Patent search ap:("BASF SE") AND inv:"SHEN Page Mary"

1.

发明公开
COMPOSITION COMPRISING A SILOXANE AND AN ALKANE FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW 审中-公开

公开(公告)号：EP4179057A1

公开(公告)日：2023-05-17

申请号：EP21737452.9

申请日：2021-06-29

Applicant: BASF SE

Inventor： KAO, Chi Yueh , SHEN, Mary , KLIPP, Andreas , GUEVENC, Haci Osman , LOEFFLER, Daniel

IPC: C11D11/00 , G03F7/40 , H01L21/02

Patent Agency Ranking