公开(公告)号：EP1314182B1

公开(公告)日：2008-12-10

申请号：EP01960909.8

申请日：2001-08-21

申请人： Axcelis Technologies, Inc.

发明人： HARRINGTON, Eric, Ryan ,  BENVENISTE, Victor, Maurice ,  GRAF, Michael, Anthony ,  RATHMELL, Robert, Day

IPC分类号： H01J37/317 ,  H01J37/02

CPC分类号： H01J3/40 ,  H01J37/026 ,  H01J37/3002 ,  H01J37/3171 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/31705

摘要： A system for inhibiting the transport of contaminant particles with an ion beam includes an electric field generator (12, 14) for generating an electric field (28) relative to a path of travel (20) for the ion beam (16). A particle (66) located in the ion beam (16) and in a region of the electric field (28) is charged to a polarity according to the ion beam (16), so that the electric field (28) may urge the charged particle (66) out of the ion beam (16).

公开(公告)号：EP1314182A2

公开(公告)日：2003-05-28

申请号：EP01960909.8

申请日：2001-08-21

申请人： Axcelis Technologies, Inc.

发明人： HARRINGTON, Eric, Ryan ,  BENVENISTE, Victor, Maurice ,  GRAF, Michael, Anthony ,  RATHMELL, Robert, Day

IPC分类号： H01J37/317 ,  H01J37/02

CPC分类号： H01J3/40 ,  H01J37/026 ,  H01J37/3002 ,  H01J37/3171 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/31705

摘要： A system for inhibiting the transport of contaminant particles with an ion beam includes an electric field generator (12, 14) for generating an electric field (28) relative to a path of travel (20) for the ion beam (16). A particle (66) located in the ion beam (16) and in a region of the electric field (28) is charged to a polarity according to the ion beam (16), so that the electric field (28) may urge the charged particle (66) out of the ion beam (16).

公开(公告)号：EP1314180A2

公开(公告)日：2003-05-28

申请号：EP01958225.3

申请日：2001-08-17

申请人： Axcelis Technologies, Inc.

发明人： BENVENISTE, Victor, Maurice ,  GRAF, Michael, Anthony ,  HARRINGTON, Eric, Ryan ,  RATHMELL, Robert, Day

IPC分类号： H01J37/317 ,  H01J37/02

CPC分类号： H01J37/026 ,  H01J37/3002 ,  H01J37/3171 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/31705

摘要： A system for inhibiting the transport of contaminant particles with an ion beam (16) includes a particle charging system (12) for charging particles within a region through which the ion beam travels. An electric field (50) is generated downstream relative to the charged region so as to urge charged particles away from a direction of travel (18) for the ion beam (16).

公开(公告)号：EP1314181B1

公开(公告)日：2008-12-10

申请号：EP01960907.2

申请日：2001-08-21

申请人： Axcelis Technologies, Inc.

发明人： HARRINGTON, Eric, Ryan ,  BENVENISTE, Victor, Maurice ,  GRAF, Michael, Anthony ,  RATHMELL, Robert, Day

IPC分类号： H01J37/317 ,  H01J3/40

CPC分类号： H01J37/3171 ,  H01J3/40 ,  H01J37/026 ,  H01J37/3002 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/31705

摘要： A system (10) for inhibiting the transport of contaminant particles (60) with an ion beam (44) includes a pair of electrodes (14, 16) that provide opposite electric fields (26, 28, 30, 32) through which the ion beam (44) travels. A particle (60) entrained in the ion beam (44) is charged to a polarity matching the polarity of ion beam (44) when traveling through a first of the electric fields (26, 28). The downstream electrode (16) provides another electric field (30, 32) for repelling the positively charged particle (60) away from the direction of beam travel.

摘要翻译： 用于抑制用离子束输送污染物颗粒的系统包括一对电极，其提供相反的电场，离子束通过该电场传播。 夹带在离子束中的颗粒在穿过第一电场时被充电到与离子束的极性相匹配的极性。 下游电极提供另一个电场，用于排斥带正电的粒子远离光束移动的方向。

公开(公告)号：EP1314181A2

公开(公告)日：2003-05-28

申请号：EP01960907.2

申请日：2001-08-21

申请人： Axcelis Technologies, Inc.

发明人： HARRINGTON, Eric, Ryan ,  BENVENISTE, Victor, Maurice ,  GRAF, Michael, Anthony ,  RATHMELL, Robert, Day

IPC分类号： H01J37/317 ,  H01J3/40

CPC分类号： H01J37/3171 ,  H01J3/40 ,  H01J37/026 ,  H01J37/3002 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/31705

摘要： A system (10) for inhibiting the transport of contaminant particles (60) with an ion beam (44) includes a pair of electrodes (14, 16) that provide opposite electric fields (26, 28, 30, 32) through which the ion beam (44) travels. A particle (60) entrained in the ion beam (44) is charged to a polarity matching the polarity of ion beam (44) when traveling through a first of the electric fields (26, 28). The downstream electrode (16) provides another electric field (30, 32) for repelling the positively charged particle (60) away from the direction of beam travel.