公开(公告)号：EP0925933A2

公开(公告)日：1999-06-30

申请号：EP99200646.0

申请日：1992-04-16

申请人： CANON KABUSHIKI KAISHA

发明人： Matsumoto, Shigeyuki ,  Monma, Genzo ,  Kamei, Seiji ,  Sekine, Yasuhiro ,  Naruse, Yasuhiro ,  Fujita, Kei ,  Akino, Yutaka ,  Hayakawa, Yukihiro

IPC分类号： B41J2/16 ,  H01L21/321

CPC分类号： B41J2/1629 ,  B41J2/14129 ,  B41J2/1604 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/164 ,  B41J2/1642 ,  B41J2202/03 ,  B41J2202/13 ,  H01L21/321 ,  H01L21/32134

摘要： A method for producing a substrate for a recording head wherein a plurality of electro-thermal converting elements, a plurality of driving functional elements for respectively driving the electro-thermal converting elements and a plurality of wiring electrodes for respectively connecting each of the driving functional elements and each of the electro-thermal converting elements are formed on a supporting member of photolithography comprises forming the wiring electrodes by etching a material layer for the wiring electrodes while etchingwise removing a photoresist for masking the material layer for the wiring electrodes.

摘要翻译： 一种用于记录头的基板的制造方法，其特征在于：多个电热转换元件，分别驱动电热转换元件的多个驱动功能元件和用于分别连接各个驱动功能元件的多个布线电极 并且每个电热转换元件形成在光刻的支撑构件上，包括通过蚀刻用于布线电极的材料层来形成布线电极，同时蚀刻去除用于掩蔽布线电极的材料层的光致抗蚀剂。

公开(公告)号：EP0925933B1

公开(公告)日：2002-12-11

申请号：EP99200646.0

申请日：1992-04-16

申请人： CANON KABUSHIKI KAISHA

发明人： Matsumoto, Shigeyuki ,  Monma, Genzo ,  Kamei, Seiji ,  Sekine, Yasuhiro ,  Naruse, Yasuhiro ,  Fujita, Kei ,  Akino, Yutaka ,  Hayakawa, Yukihiro

IPC分类号： B41J2/16 ,  H01L21/3213

CPC分类号： B41J2/1629 ,  B41J2/14129 ,  B41J2/1604 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/164 ,  B41J2/1642 ,  B41J2202/03 ,  B41J2202/13 ,  H01L21/321 ,  H01L21/32134

公开(公告)号：EP0476713A2

公开(公告)日：1992-03-25

申请号：EP91118874.6

申请日：1987-03-25

申请人： CANON KABUSHIKI KAISHA

发明人： Yonehara, Takao ,  Naruse, Yasuhiro

IPC分类号： C30B25/18 ,  C30B23/02

CPC分类号： H01L29/78 ,  C30B23/002 ,  C30B23/02 ,  C30B25/02 ,  C30B25/105 ,  C30B25/18 ,  C30B29/02 ,  C30B29/04 ,  H01L21/02376 ,  H01L21/02381 ,  H01L21/02395 ,  H01L21/0242 ,  H01L21/02529 ,  H01L21/02532 ,  H01L21/02543 ,  H01L21/0262 ,  H01L21/02639 ,  H01L21/02647 ,  H01L29/78654

摘要： A method for forming a crystal, which comprises applying a crystal forming treatment on a substrate having a free surface on which a deposition surface (S NDS ) with a small nucleation density and a deposition surface (S NDL ) having a sufficinetly small area for crystal growth only from a single nucleus and having a greater nucleation density (ND L ) than the nucleation density (ND S ) of said deposition surface (S NDS ) are. arranged adjacent to each other, thereby growing a single crystal from said single nucleus.

公开(公告)号：EP0244081A1

公开(公告)日：1987-11-04

申请号：EP87302587.8

申请日：1987-03-25

申请人： CANON KABUSHIKI KAISHA

发明人： Yonehara, Takao ,  Naruse, Yasuhiro

IPC分类号： C30B25/18 ,  C30B23/02

CPC分类号： H01L29/78 ,  C30B23/002 ,  C30B23/02 ,  C30B25/02 ,  C30B25/105 ,  C30B25/18 ,  C30B29/02 ,  C30B29/04 ,  H01L21/02376 ,  H01L21/02381 ,  H01L21/02395 ,  H01L21/0242 ,  H01L21/02529 ,  H01L21/02532 ,  H01L21/02543 ,  H01L21/0262 ,  H01L21/02639 ,  H01L21/02647 ,  H01L29/78654

摘要： A method for forming a crystal, which comprises applying a crystal forming treatment on a substrate having a free surface on which a deposition surface (S NDS ) with a small nucleation density and a deposition surface (S NDL ) having a sufficinetly small area for crystal growth only from a single nucleus and having a greater nucleation density (ND L ) than the nucleation density (ND S ) of said deposition surface (S NDS ) are arranged adjacent to each other, thereby growing a single crystal from said single nucleus.

