection of the first connection device (71) and the second connection device (72) from the substrate holder (3) and the second guiding device (42) is connected to a spring mechanism (5) which, in the disconnected state, is configured to move the second guiding device (42) to the loading position. The invention further concerns an electrochemical treatment apparatus (1000). (Fig. 1)
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