公开(公告)号：EP2972255A1

公开(公告)日：2016-01-20

申请号：EP14723527.9

申请日：2014-03-11

申请人： Bruker AXS, Inc.

发明人： DURST, Roger ,  LAGGNER, Peter ,  MEDVED, Sergei ,  BECKER, Bruce

IPC分类号： G01N23/201

CPC分类号： G01T1/1606 ,  G01N23/201 ,  G01N2223/054 ,  G01T1/24 ,  H01L31/085 ,  Y10T29/4913

摘要： A detector for a small-angle x-ray diffraction system uses curved readout strips shaped to correspond to the expected intensity distribution of x-rays scattered by the system. This expected intensity distribution may be a series of concentric circles, and each of the strips has a shape that approximates a section of an annulus. The strips may be positioned on a substrate such that a center of curvature of the curved strips is located along an edge of a readout region within which the strips are located or, alternatively, at a geometric center of the readout region. The detector may have a signal readout system that uses a delay line or, alternatively, a multichannel readout system. The detector may make use of electron generation via interaction of the diffracted x-ray beam with a gas in a gas chamber, or through interaction of the diffracted beam with a semiconductor material.

摘要翻译： 用于小角度X射线衍射系统的检测器使用弯曲的读出条，其形状对应于由系统散射的x射线的预期强度分布。 该预期强度分布可以是一系列同心圆，并且每个条具有近似于环的一部分的形状。 条带可以定位在基底上，使得弯曲条带的曲率中心沿着条带所在的读出区域的边缘或者替代地位于读出区域的几何中心处。 检测器可以具有使用延迟线的信号读出系统，或者可选地，多通道读出系统。 检测器可以通过衍射X射线束与气室中的气体的相互作用或通过衍射光束与半导体材料的相互作用来利用电子产生。

公开(公告)号：EP2972255B1

公开(公告)日：2018-05-23

申请号：EP14723527.9

申请日：2014-03-11

申请人： Bruker AXS, Inc.

发明人： DURST, Roger ,  LAGGNER, Peter ,  MEDVED, Sergei ,  BECKER, Bruce

IPC分类号： G01T1/24 ,  G01T1/29 ,  H01L31/08 ,  G01N23/201

CPC分类号： G01T1/1606 ,  G01N23/201 ,  G01N2223/054 ,  G01T1/24 ,  H01L31/085 ,  Y10T29/4913

摘要： A detector for a small-angle x-ray diffraction system uses curved readout strips shaped to correspond to the expected intensity distribution of x-rays scattered by the system. This expected intensity distribution may be a series of concentric circles, and each of the strips has a shape that approximates a section of an annulus. The strips may be positioned on a substrate such that a center of curvature of the curved strips is located along an edge of a readout region within which the strips are located or, alternatively, at a geometric center of the readout region. The detector may have a signal readout system that uses a delay line or, alternatively, a multichannel readout system. The detector may make use of electron generation via interaction of the diffracted x-ray beam with a gas in a gas chamber, or through interaction of the diffracted beam with a semiconductor material.

公开(公告)号：EP3158363A2

公开(公告)日：2017-04-26

申请号：EP15733976.3

申请日：2015-06-19

申请人： Bruker AXS, Inc.

发明人： DURST, Roger ,  WACHTER, Gregory ,  HE, Tianqing

IPC分类号： G01T1/20

CPC分类号： G01T1/208 ,  G01T1/2018

摘要： A method for X-ray detection using a charge-integrating X-ray detector including a photodetector array of pixels, each of which converts incident radiation into accumulated charge during an X-ray exposure, is provided. The method includes, for each pixel, reading out the accumulated charge from the pixel and determining an X-ray charge value from the read out accumulated charge. If the X-ray charge value is less than a photon counting threshold, the X-ray charge value is replaced with a quantized charge value representative of an estimated photon count and recording the quantized charge value as a recorded charge value. If, however, the X-ray charge is equal to or greater than the photon counting threshold, the X-charge value is recorded as the recorded charge value. The method allows operating a charge-integrating X-ray detector in a mixed photon-counting/analog output mode.

摘要翻译： 提供了一种使用包括像素的光电检测器阵列的电荷积分X射线检测器的X射线检测方法，其中每个像素在X射线曝光期间将入射放射线转换成累积电荷。 该方法包括对于每个像素读出来自像素的累积电荷并且从读出的累积电荷中确定X射线电荷值。 如果X射线电荷值小于光子计数阈值，则将X射线电荷值替换为表示估计光子计数的量化电荷值，并将量化电荷值记录为记录电荷值。 但是，如果X射线电荷等于或大于光子计数阈值，则X电荷值被记录为记录的电荷值。 该方法允许在混合光子计数/模拟输出模式下操作电荷积分X射线检测器。

公开(公告)号：EP2771678A1

公开(公告)日：2014-09-03

申请号：EP12794574.9

申请日：2012-10-24

申请人： Bruker AXS, Inc.

发明人： DURST, Roger ,  KAERCHER, Joerg ,  WACHTER, Gregory ,  CHAMBERS, John

IPC分类号： G01N23/20

CPC分类号： G01N23/207 ,  G01N23/20016 ,  G01T1/247 ,  G06F17/17

摘要： In an X-ray detector operating in a rolling shutter read out mode, by precisely synchronizing sample rotation with the detector readout, the effects of timing skew on the image intensities and angular positions caused by the rolling shutter read out can be compensated by interpolation or calculation, thus allowing the data to be accurately integrated with conventional software. In one embodiment, the reflection intensities are interpolated with respect to time to recreate data that is synchronized to a predetermined time. This interpolated data can then be processed by any conventional integration routine to generate a 3D model of the sample. In another embodiment a 3D integration routine is specially adapted to allow the time- skewed data to be processed directly and generate a 3D model of the sample.