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1.发明公开Method and apparatus for vacuum processing, semiconductor device manufacturing method and semiconductor device 审中-公开用于真空处理，制造半导体装置及半导体装置的方法的方法和装置
公开(公告)号：EP1215710A3
公开(公告)日：2014-10-15
申请号：EP01129556.5
申请日：2001-12-11
发明人： Aoki, Makoto , Shirasuna, Toshiyasu , Niino, Hiroaki , Akiyama, Kazuyoshi , Murayama, Hitoshi , Tsuchida, Shinji , Tazawa, Daisuke , Abe, Yukihiro
CPC分类号： H01J37/32174 , G03G5/08278 , H01J37/32082 , H01J37/32165 , H01J37/32183 , H01J37/32568
摘要： A vacuum processing method including placing an article to be processed in a reaction container and simultaneously supplying at least two high-frequency powers having different frequencies to the same high-frequency electrode to generate plasma in the reaction container by the high-frequency powers introduced into the reaction container from the high-frequency electrode. The frequencies and power values of the at least two high-frequency powers supplied satisfy the required relationship. Also, disclosed are a semiconductor device manufacturing method, a semiconductor device and a vacuum processing apparatus.
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2.发明授权
公开(公告)号：EP2328031B1
公开(公告)日：2016-09-14
申请号：EP10192337.3
申请日：2010-11-24
CPC分类号： G03G5/0433 , G03G5/0507 , G03G5/08242 , G03G5/14704
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公开(公告)号：EP2322993A2
公开(公告)日：2011-05-18
申请号：EP10191359.8
申请日：2010-11-16
CPC分类号： G03G5/08235 , G03G5/0433 , G03G5/144 , G03G5/14704
摘要： The present invention provides: an electrophotographic photosensitive member which has a photoconductive layer, an intermediate layer and a surface layer, wherein when the Si+C atom density in the surface layer is represented by D S × 10 22 atoms /cm 3 , the D S is 6.60 or more, and when the maximal value of H/(Si+H) in a distribution of hydrogen quantity in the photoconductive layer in a layer thickness direction is represented by H Pmax , the average value of the H/(Si+H) in the second photoconductive region is represented by H P2 , the D S and the H P2 satisfy the following expression (1) and the D S and the H Pmax satisfy the following expression (2); and an electrophotographic apparatus having the electrophotographic photosensitive member. H P 2 ≥ 0.07 × D S - 0.38 H Pmax ≤ - 0.04 × D S + 0.60
摘要翻译： 本发明提供：具有光电导层，中间层和表面层的电子照相感光构件，其中当表面层中的Si + C原子密度以DS×10 22原子/ cm 3表示时，DS为 6.60以上，并且当层厚方向的光导电层中的氢量分布中的H /（Si + H）的最大值由H Pmax表示时，H /（Si + H） 在第二光电导区域由H P2表示，DS和H P2满足以下表达式（1），并且DS和H Pmax满足以下表达式（2）; 以及具有电子照相感光构件的电子照相设备。 H P ¢2‰¥0.07×D S - 0.38 H Pmax‰¤-0.04×D S + 0.60
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4.发明授权
公开(公告)号：EP2322993B1
公开(公告)日：2017-01-11
申请号：EP10191359.8
申请日：2010-11-16
CPC分类号： G03G5/08235 , G03G5/0433 , G03G5/144 , G03G5/14704
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5.发明公开Method and apparatus for vacuum processing, semiconductor device manufacturing method and semiconductor device 审中-公开用于真空处理，制造半导体装置及半导体装置的方法的方法和装置
公开(公告)号：EP1215710A2
公开(公告)日：2002-06-19
申请号：EP01129556.5
申请日：2001-12-11
发明人： Aoki, Makoto , Shirasuna, Toshiyasu , Niino, Hiroaki , Akiyama, Kazuyoshi , Murayama, Hitoshi , Tsuchida, Shinji , Tazawa, Daisuke , Abe, Yukihiro
IPC分类号： H01J37/32
CPC分类号： H01J37/32174 , G03G5/08278 , H01J37/32082 , H01J37/32165 , H01J37/32183 , H01J37/32568
摘要： A vacuum processing method including placing an article to be processed in a reaction container and simultaneously supplying at least two high-frequency powers having different frequencies to the same high-frequency electrode to generate plasma in the reaction container by the high-frequency powers introduced into the reaction container from the high-frequency electrode. The frequencies and power values of the at least two high-frequency powers supplied satisfy the required relationship. Also, disclosed are a semiconductor device manufacturing method, a semiconductor device and a vacuum processing apparatus.
