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公开(公告)号：EP2276056A3
公开(公告)日：2011-01-26
申请号：EP10176305.0
申请日：2002-06-17
发明人： Zajfman, Daniel , Heber, Oded , Pedersen, Henrik B. , Rudich, Yinon , Sagi, Irit , Rappaport, Michael
IPC分类号： H01J49/40
CPC分类号： H01J3/40 , H01J49/027 , H01J49/406 , H01J49/4245
摘要： A charged particle trap for trapping of a plurality of charged particles, and a method of operating said trap. The trap includes first and second electrode mirrors (2,3) having a common optical axis (4), the mirrors being arranged in alignment at two extremities thereof. The mirrors are capable, when voltage is applied thereto, of creating respective electric fields defined by key field parameters. The electric fields are configured to reflect charged particles causing their oscillation between the mirrors. The method includes introducing into the trap, along the optical axis, the plurality of charged particles as a beam (10) having pre-determined key beam parameters. The method further includes choosing the key field parameters for at least one of the mirrors such as to induce bunching among charged particles in the beam.
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公开(公告)号：EP2099058A2
公开(公告)日：2009-09-09
申请号：EP09000834.3
申请日：2002-06-17
发明人： Zajfman, Daniel , Heber, Oded , Pedersen, Henrik , Rudich, Yinon , Sagi, Irit , Rappaport, Michael
IPC分类号： H01J49/40
CPC分类号： H01J3/40 , H01J49/027 , H01J49/406 , H01J49/4245
摘要： A charged particle trap for trapping of a plurality of charged particles. The trap includes first and second electrode mirrors (2,3) having a common optical axis (4), the mirrors being arranged in alignment at two extremities thereof. The mirrors are capable, when voltage is applied thereto, of creating respective electric fields defined by key field parameters. The electric fields are configured to reflect charged particles causing their oscillation between the mirrors. The plurality of charged particles is introduced into the trap, along the optical axis, as a beam (10) having pre-determined key beam parameters. The key field parameters for at least one of the mirrors are chosen such as to induce bunching among charged particles in the beam.
摘要翻译： 用于捕获多个带电粒子的带电粒子阱。 该陷阱包括具有公共光轴（4）的第一和第二电极镜（2,3），该反射镜在其两端配置成对准。 当施加电压时，反射镜能够产生由关键场参数定义的各个电场。 电场被配置为反射带电粒子，导致它们在反射镜之间振荡。 多个带电粒子沿着光轴被引入到陷阱中，作为具有预定的键束参数的光束（10）。 选择至少一个反射镜的关键场参数，以便在光束中的带电粒子之间诱导聚束。
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公开(公告)号：EP1314182B1
公开(公告)日：2008-12-10
申请号：EP01960909.8
申请日：2001-08-21
发明人： HARRINGTON, Eric, Ryan , BENVENISTE, Victor, Maurice , GRAF, Michael, Anthony , RATHMELL, Robert, Day
IPC分类号： H01J37/317 , H01J37/02
CPC分类号： H01J3/40 , H01J37/026 , H01J37/3002 , H01J37/3171 , H01J2237/004 , H01J2237/022 , H01J2237/31705
摘要： A system for inhibiting the transport of contaminant particles with an ion beam includes an electric field generator (12, 14) for generating an electric field (28) relative to a path of travel (20) for the ion beam (16). A particle (66) located in the ion beam (16) and in a region of the electric field (28) is charged to a polarity according to the ion beam (16), so that the electric field (28) may urge the charged particle (66) out of the ion beam (16).
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公开(公告)号：EP1402562A1
公开(公告)日：2004-03-31
申请号：EP02738591.3
申请日：2002-06-17
发明人： ZAJFMAN, Daniel , HEBER, Oded , PEDERSEN, Henrik, B. , RUDICH, Yinon , SAGI, Irit , RAPPAPORT, Michael
IPC分类号： H01J49/40
CPC分类号： H01J3/40 , H01J49/027 , H01J49/406 , H01J49/4245
摘要： A method for trapping of a plurality of charged particles in a charged particle trap. The trap includes first and second electrode mirrors (2, 3) having a common optical axis (4), the mirrors being arranged in alignment at two extremities thereof. The mirrors are capable, when voltage is applied thereto, of creating respective electric fields defined by key field parameters. The electric fields are configured to reflect charged particles causing their oscillation between the mirrors. The method includes introducing into the trap, along the optical axis, the plurality of charged particles as a beam (10) having pre-determined key beam parameters. The method further includes choosing the key field parameters for at least one of the mirrors such as to induce bunching among charged particles in the beam.
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公开(公告)号：EP2446456A4
公开(公告)日：2014-03-19
申请号：EP10792529
申请日：2010-06-15
申请人： L 3 COMM CORP
CPC分类号： H01J3/40 , H01J1/52 , H01J37/026 , H01J37/06 , H01J2237/0206 , H01J2237/0213 , H01J2237/06325
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公开(公告)号：EP2446456A1
公开(公告)日：2012-05-02
申请号：EP10792529.9
申请日：2010-06-15
IPC分类号： H01J25/34
CPC分类号： H01J3/40 , H01J1/52 , H01J37/026 , H01J37/06 , H01J2237/0206 , H01J2237/0213 , H01J2237/06325
摘要： A system and method of magnetically insulating the cathode of a cold-cathode electron gun is achieved. A strong magnetic field is applied in the vicinity of the cold cathode to deflect and constrain the flow of electrons emitted from structures within the electron gun. The magnetic field largely prevents re-reflected primary and secondary electrons from reaching the cathode, thereby improving the operation and increasing the life of the cold-cathode electron gun. In addition, the insulating magnetic field improves electron beam focusing and enables a reduction in the magnitude of static electric focusing fields employed in the vicinity of the cold cathode, further reducing the electron gun's susceptibility to destructive arcing.
