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公开(公告)号：EP1233510B1
公开(公告)日：2008-10-29
申请号：EP02250518.4
申请日：2002-01-25
发明人： Ellä, Juha , Tikka, Pasi , Kaitila, Jyrki
IPC分类号： H03H3/013
CPC分类号： H03H3/04 , H03H2003/0428 , H03H2003/0435 , H03H2003/0478 , Y10T29/42
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公开(公告)号：EP1998442A3
公开(公告)日：2009-06-10
申请号：EP08008460.1
申请日：2008-05-05
CPC分类号： H03H9/0095 , H03H3/04 , H03H9/564 , H03H9/584 , H03H9/589 , H03H9/605 , H03H2003/0471 , Y10T29/42
摘要： A method for manufacturing a filter device is provided. The filter device comprises a coupled resonator at a first site, a shunt resonator at a second site and a series resonator at a third site, the coupled resonator comprising a first and a second resonator. The method comprising a step of providing a substrate with a piezoelectric layer sandwiched between a first electrode and a first part of a second electrode at the first site and the second site, the piezoelectric layer sandwiched between the first electrode and a second part of the second electrode at the third site. The method further comprising the step of forming a coupling layer on the second electrode, the step of forming a further piezoelectric layer sandwiched between a further first electrode and a further second electrode at the third site and the step of removing the coupling layer at the second and third sites.
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公开(公告)号：EP1227581B1
公开(公告)日：2008-12-24
申请号：EP02250263.7
申请日：2002-01-15
发明人： Ella, Juha , Kaitila, Jyrki
IPC分类号： H03H3/02
CPC分类号： H03H9/105 , H01L2224/73265 , H03H3/02 , H03H9/175 , Y10T29/42
摘要： A method of fabricating a bulk acoustic wave (BAW) resonator and a BAW resonator so fabricated, the method including the steps of: providing a substrate; providing a first isolation structure; and providing a resonator section including a piezolayer; wherein the first isolation structure includes an acoustic mirror made from only electrically conductive layers of alternating high and low acoustic impedance. In some applications, the first isolation structure is situated between the resonator section and the substrate, while in other applications, the first isolation structure is situated above the resonator section (on the side of the resonator section facing away from the substrate), so that the resonator section lies between the first isolation structure and the substrate, and the resonator then further comprises a second isolation structure situated between the resonator section and the substrate.
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公开(公告)号：EP1998444B1
公开(公告)日：2009-12-16
申请号：EP08008459.3
申请日：2008-05-05
CPC分类号： H03H9/605 , H03H9/0095 , H03H9/584 , H03H9/589 , H03H9/60
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5.发明授权Solidly mounted multiresonator bulk acoustic wave filter with a patterned acoustic mirror 有权固定式多谐振器体声波滤波器，带图案声反射镜
公开(公告)号：EP1227582B8
公开(公告)日：2008-08-13
申请号：EP01310923.6
申请日：2001-12-28
CPC分类号： H03H9/02125 , H03H3/04 , H03H9/564 , Y10T29/42
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公开(公告)号：EP1225695B8
公开(公告)日：2008-08-13
申请号：EP01310921.0
申请日：2001-12-28
发明人： Tikka, Pasi , Ella, Juha , Kaitila, Jyrki
CPC分类号： H03H9/706 , H03H9/0571 , Y10T29/42
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