Patent search ap:("BASF SE") AND inv:"LOEFFLER Page Daniel"

1.

发明公开
USE OF COMPOSITIONS COMPRISING A SILOXANE-TYPE ADDITIVE FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW 审中-公开

公开(公告)号：EP3704547A1

公开(公告)日：2020-09-09

申请号：EP18800532.6

申请日：2018-10-29

Applicant: BASF SE

Inventor： LOEFFLER, Daniel , SHEN, Mei Chin , WEI, Sheng Hsuan , PIRRUNG, Frank , ENGELBRECHT, Lothar , BURK, Yeni , KLIPP, Andreas , BRILL, Marcel , CSIHONY, Szilard

IPC: G03F7/40 , C11D1/66 , C11D11/00 , H01L21/02 , H01L21/027

2.

发明公开
PROCESS FOR PREPARING OF TRANSITION METAL-CONTAINING FILMS 审中-公开

公开(公告)号：EP4551734A1

公开(公告)日：2025-05-14

申请号：EP23737984.7

申请日：2023-07-03

Applicant: BASF SE

Inventor： HUFNAGEL, Alexander Georg , KLENK, Sinja Verena , WILMER, Hagen , LOEFFLER, Daniel

IPC: C23C16/455 , C23C16/18 , C23C16/56

3.

发明公开
PROCESS FOR THE GENERATION OF THIN INORGANIC FILMS 审中-公开

公开(公告)号：EP3443140A1

公开(公告)日：2019-02-20

申请号：EP17715497.8

申请日：2017-04-10

Applicant: BASF SE

Inventor： LIMBURG, Carolin , LOEFFLER, Daniel , WILMER, Hagen , WALTER, Marc , REINERS, Matthias

IPC: C23C16/455 , C01G51/00 , C01G53/00 , C07F15/04 , C07F15/06

4.

发明公开
COMPOSITION COMPRISING A SILOXANE AND AN ALKANE FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW 审中-公开

公开(公告)号：EP4179057A1

公开(公告)日：2023-05-17

申请号：EP21737452.9

申请日：2021-06-29

Applicant: BASF SE

Inventor： KAO, Chi Yueh , SHEN, Mary , KLIPP, Andreas , GUEVENC, Haci Osman , LOEFFLER, Daniel

IPC: C11D11/00 , G03F7/40 , H01L21/02

5.

发明公开
TWIN-MONOMER COMPOSITION AND DIELECTRIC FILM THEREOF 审中-公开

公开(公告)号：EP3999516A1

公开(公告)日：2022-05-25

申请号：EP20735196.6

申请日：2020-07-03

Applicant: BASF SE

Inventor： CSIHONY, Szilard , LINDNER, Jean-Pierre Berkan , LOEFFLER, Daniel , BURK, Yeni , HENNIG, Ingolf , HENDERSON, Lucas Benjamin , GERKE, Birgit , DE OLIVEIRA, Rui , BOYKO, Volodymyr , PIRRUNG, Frank

IPC: C07F7/04 , B32B15/08 , C08K3/22 , C08K9/06 , C08L43/04 , H01L23/14 , H05K1/03

6.

发明公开
COMPOSITION, ITS USE AND A PROCESS FOR SELECTIVELY ETCHING SILICON-GERMANIUM MATERIAL 审中-公开

公开(公告)号：EP3997193A1

公开(公告)日：2022-05-18

申请号：EP20733993.8

申请日：2020-06-19

Applicant: BASF SE

Inventor： LOPEZ VILLANUEVA, Francisco Javier , BURK, Yeni , LOEFFLER, Daniel , MUELLER, Jan Ole , BRILL, Marcel , WILKE, Patrick , LINDNER, Jean-Pierre Berkan , BOYKO, Volodymyr

IPC: C09K13/00 , C09K13/08 , H01L21/306

7.

发明公开
PROCESS FOR MAKING A PARTICULATE COATED ORGANIC SALT, AND PARTICULATE COATED SALT 审中-公开

公开(公告)号：EP4301504A1

公开(公告)日：2024-01-10

申请号：EP22706335.1

申请日：2022-02-24

Applicant: BASF SE

Inventor： STREMPEL, Verena , REINOSO GARCIA, Marta , LOEFFLER, Daniel , SUELING, Carsten

IPC: B01J13/14 , C11D17/00

8.

发明公开
USE OF A COMPOSITION CONSISTING OF AMMONIA AND AN ALKANOL FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW 审中-公开

公开(公告)号：EP4158678A1

公开(公告)日：2023-04-05

申请号：EP21724690.9

申请日：2021-05-12

Applicant: BASF SE

Inventor： KAO, Chi Yueh , SHEN, Mei Chin , LOEFFLER, Daniel , KLIPP, Andreas , GUEVENC, Haci Osman

IPC: H01L21/02 , B81C1/00 , C11D11/00

9.

发明公开
EPOXY RESIN COMPOSITION 审中-公开

公开(公告)号：EP3856840A1

公开(公告)日：2021-08-04

申请号：EP19773109.4

申请日：2019-09-26

Applicant: BASF SE

Inventor： LINDNER, Jean-Pierre Berkan , CSIHONY, Szilard , LOEFFLER, Daniel , BURK, Yeni , GERKE, Birgit , PIRRUNG, Frank , HENDERSON, Lucas Benjamin , BOYKO, Volodymyr , DE OLIVEIRA, Rui , HENNIG, Ingolf , YU, Miran

IPC: C08L63/00

10.

发明公开
PROCESS FOR COATING AN OXIDE MATERIAL 审中-公开

公开(公告)号：EP3593391A1

公开(公告)日：2020-01-15

申请号：EP18714129.6

申请日：2018-02-21

Applicant: BASF SE

Inventor： KLEINE JAEGER, Frank , LIEBSCH, Tillmann , SCHOENHERR, Michael , GARELLA, Dominik , CETINEL, Fatih , SOMMER, Heino , AHLF, Maraike , LOEFFLER, Daniel , VOGELSANG, Regina , HAAG, Jacob

IPC: H01M4/36 , C23C16/44 , H01M4/505 , H01M4/525

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