公开(公告)号：EP0925933A2

公开(公告)日：1999-06-30

申请号：EP99200646.0

申请日：1992-04-16

申请人： CANON KABUSHIKI KAISHA

发明人： Matsumoto, Shigeyuki ,  Monma, Genzo ,  Kamei, Seiji ,  Sekine, Yasuhiro ,  Naruse, Yasuhiro ,  Fujita, Kei ,  Akino, Yutaka ,  Hayakawa, Yukihiro

IPC分类号： B41J2/16 ,  H01L21/321

CPC分类号： B41J2/1629 ,  B41J2/14129 ,  B41J2/1604 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/164 ,  B41J2/1642 ,  B41J2202/03 ,  B41J2202/13 ,  H01L21/321 ,  H01L21/32134

摘要： A method for producing a substrate for a recording head wherein a plurality of electro-thermal converting elements, a plurality of driving functional elements for respectively driving the electro-thermal converting elements and a plurality of wiring electrodes for respectively connecting each of the driving functional elements and each of the electro-thermal converting elements are formed on a supporting member of photolithography comprises forming the wiring electrodes by etching a material layer for the wiring electrodes while etchingwise removing a photoresist for masking the material layer for the wiring electrodes.

摘要翻译： 一种用于记录头的基板的制造方法，其特征在于：多个电热转换元件，分别驱动电热转换元件的多个驱动功能元件和用于分别连接各个驱动功能元件的多个布线电极 并且每个电热转换元件形成在光刻的支撑构件上，包括通过蚀刻用于布线电极的材料层来形成布线电极，同时蚀刻去除用于掩蔽布线电极的材料层的光致抗蚀剂。

公开(公告)号：EP0935280B1

公开(公告)日：2004-06-09

申请号：EP99300620.4

申请日：1999-01-28

申请人： CANON KABUSHIKI KAISHA

发明人： Akino, Yutaka ,  Atoji, Tadashi

IPC分类号： H01L21/20 ,  H01L21/762

CPC分类号： H01L21/7624 ,  H01L21/2007 ,  H01L21/76251 ,  Y10T156/10 ,  Y10T156/1043 ,  Y10T156/1052

公开(公告)号：EP0925933A3

公开(公告)日：1999-09-01

申请号：EP99200646.0

申请日：1992-04-16

申请人： CANON KABUSHIKI KAISHA

发明人： Matsumoto, Shigeyuki ,  Monma, Genzo ,  Kamei, Seiji ,  Sekine, Yasuhiro ,  Naruse, Yasuhiro ,  Fujita, Kei ,  Akino, Yutaka ,  Hayakawa, Yukihiro

IPC分类号： B41J2/16 ,  H01L21/321

CPC分类号： B41J2/1629 ,  B41J2/14129 ,  B41J2/1604 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/164 ,  B41J2/1642 ,  B41J2202/03 ,  B41J2202/13 ,  H01L21/321 ,  H01L21/32134

摘要： A method for producing a substrate for a recording head wherein a plurality of electro-thermal converting elements, a plurality of driving functional elements for respectively driving the electro-thermal converting elements and a plurality of wiring electrodes for respectively connecting each of the driving functional elements and each of the electro-thermal converting elements are formed on a supporting member of photolithography comprises forming the wiring electrodes by etching a material layer for the wiring electrodes while etchingwise removing a photoresist for masking the material layer for the wiring electrodes.

公开(公告)号：EP0659564B1

公开(公告)日：2002-03-20

申请号：EP94120338.2

申请日：1994-12-21

申请人： CANON KABUSHIKI KAISHA

发明人： Akino, Yutaka ,  Makino, Kenji ,  Okita, Akira ,  Tamura, Seiichi

IPC分类号： B41J2/16

CPC分类号： B41J2/14072 ,  B41J2/14129 ,  B41J2002/14379 ,  B41J2202/13

公开(公告)号：EP0659564A3

公开(公告)日：1997-01-15

申请号：EP94120338.2

申请日：1994-12-21

申请人： CANON KABUSHIKI KAISHA

发明人： Akino, Yutaka ,  Makino, Kenji ,  Okita, Akira ,  Tamura, Seiichi

IPC分类号： B41J2/16

CPC分类号： B41J2/14072 ,  B41J2/14129 ,  B41J2002/14379 ,  B41J2202/13

摘要： An object of the present invention is to provide an ink jet recording head and an apparatus using the same, wherein electrothermal conversion element for thermally emitting a recording ink is provided at a side of a substrate on which the head structure is formed, thereby reducing a loss in the thermal energy.

摘要翻译： 本发明的目的是提供一种喷墨记录头及其使用方法，其中用于热发射记录油墨的电热转换元件设置在其上形成有头结构的基板的一侧，从而减少了 热能损失。

公开(公告)号：EP0925933B1

公开(公告)日：2002-12-11

申请号：EP99200646.0

申请日：1992-04-16

申请人： CANON KABUSHIKI KAISHA

发明人： Matsumoto, Shigeyuki ,  Monma, Genzo ,  Kamei, Seiji ,  Sekine, Yasuhiro ,  Naruse, Yasuhiro ,  Fujita, Kei ,  Akino, Yutaka ,  Hayakawa, Yukihiro

IPC分类号： B41J2/16 ,  H01L21/3213

CPC分类号： B41J2/1629 ,  B41J2/14129 ,  B41J2/1604 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/164 ,  B41J2/1642 ,  B41J2202/03 ,  B41J2202/13 ,  H01L21/321 ,  H01L21/32134

公开(公告)号：EP0935280A1

公开(公告)日：1999-08-11

申请号：EP99300620.4

申请日：1999-01-28

申请人： CANON KABUSHIKI KAISHA

发明人： Akino, Yutaka ,  Atoji, Tadashi

IPC分类号： H01L21/20 ,  H01L21/762

CPC分类号： H01L21/7624 ,  H01L21/2007 ,  H01L21/76251 ,  Y10T156/10 ,  Y10T156/1043 ,  Y10T156/1052

摘要： A method of manufacturing a semiconductor substrate can effectively prevent a chipping phenomenon and the production of debris from occurring in part of the insulation layer and the semiconductor by removing a outer peripheral portion of the semiconductor substrate so as to make the outer peripheral extremity of the insulation layer to be located between the outer peripheral extremity of the semiconductor layer and that of the support member and hence the semiconductor layer and the insulation layer produce a stepped profile.

摘要翻译： 制造半导体衬底的方法可以通过去除半导体衬底的外围部分来有效地防止在绝缘层和半导体的一部分中产生碎屑现象和碎屑的产生，从而使绝缘层的外周末端 位于半导体层的外周末端和支撑构件的外周末端之间，因此半导体层和绝缘层产生阶梯状。

公开(公告)号：EP0659564A2

公开(公告)日：1995-06-28

申请号：EP94120338.2

申请日：1994-12-21

申请人： CANON KABUSHIKI KAISHA

发明人： Akino, Yutaka ,  Makino, Kenji ,  Okita, Akira ,  Tamura, Seiichi

IPC分类号： B41J2/16

CPC分类号： B41J2/14072 ,  B41J2/14129 ,  B41J2002/14379 ,  B41J2202/13

摘要： An object of the present invention is to provide an ink jet recording head and an apparatus using the same, wherein electrothermal conversion element for thermally emitting a recording ink is provided at a side of a substrate on which the head structure is formed, thereby reducing a loss in the thermal energy.