公开(公告)号：EP2972255A1

公开(公告)日：2016-01-20

申请号：EP14723527.9

申请日：2014-03-11

申请人： Bruker AXS, Inc.

发明人： DURST, Roger ,  LAGGNER, Peter ,  MEDVED, Sergei ,  BECKER, Bruce

IPC分类号： G01N23/201

CPC分类号： G01T1/1606 ,  G01N23/201 ,  G01N2223/054 ,  G01T1/24 ,  H01L31/085 ,  Y10T29/4913

摘要： A detector for a small-angle x-ray diffraction system uses curved readout strips shaped to correspond to the expected intensity distribution of x-rays scattered by the system. This expected intensity distribution may be a series of concentric circles, and each of the strips has a shape that approximates a section of an annulus. The strips may be positioned on a substrate such that a center of curvature of the curved strips is located along an edge of a readout region within which the strips are located or, alternatively, at a geometric center of the readout region. The detector may have a signal readout system that uses a delay line or, alternatively, a multichannel readout system. The detector may make use of electron generation via interaction of the diffracted x-ray beam with a gas in a gas chamber, or through interaction of the diffracted beam with a semiconductor material.

摘要翻译： 用于小角度X射线衍射系统的检测器使用弯曲的读出条，其形状对应于由系统散射的x射线的预期强度分布。 该预期强度分布可以是一系列同心圆，并且每个条具有近似于环的一部分的形状。 条带可以定位在基底上，使得弯曲条带的曲率中心沿着条带所在的读出区域的边缘或者替代地位于读出区域的几何中心处。 检测器可以具有使用延迟线的信号读出系统，或者可选地，多通道读出系统。 检测器可以通过衍射X射线束与气室中的气体的相互作用或通过衍射光束与半导体材料的相互作用来利用电子产生。

公开(公告)号：EP2972255B1

公开(公告)日：2018-05-23

申请号：EP14723527.9

申请日：2014-03-11

申请人： Bruker AXS, Inc.

发明人： DURST, Roger ,  LAGGNER, Peter ,  MEDVED, Sergei ,  BECKER, Bruce

IPC分类号： G01T1/24 ,  G01T1/29 ,  H01L31/08 ,  G01N23/201

CPC分类号： G01T1/1606 ,  G01N23/201 ,  G01N2223/054 ,  G01T1/24 ,  H01L31/085 ,  Y10T29/4913

摘要： A detector for a small-angle x-ray diffraction system uses curved readout strips shaped to correspond to the expected intensity distribution of x-rays scattered by the system. This expected intensity distribution may be a series of concentric circles, and each of the strips has a shape that approximates a section of an annulus. The strips may be positioned on a substrate such that a center of curvature of the curved strips is located along an edge of a readout region within which the strips are located or, alternatively, at a geometric center of the readout region. The detector may have a signal readout system that uses a delay line or, alternatively, a multichannel readout system. The detector may make use of electron generation via interaction of the diffracted x-ray beam with a gas in a gas chamber, or through interaction of the diffracted beam with a semiconductor material.