摘要翻译： 一种用于形成晶体，其包括将晶体形成在具有自由表面的基片处理方法在其上沉积表面（SNDS）具有小的成核密度，并具有用于仅晶体生长sufficinetly面积小的沉积表面（S NDL） 从一个单一的核和具有比所述的成核密度，所述沉积表面的（NDS）（SNDS）更大的成核密度（NDL）相邻地布置海誓山盟，由此生长由所述单核的单晶。

公开(公告)号：EP0630749B1

公开(公告)日：1998-12-23

申请号：EP94109881.6

申请日：1994-06-27

申请人： CANON KABUSHIKI KAISHA

发明人： Ikeda, Masami ,  Sugitani, Hiroshi ,  Matsumoto, Shigeyuki ,  Naruse, Yasuhiro ,  Makino, Kenji ,  Izumida, Masaaki ,  Tamura, Seiichi

IPC分类号： B41J2/05

CPC分类号： B41J2/14072 ,  B41J2/14129 ,  B41J2202/03

公开(公告)号：EP0630749A3

公开(公告)日：1995-12-13

申请号：EP94109881.6

申请日：1994-06-27

申请人： CANON KABUSHIKI KAISHA

发明人： Ikeda, Masami ,  Sugitani, Hiroshi ,  Matsumoto, Shigeyuki ,  Naruse, Yasuhiro ,  Makino, Kenji ,  Izumida, Masaaki ,  Tamura, Seiichi

IPC分类号： B41J2/05

CPC分类号： B41J2/14072 ,  B41J2/14129 ,  B41J2202/03

摘要： A heat generating resistor comprised of a film composed of a TaN 0.8 -containing tantalum nitride material which is hardly deteriorated and is hardly varied in terms of the resistance value even upon continuous application of a relatively large quantity of an electric power thereto over a long period of time. A substrate for a liquid jet head comprising a support member and an electrothermal converting body disposed above said support member, said electrothermal converting body including a heat generating resistor layer capable of generating a thermal energy and electrodes being electrically connected to said heat generating resistor layer, said electrodes being capable of supplying an electric signal for demanding to generate said thermal energy to said heat generating resistor layer, characterized in that said heat generating resistor layer comprises a film composed of a TaN 0.8 -containing tantalum nitride material. A liquid jet head provided with said substrate for a liquid jet head. A liquid jet apparatus provided with said liquid jet head.

公开(公告)号：EP0925933A3

公开(公告)日：1999-09-01

申请号：EP99200646.0

申请日：1992-04-16

申请人： CANON KABUSHIKI KAISHA

发明人： Matsumoto, Shigeyuki ,  Monma, Genzo ,  Kamei, Seiji ,  Sekine, Yasuhiro ,  Naruse, Yasuhiro ,  Fujita, Kei ,  Akino, Yutaka ,  Hayakawa, Yukihiro

IPC分类号： B41J2/16 ,  H01L21/321

CPC分类号： B41J2/1629 ,  B41J2/14129 ,  B41J2/1604 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/164 ,  B41J2/1642 ,  B41J2202/03 ,  B41J2202/13 ,  H01L21/321 ,  H01L21/32134

摘要： A method for producing a substrate for a recording head wherein a plurality of electro-thermal converting elements, a plurality of driving functional elements for respectively driving the electro-thermal converting elements and a plurality of wiring electrodes for respectively connecting each of the driving functional elements and each of the electro-thermal converting elements are formed on a supporting member of photolithography comprises forming the wiring electrodes by etching a material layer for the wiring electrodes while etchingwise removing a photoresist for masking the material layer for the wiring electrodes.