摘要翻译： 在反应容器中待处理的真空处理方法，包括物品的放置和同时供给具有不同频率，以相同的高频电极通过引入高频功率，以产生在反应容器等离子体至少两个高频功率 从高频电极的反应容器中。 的频率和提供所述至少两个高频功率的功率值满足所需的关系。 所以，光盘游离缺失是一个半导体器件的制造方法，半导体装置和一个真空处理装置。
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公开(公告)号：EP2574986B1
公开(公告)日：2018-06-27
申请号：EP12186295.7
申请日：2012-09-27
发明人： Tazawa, Daisuke , Ozawa, Tomohito , Ueno, Takanori
CPC分类号： G03G15/75 , G03G15/0258
摘要： The present invention provides an electrophotographic apparatus which suppresses the unevenness of image density, even though the electrophotographic apparatus has no heater for an electrophotographic photosensitive member. For this purpose, the electrophotographic photosensitive member is arranged in the electrophotographic apparatus so that when the electrophotographic photosensitive member is equally divided into two regions in a cylindrical shaft direction, absolute values of a temperature dependence of photosensitive-member characteristics in the two regions are not the same, and when a region out of the two regions which has a smaller absolute value of the temperature dependence of the photosensitive-member characteristics is defined as a first region, and a region which has a larger absolute value of the temperature dependence of the photosensitive-member characteristics is defined as a second region, the change of a surface temperature of the first region becomes larger than the change of a surface temperature of the second region when an image is formed by the electrophotographic apparatus.
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公开(公告)号：EP2574986A3
公开(公告)日：2014-05-21
申请号：EP12186295.7
申请日：2012-09-27
发明人： Tazawa, Daisuke , Ozawa, Tomohito , Ueno, Takanori
CPC分类号： G03G15/75 , G03G15/0258
摘要： The present invention provides an electrophotographic apparatus which suppresses the unevenness of image density, even though the electrophotographic apparatus has no heater for an electrophotographic photosensitive member. For this purpose, the electrophotographic photosensitive member is arranged in the electrophotographic apparatus so that when the electrophotographic photosensitive member is equally divided into two regions in a cylindrical shaft direction, absolute values of a temperature dependence of photosensitive-member characteristics in the two regions are not the same, and when a region out of the two regions which has a smaller absolute value of the temperature dependence of the photosensitive-member characteristics is defined as a first region, and a region which has a larger absolute value of the temperature dependence of the photosensitive-member characteristics is defined as a second region, the change of a surface temperature of the first region becomes larger than the change of a surface temperature of the second region when an image is formed by the electrophotographic apparatus.
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公开(公告)号：EP0898203B1
公开(公告)日：2005-03-16
申请号：EP98115849.6
申请日：1998-08-21
IPC分类号： G03G5/082
CPC分类号： G03G5/08235 , G03G5/08242
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公开(公告)号：EP2574986A2
公开(公告)日：2013-04-03
申请号：EP12186295.7
申请日：2012-09-27
发明人： Tazawa, Daisuke , Ozawa, Tomohito , Ueno, Takanori
CPC分类号： G03G15/75 , G03G15/0258
摘要： The present invention provides an electrophotographic apparatus which suppresses the unevenness of image density, even though the electrophotographic apparatus has no heater for an electrophotographic photosensitive member. For this purpose, the electrophotographic photosensitive member is arranged in the electrophotographic apparatus so that when the electrophotographic photosensitive member is equally divided into two regions in a cylindrical shaft direction, absolute values of a temperature dependence of photosensitive-member characteristics in the two regions are not the same, and when a region out of the two regions which has a smaller absolute value of the temperature dependence of the photosensitive-member characteristics is defined as a first region, and a region which has a larger absolute value of the temperature dependence of the photosensitive-member characteristics is defined as a second region, the change of a surface temperature of the first region becomes larger than the change of a surface temperature of the second region when an image is formed by the electrophotographic apparatus.
摘要翻译： 本发明提供了即使电子照相设备没有用于电子照相感光构件的加热器来抑制图像浓度不均匀的电子照相设备。 为此目的，将电子照相感光构件设置在电子照相设备中，使得当电子照相感光构件在圆柱轴方向上等分成两个区域时，两个区域中的感光构件特性的温度依赖性的绝对值不是 并且当将具有较小的感光构件特性的温度依赖性的绝对值较小的两个区域中的区域定义为第一区域时，并且具有较高的温度依赖性绝对值的区域 感光构件特性被定义为第二区域，当由电子照相设备形成图像时，第一区域的表面温度的变化变得大于第二区域的表面温度的变化。
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10.发明公开
公开(公告)号：EP2322993A3
公开(公告)日：2012-10-24
申请号：EP10191359.8
申请日：2010-11-16
CPC分类号： G03G5/08235 , G03G5/0433 , G03G5/144 , G03G5/14704
摘要： The present invention provides: an electrophotographic photosensitive member which has a photoconductive layer, an intermediate layer and a surface layer, wherein when the Si+C atom density in the surface layer is represented by D S × 10 22 atoms /cm 3 , the D S is 6.60 or more, and when the maximal value of H/(Si+H) in a distribution of hydrogen quantity in the photoconductive layer in a layer thickness direction is represented by H Pmax , the average value of the H/(Si+H) in the second photoconductive region is represented by H P2 , the D S and the H P2 satisfy the following expression (1) and the D S and the H Pmax satisfy the following expression (2); and an electrophotographic apparatus having the electrophotographic photosensitive member. H P 2 ≥ 0.07 × D S - 0.38 H Pmax ≤ - 0.04 × D S + 0.60
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