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公开(公告)号：EP2099058A3
公开(公告)日：2009-12-02
申请号：EP09000834.3
申请日：2002-06-17
发明人： Zajfman, Daniel , Heber, Oded , Pedersen, Henrik , Rudich, Yinon , Sagi, Irit , Rappaport, Michael
IPC分类号： H01J49/40
CPC分类号： H01J3/40 , H01J49/027 , H01J49/406 , H01J49/4245
摘要： A charged particle trap for trapping of a plurality of charged particles. The trap includes first and second electrode mirrors (2,3) having a common optical axis (4), the mirrors being arranged in alignment at two extremities thereof. The mirrors are capable, when voltage is applied thereto, of creating respective electric fields defined by key field parameters. The electric fields are configured to reflect charged particles causing their oscillation between the mirrors. The plurality of charged particles is introduced into the trap, along the optical axis, as a beam (10) having pre-determined key beam parameters. The key field parameters for at least one of the mirrors are chosen such as to induce bunching among charged particles in the beam.
摘要翻译： 用于捕获多个带电粒子的带电粒子捕获器。 该陷阱包括具有公共光轴（4）的第一和第二电极镜（2,3），这些镜在其两个末端排列成对齐。 当施加电压时，反射镜能够产生由关键场参数定义的相应电场。 电场被配置为反射带电粒子，引起它们在镜子之间的振荡。 多个带电粒子沿着光轴作为具有预定关键射束参数的射束（10）被引入陷阱。 选择至少一个反射镜的关键场参数，以便诱导束中带电粒子之间的聚束。
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公开(公告)号：EP0777909A1
公开(公告)日：1997-06-11
申请号：EP95928963.0
申请日：1995-08-23
申请人： LINOTYPE-HELL AG
摘要： The invention relates to an electron beam generator consisting of a cathode (1), and anode (3) with an anode drilling for the electron beam (6) along a beam axis (5) and a Wehnelt electrode (2) arranged between the cathode (1) and the anode (3), where the cathode (1), the anode (3) and the Wehnelt electrode (2) are in a vacuum chamber. The cathode (1) and the Wehnelt electrode (2) can move perpendicularly to the beam axis (5) and in the vicinity of the cathode (1) there is a magnetic cathode protection device (7) which generates a static transverse magnetic field (9) running perpendicularly to the beam axis (5). The magnetic field (9) diverts the electron beam (6) from the beam axis (5), whereby the cathode (1) and the Wehnelt electrode (2) are shifted against the direction of deflection of the electron beam (6) and/or the direction of deflection of the electron beam (6) is selected such that the deflected electron beam (6) once more runs in the beam axis (5) in the region of the anode (3). This arrangement reduces the number of ions impinging on the cathode (1) and formed by the ionisation of residual molecules and thus advantageously lengthens the useful life of the cathode (1).
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9.发明公开Elektronenstrahlerzeuger, insbesondere für eine Elektronenstrahlkanone 失效Elektronenstrahlerzeuger，insbesonderefüreine Elektronenstrahlkanone。
公开(公告)号：EP0417638A2
公开(公告)日：1991-03-20
申请号：EP90117156.1
申请日：1990-09-06
发明人： Fritz, Dieter
IPC分类号： H01J37/063 , H01J3/40 , H01J37/04
CPC分类号： H01J37/063 , H01J3/40
摘要： Bei dem Elektronenstrahlerzeuger ist der auf Masse liegenden Anode (9) ein koaxial zu ihr angeordneter Potentialring (15) benachbart, durch den den Raumladungseffekt kompensierende Ionen im Bereich des Elektronenstrahls zurückgehalten werden. Hierdurch bleiben Strahldichte und Fokuslage über einen weiten Druckbereich im wesentlichen konstant.
摘要翻译： 在电子束发生器中，与阳极（9）相邻设置，其连接到地，是一个电位环（15），其相对于所述阳极同轴布置，借助于这些离子补偿空间电荷 效应被阻止在电子束的区域中。 因此，光束密度和聚焦位置在宽的压力范围内保持基本恒定。
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公开(公告)号：EP3211781A4
公开(公告)日：2017-11-22
申请号：EP14904426
申请日：2014-10-20
申请人： SHIMADZU CORP
发明人： MIZUTANI SHIRO
IPC分类号： H02M7/10
CPC分类号： H01J49/10 , H01J3/40 , H01J49/0036 , H01J49/0095 , H01J49/022 , H01J49/063 , H01J49/165 , H01J49/4245 , H02M7/10 , H02M7/103
摘要： A high-voltage power source for applying high voltage to a nozzle of an ESI ion source includes a charge release assistant section (26) including switch circuits (62 and 65) and other elements for forcing electric charges accumulated at output terminals to be discharged in a polarity-switching operation, whereby the positive/negative switching of the polarity of the output voltage can be quickly performed. In the mass spectrometer according to the present invention, for example, when the voltage applied to the nozzle needs to be changed from V 1 to V 2 (where V 1 and V 2 are positive, and V 1 >V 2 ), a voltage control section (20) under the command of a main controller (9) operates a positive voltage generation section (21) and negative voltage generation section (23) so as to temporarily provide a negative output voltage. After a predetermined period of time, the voltage control section operates the positive voltage generation section (21) and negative voltage generation section (23) so as to provide voltage V 2 . If the voltage was simply changed from V 1 to V 2 , the voltage would decrease slowly and require considerable time for the change. The positive/negative switching of the polarity induces the discharging of the electric charges accumulated at the output terminals, and consequently, the voltage-switching operation from V 1 to V 2 is quickly performed.
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