DOPANT PROFILE CONTROL FOR HIGH SPEED SILICON-BASED OPTICAL MODULATORS
    2.
    发明公开
    DOPANT PROFILE CONTROL FOR HIGH SPEED SILICON-BASED OPTICAL MODULATORS 审中-公开
    兴奋剂调剖用于光学HIGH-SPEED调节剂对硅基

    公开(公告)号:EP2545401A4

    公开(公告)日:2014-03-05

    申请号:EP11753780

    申请日:2011-02-22

    Applicant: CISCO TECH INC

    CPC classification number: G02B6/12 G02B6/26 G02B26/00 G02F1/025

    Abstract: A high speed silicon-based optical modulator with control of the dopant profiles in the body and gate regions of the device reduces the series resistance of the structure without incurring substantial optical power loss. That is, the use of increased dopant values in areas beyond the active region will allow for the series resistance to be reduced (and thus increase the modulating speed of the device) without incurring too large a penalty in signal loss. The dopant profiles within the gate and body regions are tailored to exhibit an intermediate value between the high dopant concentration in the contact areas and the low dopant concentration in the carrier integration window area.

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