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1.发明公开PREPARATION OF FRACTIONATED NOVOLAK RESINS BY A NOVEL EXTRACTION TECHNIQUE 审中-公开MANUFACTURING分馏的线型酚醛树脂，新的提取工艺
公开(公告)号：EP1133715A2
公开(公告)日：2001-09-19
申请号：EP99970846.4
申请日：1999-11-03
CPC分类号： G03F7/0236
摘要： The present invention provides a method for producing a film forming, fractionated novolak resin having consistent molecular weight and reduced polydispersity, by isolating such novolak resin fractions in a continuous fractionation and separation method using a liquid/liquid centrifuge, thereby reducing processing time and isolation steps which can cause undesirable changes in the novolak resin. A method is also provided for producing photoresist composition from such a fractionated novolak resin and for producing semiconductor devices using such a photoresist composition.
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