公开(公告)号：EP0630749A2

公开(公告)日：1994-12-28

申请号：EP94109881.6

申请日：1994-06-27

申请人： CANON KABUSHIKI KAISHA

发明人： Ikeda, Masami ,  Sugitani, Hiroshi ,  Matsumoto, Shigeyuki ,  Naruse, Yasuhiro ,  Makino, Kenji ,  Izumida, Masaaki ,  Tamura, Seiichi

IPC分类号： B41J2/05

CPC分类号： B41J2/14072 ,  B41J2/14129 ,  B41J2202/03

摘要： A heat generating resistor comprised of a film composed of a TaN 0.8 -containing tantalum nitride material which is hardly deteriorated and is hardly varied in terms of the resistance value even upon continuous application of a relatively large quantity of an electric power thereto over a long period of time. A substrate for a liquid jet head comprising a support member and an electrothermal converting body disposed above said support member, said electrothermal converting body including a heat generating resistor layer capable of generating a thermal energy and electrodes being electrically connected to said heat generating resistor layer, said electrodes being capable of supplying an electric signal for demanding to generate said thermal energy to said heat generating resistor layer, characterized in that said heat generating resistor layer comprises a film composed of a TaN 0.8 -containing tantalum nitride material. A liquid jet head provided with said substrate for a liquid jet head. A liquid jet apparatus provided with said liquid jet head.

摘要翻译： 包括一个含TaN0.8的氮化钽材料构成的膜的所有的发热电阻器，其难以被恶化，并在电阻值方面即使在电力的相对大的量的连续向其施加在长时间几乎不改变 一段时间。 一种用于液体喷射头，它包括一个支撑部件的基板和向上述电热所述支撑构件，其设置转换体所述电热转换体包含能产生热能和电极是电连接到所述发热电阻层的发热电阻层， 所述电极能够用于恶劣产生热能到所述发热电阻层，在所述发热电阻层，其特征电信号的供给的包括含TaN0.8的氮化钽材料构成的膜。 设置有所述的液体喷射头用基板的液体喷射头。 设置有所述液体喷射头的液体喷射装置。

公开(公告)号：EP0244081B1

公开(公告)日：1994-01-12

申请号：EP87302587.8

申请日：1987-03-25

申请人： CANON KABUSHIKI KAISHA

发明人： Yonehara, Takao ,  Naruse, Yasuhiro

IPC分类号： C30B25/18 ,  C30B23/02

CPC分类号： H01L29/78 ,  C30B23/002 ,  C30B23/02 ,  C30B25/02 ,  C30B25/105 ,  C30B25/18 ,  C30B29/02 ,  C30B29/04 ,  H01L21/02376 ,  H01L21/02381 ,  H01L21/02395 ,  H01L21/0242 ,  H01L21/02529 ,  H01L21/02532 ,  H01L21/02543 ,  H01L21/0262 ,  H01L21/02639 ,  H01L21/02647 ,  H01L29/78654

摘要： A method for forming a crystal, which comprises applying a crystal forming treatment on a substrate having a free surface on which a deposition surface (SNDS) with a small nucleation density and a deposition surface (SNDL) having a sufficinetly small area for crystal growth only from a single nucleus and having a greater nucleation density (NDL) than the nucleation density (NDS) of said deposition surface (SNDS) are arranged adjacent to each other, thereby growing a single crystal from said single nucleus.

公开(公告)号：EP0476713A3

公开(公告)日：1992-08-05

申请号：EP91118874.6

申请日：1987-03-25

申请人： CANON KABUSHIKI KAISHA

发明人： Yonehara, Takao ,  Naruse, Yasuhiro

IPC分类号： C30B25/18 ,  C30B23/02

CPC分类号： H01L29/78 ,  C30B23/002 ,  C30B23/02 ,  C30B25/02 ,  C30B25/105 ,  C30B25/18 ,  C30B29/02 ,  C30B29/04 ,  H01L21/02376 ,  H01L21/02381 ,  H01L21/02395 ,  H01L21/0242 ,  H01L21/02529 ,  H01L21/02532 ,  H01L21/02543 ,  H01L21/0262 ,  H01L21/02639 ,  H01L21/02647 ,  H01L29/78654

摘要： A method for forming a crystal, which comprises applying a crystal forming treatment on a substrate having a free surface on which a deposition surface (S NDS ) with a small nucleation density and a deposition surface (S NDL ) having a sufficinetly small area for crystal growth only from a single nucleus and having a greater nucleation density (ND L ) than the nucleation density (ND S ) of said deposition surface (S NDS ) are. arranged adjacent to each other, thereby growing a single crystal from said single nucleus.